A vacuum pump is a type of pump device that draws gas particles from a sealed volume in order to leave behind a partial vacuum. The first vacuum pump was invented in 1650 by Otto von Guericke, and was preceded by the suction pump, which dates to antiquity. [1]
The predecessor to the vacuum pump was the suction pump. Dual-action suction pumps were found in the city of Pompeii. [2] Arabic engineer Al-Jazari later described dual-action suction pumps as part of water-raising machines in the 13th century. He also said that a suction pump was used in siphons to discharge Greek fire. [3] The suction pump later appeared in medieval Europe from the 15th century. [3] [4] [5]
By the 17th century, water pump designs had improved to the point that they produced measurable vacuums, but this was not immediately understood. What was known was that suction pumps could not pull water beyond a certain height: 18 Florentine yards according to a measurement taken around 1635, or about 34 feet (10 m). [6] This limit was a concern in irrigation projects, mine drainage, and decorative water fountains planned by the Duke of Tuscany, so the duke commissioned Galileo Galilei to investigate the problem. Galileo suggested, incorrectly, in his Two New Sciences (1638) that the column of a water pump will break of its own weight when the water has been lifted to 34 feet. [6] Other scientists took up the challenge, including Gasparo Berti, who replicated it by building the first water barometer in Rome in 1639. [7] Berti's barometer produced a vacuum above the water column, but he could not explain it. A breakthrough was made by Galileo's student Evangelista Torricelli in 1643. Building upon Galileo's notes, he built the first mercury barometer and wrote a convincing argument that the space at the top was a vacuum. The height of the column was then limited to the maximum weight that atmospheric pressure could support; this is the limiting height of a suction pump. [8]
In 1650, Otto von Guericke invented the first vacuum pump. [9] Four years later, he conducted his famous Magdeburg hemispheres experiment, showing that teams of horses could not separate two hemispheres from which the air had been evacuated. Robert Boyle improved Guericke's design and conducted experiments on the properties of vacuum. Robert Hooke also helped Boyle produce an air pump that helped to produce the vacuum.
By 1709, Francis Hauksbee improved on the design further with his two-cylinder pump, where two pistons worked via a rack-and-pinion design that reportedly "gave a vacuum within about one inch of mercury of perfect." [10] This design remained popular and only slightly changed until well into the nineteenth century. [10]
Heinrich Geissler invented the mercury displacement pump in 1855 [10] and achieved a record vacuum of about 10 Pa (0.1 Torr). A number of electrical properties become observable at this vacuum level, and this renewed interest in vacuum. This, in turn, led to the development of the vacuum tube. [11] The Sprengel pump was a widely used vacuum producer of this time. [10]
The early 20th century saw the invention of many types of vacuum pump, including the molecular drag pump, [10] the diffusion pump, [12] and the turbomolecular pump. [13]
Pumps can be broadly categorized according to three techniques: positive displacement, momentum transfer, and entrapment. [14] [15] [16] Positive displacement pumps use a mechanism to repeatedly expand a cavity, allow gases to flow in from the chamber, seal off the cavity, and exhaust it to the atmosphere. Momentum transfer pumps, also called molecular pumps, use high-speed jets of dense fluid or high-speed rotating blades to knock gas molecules out of the chamber. Entrapment pumps capture gases in a solid or adsorbed state; this includes cryopumps, getters, and ion pumps. [14] [15]
Positive displacement pumps are the most effective for low vacuums. Momentum transfer pumps, in conjunction with one or two positive displacement pumps, are the most common configuration used to achieve high vacuums. In this configuration the positive displacement pump serves two purposes. First it obtains a rough vacuum in the vessel being evacuated before the momentum transfer pump can be used to obtain the high vacuum, as momentum transfer pumps cannot start pumping at atmospheric pressures. Second the positive displacement pump backs up the momentum transfer pump by evacuating to low vacuum the accumulation of displaced molecules in the high vacuum pump. Entrapment pumps can be added to reach ultrahigh vacuums, but they require periodic regeneration of the surfaces that trap air molecules or ions. Due to this requirement their available operational time can be unacceptably short in low and high vacuums, thus limiting their use to ultrahigh vacuums. Pumps also differ in details like manufacturing tolerances, sealing material, pressure, flow, admission or no admission of oil vapor, service intervals, reliability, tolerance to dust, tolerance to chemicals, tolerance to liquids and vibration. [14] [15] [16]
A partial vacuum may be generated by increasing the volume of a container. To continue evacuating a chamber indefinitely without requiring infinite growth, a compartment of the vacuum can be repeatedly closed off, exhausted, and expanded again. This is the principle behind a positive displacement pump, for example the manual water pump. Inside the pump, a mechanism expands a small sealed cavity to reduce its pressure below that of the atmosphere. Because of the pressure differential, some fluid from the chamber (or the well, in our example) is pushed into the pump's small cavity. The pump's cavity is then sealed from the chamber, opened to the atmosphere, and squeezed back to a minute size. [14] [16]
More sophisticated systems are used for most industrial applications, but the basic principle of cyclic volume removal is the same: [17] [18]
The base pressure of a rubber- and plastic-sealed piston pump system is typically 1 to 50 kPa, while a scroll pump might reach 10 Pa (when new) and a rotary vane oil pump with a clean and empty metallic chamber can easily achieve 0.1 Pa.
