22 nanometer

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The 22 nanometer (22 nm) node is the process step following the 32 nm in MOSFET (CMOS) semiconductor device fabrication. The typical half-pitch (i.e., half the distance between identical features in an array) for a memory cell using the process is around 22 nm. It was first demonstrated by semiconductor companies for use in RAM memory in 2008. In 2010, Toshiba began shipping 24 nm flash memory chips, and Samsung Electronics began mass-producing 20 nm flash memory chips. The first consumer-level CPU deliveries using a 22 nm process started in April 2012.

The 32 nanometer (32 nm) node is the step following the 45 nanometer process in CMOS (MOSFET) semiconductor device fabrication. "32 nanometer" refers to the average half-pitch of a memory cell at this technology level. Toshiba produced commercial 32 Gb NAND flash memory chips with the 32 nm process in 2009. Intel and AMD produced commercial microchips using the 32 nanometer process in the early 2010s. IBM and the Common Platform also developed a 32 nm high-κ metal gate process. Intel began selling its first 32 nm processors using the Westmere architecture on 7 January 2010.

MOSFET Transistor used for amplifying or switching electronic signals.

The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET), also known as the metal–oxide–silicon transistor (MOS transistor, or MOS), is a type of field-effect transistor that is fabricated by the controlled oxidation of a semiconductor, typically silicon. It has an insulated gate, whose voltage determines the conductivity of the device. This ability to change conductivity with the amount of applied voltage can be used for amplifying or switching electronic signals. The MOSFET is the basic building block of modern electronics. Since its invention by Mohamed M. Atalla and Dawon Kahng at Bell Labs in November 1959, the MOSFET has become the most widely manufactured device in history, with an estimated total of 13 sextillion (1.3 × 1022) MOS transistors manufactured between 1960 and 2018.

CMOS Technology for constructing integrated circuits

Complementary metal–oxide–semiconductor (CMOS), also known as complementary-symmetry metal–oxide–semiconductor (COS-MOS), is a type of MOSFET fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFETs for logic functions. CMOS technology is used for constructing integrated circuits (ICs), including microprocessors, microcontrollers, memory chips, and other digital logic circuits. CMOS technology is also used for analog circuits such as image sensors, data converters, RF circuits, and highly integrated transceivers for many types of communication.


The ITRS 2006 Front End Process Update indicates that equivalent physical oxide thickness will not scale below 0.5 nm (about twice the diameter of a silicon atom), which is the expected value at the 22 nm node. This is an indication that CMOS scaling in this area has reached a wall at this point, possibly disturbing Moore's law.

The International Technology Roadmap for Semiconductors (ITRS) is a set of documents produced by a group of semiconductor industry experts. These experts are representative of the sponsoring organisations which include the Semiconductor Industry Associations of the United States, Europe, Japan, China, South Korea and Taiwan.

Silicon Chemical element with atomic number 14

Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard and brittle crystalline solid with a blue-grey metallic lustre; and it is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic table: carbon is above it; and germanium, tin, and lead are below it. It is relatively unreactive. Because of its high chemical affinity for oxygen, it was not until 1823 that Jöns Jakob Berzelius was first able to prepare it and characterize it in pure form. Its melting and boiling points of 1414 °C and 3265 °C respectively are the second-highest among all the metalloids and nonmetals, being only surpassed by boron. Silicon is the eighth most common element in the universe by mass, but very rarely occurs as the pure element in the Earth's crust. It is most widely distributed in dusts, sands, planetoids, and planets as various forms of silicon dioxide (silica) or silicates. More than 90% of the Earth's crust is composed of silicate minerals, making silicon the second most abundant element in the Earth's crust after oxygen.

Atom smallest unit of a chemical element

An atom is the smallest constituent unit of ordinary matter that constitutes a chemical element. Every solid, liquid, gas, and plasma is composed of neutral or ionized atoms. Atoms are extremely small; typical sizes are around 100 picometers. They are so small that accurately predicting their behavior using classical physics – as if they were billiard balls, for example – is not possible. This is due to quantum effects. Current atomic models now use quantum principles to better explain and predict this behavior.

20 nanometer is an intermediate half-node die shrink based on the 22 nanometer process.

