Journal of Micro/Nanopatterning, Materials, and Metrology

*Journal of Micro/Nanopatterning, Materials, and Metrology*
Discipline	Microlithography, nanolithography, metrology
Language	English
Edited by	Harry Levinson
Publication details
Former name(s)	Journal of Microlithography, Microfabrication, and Microsystems (2002–2006); Journal of Micro/Nanolithography, MEMS, and MOEMS (2007–2020);
History	2002–present
Publisher	SPIE
Frequency	Quarterly
Impact factor	3.4 (2023)
Standard abbreviations;
ISO 4	J. Micro/Nanopatterning Mater. Metrol.
Indexing;
CODEN	JMMMIH
ISSN	1932-5150 (print); 2708-8340 (web);
OCLC no.	1249108189
Links
	Journal homepage ; Online access ; Online archive ;

Last updated April 01, 2025

Abstracting and indexing

The journal is abstracted and indexed in:

Current Contents/Electronics & Telecommunications Collection^[3]
Current Contents/Engineering, Computing & Technology^[3]
Current Contents/Physical, Chemical & Earth Sciences^[3]
EBSCO databases ^[4]
Ei Compendex ^[5]
Inspec ^[6]
Science Citation Index Expanded ^[3]
Scopus ^[7]

According to the Journal Citation Reports , the journal has a 2023 impact factor of 3.4.^[8]

References

1 2 "Journal of Micro/Nanopatterning, Materials, and Metrology". SPIE. Retrieved May 22, 2024.
↑ Journal of Micro/Nanopatterning, Materials, and Metrology (JMMMIH; 2708-8340)– via CASSI
1 2 3 4 "Web of Science Master Journal List". Intellectual Property & Science. Clarivate . Retrieved May 22, 2024.
↑ "Journal of Micro/Nanopatterning, Materials, and Metrology". MIAR: Information Matrix for the Analysis of Journals. University of Barcelona . Retrieved May 22, 2024.
↑ "Content/Database Overview - Compendex Source List". Engineering Village. Elsevier . Retrieved May 22, 2024.
↑ "Inspec list of journals" (PDF). Inspec. Institution of Engineering and Technology. Archived from the original (PDF) on May 5, 2022. Retrieved May 22, 2024.
↑ "Journal of Micro/Nanopatterning, Materials, and Metrology". Scopus Preview. Elsevier . Retrieved May 22, 2024.
↑ "Journal of Micro/Nanopatterning, Materials, and Metrology". 2023 Journal Citation Reports (Science ed.). Clarivate. 2024 – via Web of Science.

External links

Official website

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[journal-1] 1 2 "Journal of Micro/Nanopatterning, Materials, and Metrology". SPIE. Retrieved May 22, 2024.

[2] Journal of Micro/Nanopatterning, Materials, and Metrology (JMMMIH; 2708-8340)– via CASSI

[ISI-3] 1 2 3 4 "Web of Science Master Journal List". Intellectual Property & Science. Clarivate . Retrieved May 22, 2024.

[MIAR-4] "Journal of Micro/Nanopatterning, Materials, and Metrology". MIAR: Information Matrix for the Analysis of Journals. University of Barcelona . Retrieved May 22, 2024.

[Compendex-5] "Content/Database Overview - Compendex Source List". Engineering Village. Elsevier . Retrieved May 22, 2024.

[Inspec-6] "Inspec list of journals" (PDF). Inspec. Institution of Engineering and Technology. Archived from the original (PDF) on May 5, 2022. Retrieved May 22, 2024.

[Scopus-7] "Journal of Micro/Nanopatterning, Materials, and Metrology". Scopus Preview. Elsevier . Retrieved May 22, 2024.

[WoS-8] "Journal of Micro/Nanopatterning, Materials, and Metrology". 2023 Journal Citation Reports (Science ed.). Clarivate. 2024 – via Web of Science.

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Journal of Micro/Nanopatterning, Materials, and Metrology

Contents

Abstracting and indexing

References

External links