A positive displacement vacuum pump moves the same volume of gas with each cycle, so its pumping speed is constant unless it is overcome by backstreaming.
In a momentum transfer pump (or kinetic pump [16] ), gas molecules are accelerated from the vacuum side to the exhaust side (which is usually maintained at a reduced pressure by a positive displacement pump). Momentum transfer pumping is only possible below pressures of about 0.1 kPa. Matter flows differently at different pressures based on the laws of fluid dynamics. At atmospheric pressure and mild vacuums, molecules interact with each other and push on their neighboring molecules in what is known as viscous flow. When the distance between the molecules increases, the molecules interact with the walls of the chamber more often than with the other molecules, and molecular pumping becomes more effective than positive displacement pumping. This regime is generally called high vacuum. [14] [16]
Molecular pumps sweep out a larger area than mechanical pumps, and do so more frequently, making them capable of much higher pumping speeds. They do this at the expense of the seal between the vacuum and their exhaust. Since there is no seal, a small pressure at the exhaust can easily cause backstreaming through the pump; this is called stall. In high vacuum, however, pressure gradients have little effect on fluid flows, and molecular pumps can attain their full potential.
The two main types of molecular pumps are the diffusion pump and the turbomolecular pump. Both types of pumps blow out gas molecules that diffuse into the pump by imparting momentum to the gas molecules. Diffusion pumps blow out gas molecules with jets of an oil or mercury vapor, while turbomolecular pumps use high speed fans to push the gas. Both of these pumps will stall and fail to pump if exhausted directly to atmospheric pressure, so they must be exhausted to a lower grade vacuum created by a mechanical pump, in this case called a backing pump. [16]
As with positive displacement pumps, the base pressure will be reached when leakage, outgassing, and backstreaming equal the pump speed, but now minimizing leakage and outgassing to a level comparable to backstreaming becomes much more difficult.
An entrapment pump may be a cryopump, which uses cold temperatures to condense gases to a solid or adsorbed state, a chemical pump, which reacts with gases to produce a solid residue, or an ion pump, which uses strong electrical fields to ionize gases and propel the ions into a solid substrate. A cryomodule uses cryopumping. Other types are the sorption pump, non-evaporative getter pump, and titanium sublimation pump (a type of evaporative getter that can be used repeatedly). [14] [15]
Regenerative pumps utilize vortex behavior of the fluid (air). The construction is based on hybrid concept of centrifugal pump and turbopump. Usually it consists of several sets of perpendicular teeth on the rotor circulating air molecules inside stationary hollow grooves like multistage centrifugal pump. They can reach to 1×10−5 mbar (0.001 Pa)(when combining with Holweck pump) and directly exhaust to atmospheric pressure. Examples of such pumps are Edwards EPX [19] (technical paper [20] ) and Pfeiffer OnTool™ Booster 150. [21] It is sometimes referred as side channel pump. Due to high pumping rate from atmosphere to high vacuum and less contamination since bearing can be installed at exhaust side, this type of pumps are used in load lock in semiconductor manufacturing processes.