The term die shrink refers to the scaling of metal-oxide-semiconductor (MOS) devices. The act of shrinking a die is to create a somewhat identical circuit using a more advanced fabrication process, usually involving an advance of lithographic nodes. This reduces overall costs for a chip company, as the absence of major architectural changes to the processor lowers research and development costs, while at the same time allowing more processor dies to be manufactured on the same piece of silicon wafer, resulting in less cost per product sold.

TSMC began mass production of 20 nm nodes in 2014. [1] The 22 nm process was superseded by commercial 14 nm FinFET technology in 2014.

TSMC Taiwanese semiconductor foundry company

Taiwan Semiconductor Manufacturing Company, Limited, also known as Taiwan Semiconductor, is the world's largest dedicated independent (pure-play) semiconductor foundry, with its headquarters and main operations located in the Hsinchu Science and Industrial Park in Hsinchu, Taiwan.

The 14 nanometer MOSFET technology node is the successor to the 22 nm/(20 nm) node. The 14 nm was so named by the International Technology Roadmap for Semiconductors (ITRS). One nanometer (nm) is one billionth of a meter. Until about 2011, the node following 22 nm was expected to be 16 nm. All 14 nm nodes use FinFET technology, a type of multi-gate MOSFET technology that is a non-planar evolution of planar silicon CMOS technology.

FinFET semiconductor manufacturing process

A fin field-effect transistor (FinFET) is a multigate device, a MOSFET built on a substrate where the gate is placed on two, three, or four sides of the channel or wrapped around the channel, forming a double gate structure. These devices have been given the generic name "finfets" because the source/drain region forms fins on the silicon surface. The FinFET devices have significantly faster switching times and higher current density than planar CMOS technology.

Technology demos

In 1998, FinFET devices down to 17 nm were demonstrated by an international team of researchers working at UC Berkeley, led by Digh Hisamoto from Japan's Hitachi Central Research Laboratory and Chenming Hu from the Taiwan Semiconductor Manufacturing Company (TSMC), along with Wen-Chin Lee, Jakub Kedzierski, Erik Anderson, Hideki Takeuchi, Kazuya Asano, Tsu-Jae King Liu and Jeffrey Bokor. [2] In December 2000, a 20 nm FinFET process was demonstrated by the same research team. [3]

University of California, Berkeley Public university in California, USA

The University of California, Berkeley is a public research university in Berkeley, California. It was founded in 1868 and serves as the flagship campus of the ten campuses of the University of California. Berkeley has since grown to instruct over 40,000 students in approximately 350 undergraduate and graduate degree programs covering numerous disciplines.

Hitachi Japanese multinational engineering and electronics company

Hitachi, Ltd. is a Japanese multinational conglomerate company headquartered in Chiyoda, Tokyo, Japan. It is the parent company of the Hitachi Group and forms part of the DKB Group of companies. Hitachi is a highly diversified company that operates eleven business segments: Information & Telecommunication Systems, Social Infrastructure, High Functional Materials & Components, Financial Services, Power Systems, Electronic Systems & Equipment, Automotive Systems, Railway & Urban Systems, Digital Media & Consumer Products, Construction Machinery and Other Components & Systems.

Chenming Calvin Hu is a Taiwanese electronic engineer who specializes in microelectronics. He is TSMC Distinguished Professor Emeritus in the electronic engineering and computer science department of the University of California, Berkeley, in the United States. In 2009, the Institute of Electrical and Electronics Engineers described him as a “microelectronics visionary … whose seminal work on metal-oxide semiconductor MOS reliability and device modeling has had enormous impact on the continued scaling of electronic devices”.

On August 18, 2008, AMD, Freescale, IBM, STMicroelectronics, Toshiba, and the College of Nanoscale Science and Engineering (CNSE) announced that they jointly developed and manufactured a 22 nm SRAM cell, built on a traditional six-transistor design on a 300 mm wafer, which had a memory cell size of just 0.1 μm 2. [4] The cell was printed using immersion lithography. [5]

IBM American multinational technology and consulting corporation

International Business Machines Corporation (IBM) is an American multinational information technology company headquartered in Armonk, New York, with operations in over 170 countries. The company began in 1911, founded in Endicott, New York, as the Computing-Tabulating-Recording Company (CTR) and was renamed "International Business Machines" in 1924. IBM is incorporated in New York.