This type of pump suffers from high power consumption(~1 kW) compared to turbomolecular pump (<100W) at low pressure since most power is consumed to back atmospheric pressure. This can be reduced by nearly 10 times by backing with a small pump. [22]
Additional types of pump include the:
Pumping speed refers to the volume flow rate of a pump at its inlet, often measured in volume per unit of time. Momentum transfer and entrapment pumps are more effective on some gases than others, so the pumping rate can be different for each of the gases being pumped, and the average volume flow rate of the pump will vary depending on the chemical composition of the gases remaining in the chamber. [23]
Throughput refers to the pumping speed multiplied by the gas pressure at the inlet, and is measured in units of pressure·volume/unit time. At a constant temperature, throughput is proportional to the number of molecules being pumped per unit time, and therefore to the mass flow rate of the pump. When discussing a leak in the system or backstreaming through the pump, throughput refers to the volume leak rate multiplied by the pressure at the vacuum side of the leak, so the leak throughput can be compared to the pump throughput. [23]
Positive displacement and momentum transfer pumps have a constant volume flow rate (pumping speed), but as the chamber's pressure drops, this volume contains less and less mass. So although the pumping speed remains constant, the throughput and mass flow rate drop exponentially. Meanwhile, the leakage, evaporation, sublimation and backstreaming rates continue to produce a constant throughput into the system. [23]
Vacuum pumps are combined with chambers and operational procedures into a wide variety of vacuum systems. Sometimes more than one pump will be used (in series or in parallel) in a single application. A partial vacuum, or rough vacuum, can be created using a positive displacement pump that transports a gas load from an inlet port to an outlet (exhaust) port. Because of their mechanical limitations, such pumps can only achieve a low vacuum. To achieve a higher vacuum, other techniques must then be used, typically in series (usually following an initial fast pump down with a positive displacement pump). Some examples might be use of an oil sealed rotary vane pump (the most common positive displacement pump) backing a diffusion pump, or a dry scroll pump backing a turbomolecular pump. There are other combinations depending on the level of vacuum being sought.
Achieving high vacuum is difficult because all of the materials exposed to the vacuum must be carefully evaluated for their outgassing and vapor pressure properties. For example, oils, greases, and rubber or plastic gaskets used as seals for the vacuum chamber must not boil off when exposed to the vacuum, or the gases they produce would prevent the creation of the desired degree of vacuum. Often, all of the surfaces exposed to the vacuum must be baked at high temperature to drive off adsorbed gases. [24]
Outgassing can also be reduced simply by desiccation prior to vacuum pumping. [24] High-vacuum systems generally require metal chambers with metal gasket seals such as Klein flanges or ISO flanges, rather than the rubber gaskets more common in low vacuum chamber seals. [25] The system must be clean and free of organic matter to minimize outgassing. All materials, solid or liquid, have a small vapour pressure, and their outgassing becomes important when the vacuum pressure falls below this vapour pressure. As a result, many materials that work well in low vacuums, such as epoxy, will become a source of outgassing at higher vacuums. With these standard precautions, vacuums of 1 mPa are easily achieved with an assortment of molecular pumps. With careful design and operation, 1 µPa is possible.[ citation needed ]
Several types of pumps may be used in sequence or in parallel. In a typical pumpdown sequence, a positive displacement pump would be used to remove most of the gas from a chamber, starting from atmosphere (760 Torr, 101 kPa) to 25 Torr (3 kPa). Then a sorption pump would be used to bring the pressure down to 10−4 Torr (10 mPa). A cryopump or turbomolecular pump would be used to bring the pressure further down to 10−8 Torr (1 µPa). An additional ion pump can be started below 10−6 Torr to remove gases which are not adequately handled by a cryopump or turbo pump, such as helium or hydrogen.[ citation needed ]
Ultra-high vacuum generally requires custom-built equipment, strict operational procedures, and a fair amount of trial-and-error. Ultra-high vacuum systems are usually made of stainless steel with metal-gasketed vacuum flanges. The system is usually baked, preferably under vacuum, to temporarily raise the vapour pressure of all outgassing materials in the system and boil them off. If necessary, this outgassing of the system can also be performed at room temperature, but this takes much more time. Once the bulk of the outgassing materials are boiled off and evacuated, the system may be cooled to lower vapour pressures to minimize residual outgassing during actual operation. Some systems are cooled well below room temperature by liquid nitrogen to shut down residual outgassing and simultaneously cryopump the system. [26]
In ultra-high vacuum systems, some very odd leakage paths and outgassing sources must be considered. The water absorption of aluminium and palladium becomes an unacceptable source of outgassing, and even the absorptivity of hard metals such as stainless steel or titanium must be considered. Some oils and greases will boil off in extreme vacuums. The porosity of the metallic vacuum chamber walls may have to be considered, and the grain direction of the metallic flanges should be parallel to the flange face. [26]
The impact of molecular size must be considered. Smaller molecules can leak in more easily and are more easily absorbed by certain materials, and molecular pumps are less effective at pumping gases with lower molecular weights. A system may be able to evacuate nitrogen (the main component of air) to the desired vacuum, but the chamber could still be full of residual atmospheric hydrogen and helium. Vessels lined with a highly gas-permeable material such as palladium (which is a high-capacity hydrogen sponge) create special outgassing problems. [26]
Vacuum pumps are used in many industrial and scientific processes, including:
In the field of oil regeneration and re-refining, vacuum pumps create a low vacuum for oil dehydration and a high vacuum for oil purification. [44]
A vacuum may be used to power, or provide assistance to mechanical devices. In hybrid and diesel engine motor vehicles, a pump fitted on the engine (usually on the camshaft) is used to produce a vacuum. In petrol engines, instead, the vacuum is typically obtained as a side-effect of the operation of the engine and the flow restriction created by the throttle plate but may be also supplemented by an electrically operated vacuum pump to boost braking assistance or improve fuel consumption. This vacuum may then be used to power the following motor vehicle components: [45] vacuum servo booster for the hydraulic brakes, motors that move dampers in the ventilation system, throttle driver in the cruise control servomechanism, door locks or trunk releases.
In an aircraft, the vacuum source is often used to power gyroscopes in the various flight instruments. To prevent the complete loss of instrumentation in the event of an electrical failure, the instrument panel is deliberately designed with certain instruments powered by electricity and other instruments powered by the vacuum source.
Depending on the application, some vacuum pumps may either be electrically driven (using electric current) or pneumatically-driven (using air pressure), or powered and actuated by other means. [46] [47] [48] [49]
Old vacuum-pump oils that were produced before circa 1980 often contain a mixture of several different dangerous polychlorinated biphenyls (PCBs), which are highly toxic, carcinogenic, persistent organic pollutants. [50] [51]
Diffusion pumps use a high speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the exhaust. They were the first type of high vacuum pumps operating in the regime of free molecular flow, where the movement of the gas molecules can be better understood as diffusion than by conventional fluid dynamics. Invented in 1915 by Wolfgang Gaede, he named it a diffusion pump since his design was based on the finding that gas cannot diffuse against the vapor stream, but will be carried with it to the exhaust. However, the principle of operation might be more precisely described as gas-jet pump, since diffusion also plays a role in other types of high vacuum pumps. In modern textbooks, the diffusion pump is categorized as a momentum transfer pump.
Pressure measurement is the measurement of an applied force by a fluid on a surface. Pressure is typically measured in units of force per unit of surface area. Many techniques have been developed for the measurement of pressure and vacuum. Instruments used to measure and display pressure mechanically are called pressure gauges,vacuum gauges or compound gauges. The widely used Bourdon gauge is a mechanical device, which both measures and indicates and is probably the best known type of gauge.
A pump is a device that moves fluids, or sometimes slurries, by mechanical action, typically converted from electrical energy into hydraulic energy.
A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface. In a turbomolecular pump, a rapidly spinning fan rotor 'hits' gas molecules from the inlet of the pump towards the exhaust in order to create or maintain a vacuum.
A vacuum is space devoid of matter. The word is derived from the Latin adjective vacuus meaning "vacant" or "void". An approximation to such vacuum is a region with a gaseous pressure much less than atmospheric pressure. Physicists often discuss ideal test results that would occur in a perfect vacuum, which they sometimes simply call "vacuum" or free space, and use the term partial vacuum to refer to an actual imperfect vacuum as one might have in a laboratory or in space. In engineering and applied physics on the other hand, vacuum refers to any space in which the pressure is considerably lower than atmospheric pressure. The Latin term in vacuo is used to describe an object that is surrounded by a vacuum.
A cryopump or a "cryogenic pump" is a vacuum pump that traps gases and vapours by condensing them on a cold surface, but are only effective on some gases. The effectiveness depends on the freezing and boiling points of the gas relative to the cryopump's temperature. They are sometimes used to block particular contaminants, for example in front of a diffusion pump to trap backstreaming oil, or in front of a McLeod gauge to keep out water. In this function, they are called a cryotrap, waterpump or cold trap, even though the physical mechanism is the same as for a cryopump.
The Roots blower is a positive displacement lobe pump which operates by pumping a fluid with a pair of meshing lobes resembling a set of stretched gears. Fluid is trapped in pockets surrounding the lobes and carried from the intake side to the exhaust.
A compressor is a mechanical device that increases the pressure of a gas by reducing its volume. An air compressor is a specific type of gas compressor.