STMicroelectronics French-Italian multinational electronics and semiconductor manufacturer headquartered in Schiphol, Amsterdam (Netherlands)

STMicroelectronics is a French-Italian multinational electronics and semiconductor manufacturer headquartered in Geneva, Switzerland. It is commonly called ST, and it is Europe's largest semiconductor chip maker based on revenue. While STMicroelectronics corporate headquarters and the headquarters for EMEA region are based in Geneva, the holding company, STMicroelectronics N.V. is registered in Amsterdam, Netherlands.

Toshiba Japanese multinational electronics, electrical equipment and information technology corporation

Toshiba Corporation is a Japanese multinational conglomerate headquartered in Tokyo, Japan. Its diversified products and services include information technology and communications equipment and systems, electronic components and materials, power systems, industrial and social infrastructure systems, consumer electronics, home appliances, medical equipment, office equipment, as well as lighting and logistics.

The 22 nm node may be the first time where the gate length is not necessarily smaller than the technology node designation. For example, a 25 nm gate length would be typical for the 22 nm node.

On September 22, 2009, during the Intel Developer Forum Fall 2009, Intel showed a 22 nm wafer and announced that chips with 22 nm technology would be available in the second half of 2011. [6] SRAM cell size is said to be 0.092 μm2, smallest reported to date.

On January 3, 2010, Intel and Micron Technology announced the first in a family of 25 nm NAND devices.

On May 2, 2011, Intel announced its first 22 nm microprocessor, codenamed Ivy Bridge, using a FinFET technology called 3-D Tri-Gate. [7]

IBM's POWER8 processors are produced in a 22 nm SOI process. [8]

Shipped devices

Related Research Articles

Moores law Heuristic law stating that the number of transistors on a integrated circuit doubles every two years

Moore's law is the observation that the number of transistors in a dense integrated circuit doubles about every two years. The observation is named after Gordon Moore, the co-founder of Fairchild Semiconductor and CEO of Intel, whose 1965 paper described a doubling every year in the number of components per integrated circuit, and projected this rate of growth would continue for at least another decade. In 1975, looking forward to the next decade, he revised the forecast to doubling every two years, a compound annual growth rate (CAGR) of 41.4%.

Flash memory Electronic non-volatile computer storage device

Flash memory is an electronic (solid-state) non-volatile computer memory storage medium that can be electrically erased and reprogrammed. The two main types of flash memory are named after the NAND and NOR logic gates. The individual flash memory cells, consisting of floating-gate MOSFETs, exhibit internal characteristics similar to those of the corresponding gates.

In semiconductor manufacturing, Silicon on insulator (SOI) technology is fabrication of silicon semiconductor devices in a layered silicon–insulator–silicon substrate, to reduce parasitic capacitance within the device, thereby improving performance. SOI-based devices differ from conventional silicon-built devices in that the silicon junction is above an electrical insulator, typically silicon dioxide or sapphire. The choice of insulator depends largely on intended application, with sapphire being used for high-performance radio frequency (RF) and radiation-sensitive applications, and silicon dioxide for diminished short-channel effects in other microelectronics devices. The insulating layer and topmost silicon layer also vary widely with application.

The 90 nanometer (90 nm) process refers to the level of MOSFET (CMOS) fabrication process technology that was commercialized by the 2003–2005 timeframe, by leading semiconductor companies like Toshiba, Sony, Samsung, IBM, Intel, Fujitsu, TSMC, Elpida, AMD, Infineon, Texas Instruments and Micron Technology.

Transistor count the number of transistors in a device

The transistor count is the number of transistors on an integrated circuit (IC). It typically refers to the number of MOSFETs on an IC chip, as all modern ICs use MOSFETs. It is the most common measure of IC complexity. The rate at which MOS transistor counts have increased generally follows Moore's law, which observed that the transistor count doubles approximately every two years.