A vacuum ejector, or simply ejector is a type of vacuum pump, which produces vacuum by means of the Venturi effect.
Ultra-high vacuum is the vacuum regime characterised by pressures lower than about 1×10−6 pascals. UHV conditions are created by pumping the gas out of a UHV chamber. At these low pressures the mean free path of a gas molecule is greater than approximately 40 km, so the gas is in free molecular flow, and gas molecules will collide with the chamber walls many times before colliding with each other. Almost all molecular interactions therefore take place on various surfaces in the chamber.
An injector is a system of ducting and nozzles used to direct the flow of a high-pressure fluid in such a way that a lower pressure fluid is entrained in the jet and carried through a duct to a region of higher pressure. It is a fluid-dynamic pump with no moving parts except a valve to control inlet flow.
A helium mass spectrometer is an instrument commonly used to detect and locate small leaks. It was initially developed in the Manhattan Project during World War II to find extremely small leaks in the gas diffusion process of uranium enrichment plants. It typically uses a vacuum chamber in which a sealed container filled with helium is placed. Helium leaks out of the container, and the rate of the leak is detected by a mass spectrometer.
A crankcase ventilation system (CVS) removes unwanted gases from the crankcase of an internal combustion engine. The system usually consists of a tube, a one-way valve and a vacuum source.
An Inductive pump is a magnetically regulated positive displacement pump used to pump liquids and gases. It is capable of handling many corrosive chemicals as well as solvents and gases. It is characterized by a single piston that reciprocates within a magnetic field and therefore doesn’t require a dynamic seal to link the piston to an outside mechanical power source. Check valves are placed at both ends of the piston housing allowing the simultaneous suctioning and pumping that reverses with each stroke. This is known to reduce pulsations especially at higher flow rates. The piston and housing are constructed of materials that are inert to many liquids and gasses. Because the piston and housing are non-plastic materials the positive displacement chamber does not change in dimension from flexing and distortion thus allowing inductive pumps to remain very accurate with no significant changes over time. Inductive pumps are extremely accurate as each stroke contains the same volume created by a solid piston inside a solid chamber. The number of strokes can be counted or timed to determine the total volume delivered. They can be used in sterile and controlled environments as they will not leak to the outside of the housing even if the piston has experienced wear.
A rotary vane pump is a type of positive-displacement pump that consists of vanes mounted to a rotor that rotates inside a cavity. In some cases these vanes can have variable length and/or be tensioned to maintain contact with the walls as the pump rotates.
Vacuum engineering is the field of engineering that deals with the practical use of vacuum in industrial and scientific applications. Vacuum may improve the productivity and performance of processes otherwise carried out at normal air pressure, or may make possible processes that could not be done in the presence of air. Vacuum engineering techniques are widely applied in materials processing such as drying or filtering, chemical processing, application of metal coatings to objects, manufacture of electron devices and incandescent lamps, and in scientific research.
A metering pump moves a precise volume of liquid in a specified time period providing an accurate volumetric flow rate. Delivery of fluids in precise adjustable flow rates is sometimes called metering. The term "metering pump" is based on the application or use rather than the exact kind of pump used, although a couple types of pumps are far more suitable than most other types of pumps.
Free molecular flow describes the fluid dynamics of gas where the mean free path of the molecules is larger than the size of the chamber or of the object under test. For tubes/objects of the size of several cm, this means pressures well below 10−3 mbar. This is also called the regime of high vacuum, or even ultra-high vacuum. This is opposed to viscous flow encountered at higher pressures. The presence of free molecular flow can be calculated, at least in estimation, with the Knudsen number (Kn). If Kn > 10, the system is in free molecular flow, also known as Knudsen flow.
A titanium sublimation pump (TSP) is a type of vacuum pump used to remove residual gas in ultra-high vacuum systems, maintaining the vacuum.
Edwards Ltd is a British multinational vacuum pump and exhaust gas management systems manufacturer. Its headquarters are in Burgess Hill, UK, and has been part of the Atlas Copco Group since 2014. Edwards holds 1,700 patents, including for dry (oil-free) vacuum pumps, and produces equipment used for manufacturing semiconductors, scientific research, freeze drying and other industries. Its pumps remove contaminants at CERN's Large Hadron Collider. Manufacturing is predominantly handled by subsidiary businesses in the Czech Republic, South Korea, USA and China. Edwards' global research and development facilities remain in the UK.
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