Charge trap flash (CTF) is a semiconductor memory technology used in creating non-volatile NOR and NAND flash memory. The technology differs from the more conventional floating-gate MOSFET technology in that it uses a silicon nitride film to store electrons rather than the doped polycrystalline silicon typical of a floating gate structure. This approach allows memory manufacturers to reduce manufacturing costs five ways:

  1. Fewer process steps are required to form a charge storage node
  2. Smaller process geometries can be used
  3. Multiple bits can be stored on a single flash memory cell.
  4. Improved reliability
  5. Higher yield since the charge trap is less susceptible to point defects in the tunnel oxide layer

Nanoelectronics refers to the use of nanotechnology in electronic components. The term covers a diverse set of devices and materials, with the common characteristic that they are so small that inter-atomic interactions and quantum mechanical properties need to be studied extensively. Some of these candidates include: hybrid molecular/semiconductor electronics, one-dimensional nanotubes/nanowires or advanced molecular electronics.

Multigate device type of MOS field-effect transistor with more than one gate

A multigate device, multi-gate MOSFET or multi-gate field-effect transistor (MuGFET) refers to a MOSFET that incorporates more than one gate into a single device. The multiple gates may be controlled by a single gate electrode, wherein the multiple gate surfaces act electrically as a single gate, or by independent gate electrodes. A multigate device employing independent gate electrodes is sometimes called a multiple-independent-gate field-effect transistor (MIGFET). The most widely used multi-gate devices are the FinFET and the GAAFET, which are non-planar transistors, or 3D transistors.

Nanocircuits are electrical circuits operating on the nanometer scale. This is well into the quantum realm, where quantum mechanical effects become very important. One nanometer is equal to 10−9 meters or a row of 10 hydrogen atoms. With such progressively smaller circuits, more can be fitted on a computer chip. This allows faster and more complex functions using less power. Nanocircuits are composed of three different fundamental components. These are transistors, interconnections, and architecture, all fabricated on the nanometer scale.

In semiconductor fabrication, the International Technology Roadmap for Semiconductors (ITRS) defines the 10 nanometer (10 nm) node as the MOSFET technology node following the 14 nm node. "10 nm class" denotes chips made using process technologies between 10 and 20 nanometers.

Per the International Technology Roadmap for Semiconductors, the 45 nanometer (45 nm) MOSFET technology node should refer to the average half-pitch of a memory cell manufactured at around the 2007–2008 time frame.

In semiconductor manufacturing, the International Roadmap for Devices and Systems defines the 5 nanometer (5 nm) node as the MOSFET technology node following the 7 nm node. As of 2019, Samsung Electronics and TSMC have begun commercial production of 5 nm nodes.

In semiconductor manufacturing, the International Technology Roadmap for Semiconductors defines the 7 nanometer (7 nm) node as the MOSFET technology node following the 10 nm node. It is based on FinFET technology, a type of multi-gate MOSFET technology.

In semiconductor manufacturing, 3 nanometer, usually abbreviated 3 nm, is the next die shrink after the 5 nanometer MOSFET technology node. As of 2019, Samsung and TSMC have announced plans to put a 3nm semiconductor node into commercial production. It is based on GAAFET technology, a type of multi-gate MOSFET technology.


  1. "20nm Technology". TSMC . Retrieved 30 June 2019.
  2. Tsu‐Jae King, Liu (June 11, 2012). "FinFET: History, Fundamentals and Future". University of California, Berkeley . Symposium on VLSI Technology Short Course. Retrieved 9 July 2019.
  3. Hisamoto, Digh; Hu, Chenming; et al. (December 2000). "FinFET-a self-aligned double-gate MOSFET scalable to 20 nm". IEEE Transactions on Electron Devices. 47 (12): 2320–2325. CiteSeerX . doi:10.1109/16.887014.
  4. "TG Daily news report". Archived from the original on 2008-08-19. Retrieved 2008-08-18.
  5. EETimes news report
  6. Intel announces 22nm chips for 2011
  7. Intel 22nm 3-D Tri-Gate Transistor Technology
  8. IBM opens Power8 kimono (a little bit more)
  9. Toshiba launches 24nm process NAND flash memory
  10. "History". Samsung Electronics . Samsung . Retrieved 19 June 2019.
  11. "History: 2010s". SK Hynix . Retrieved 8 July 2019.
  12. Intel launches Ivy Bridge...
  13. Tom's Hardware: Intel to Sell Ivy Bridge Late in Q4 2011
  14. "4th Generation Intel® Core™ Processors Coming Soon". Archived from the original on 2015-02-09. Retrieved 2013-04-27.
Preceded by
32 nm (CMOS)
MOSFET manufacturing processes Succeeded by
14 nm (FinFET)