Microvalve

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A microvalve is a microscale valve, i.e. a microfluidic two-port component that regulates the flow between two fluidic ports. Microvalves are basic components in microfluidic devices, such as labs-on-a-chip, where they are used to control the fluidic transport. During the period from 1995 to 2005, many microelectromechanical systems-based microvalves were developed.

Contents

Microvalves found today can be roughly categorized as active microvalves and passive microvalves. Based on the medium they control, microvalves can be divided into gas microvalves and liquid microvalves. Based on their initial mode, microvalves can be divided into normally open, normally closed and bistable microvalves. [1]

Types

Active microvalves

Cross-sectional sketch of an active microvalve Microvalve.png
Cross-sectional sketch of an active microvalve

Active mechanical microvalves consist of mechanically movable membrane or boss structure, coupled to an actuation method, that can close of an orifice, thus blocking the flow path between the inlet and outlet ports. The actuator can either be an integrated magnetic, electrostatic, [2] [3] piezoelectric [4] or thermal microactuator, [5] a "smart" phase change, e.g. Shape-memory alloy, [6] or rheological material, or an externally applied actuation mechanism, such as an external magnetic field or pneumatic source.

Passive microvalves

Schematic cross-section of a passive microvalve Passive microvalve.png
Schematic cross-section of a passive microvalve

Passive microvalves are valves for which the operational state, i.e. open or close, is determined by the fluid they control. Most common passive microvalves are flap valves, membrane microvalves and ball microvalves.

Applications

Gas microvalves

Controlling a gas flow with MEMS microvalves has the following general benefits: the integration of the actuation mechanism with the other microvalve components allows component miniaturization; and the small scale of the component results in a rapid response time and a low-power consumption. However, despite the potential for cost-efficient batch fabrication offered by microelectromechanical systems (MEMS) technologies, gas microvalves have so far failed to reach the critical cost-per-performance ratio needed for a wide adoption of this technology. [7]

Check valves

Most check valves, are incorporated in inlets and outlets of reciprocal displacement micropumps, where they provide the liquid rectification needed for the valve to have a net pump flow in one direction.

Related Research Articles

Microfluidics refers to a system that manipulates a small amount of fluids using small channels with sizes ten to hundreds micrometres. It is a multidisciplinary field that involves molecular analysis, molecular biology, and microelectronics. It has practical applications in the design of systems that process low volumes of fluids to achieve multiplexing, automation, and high-throughput screening. Microfluidics emerged in the beginning of the 1980s and is used in the development of inkjet printheads, DNA chips, lab-on-a-chip technology, micro-propulsion, and micro-thermal technologies.

<span class="mw-page-title-main">MEMS</span> Very small devices that incorporate moving components

MEMS is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size, and MEMS devices generally range in size from 20 micrometres to a millimetre, although components arranged in arrays can be more than 1000 mm2. They usually consist of a central unit that processes data and several components that interact with the surroundings.

<span class="mw-page-title-main">Valve</span> Flow control device

A valve is a device or natural object that regulates, directs or controls the flow of a fluid by opening, closing, or partially obstructing various passageways. Valves are technically fittings, but are usually discussed as a separate category. In an open valve, fluid flows in a direction from higher pressure to lower pressure. The word is derived from the Latin valva, the moving part of a door, in turn from volvere, to turn, roll.

An actuator is a component of a machine that produces force, torque, or displacement, usually in a controlled way, when an electrical, pneumatic or hydraulic input is supplied to it in a system. An actuator converts such an input signal into the required form of mechanical energy. It is a type of transducer. In simple terms, it is a "mover".

<span class="mw-page-title-main">Fluid power</span> Use of fluids under pressure to generate, control, and transmit power

Fluid power is the use of fluids under pressure to generate, control, and transmit power. Fluid power is conventionally subdivided into hydraulics and pneumatics. Although steam is also a fluid, steam power is usually classified separately from fluid power. Compressed-air and water-pressure systems were once used to transmit power from a central source to industrial users over extended geographic areas; fluid power systems today are usually within a single building or mobile machine.

A lab-on-a-chip (LOC) is a device that integrates one or several laboratory functions on a single integrated circuit of only millimeters to a few square centimeters to achieve automation and high-throughput screening. LOCs can handle extremely small fluid volumes down to less than pico-liters. Lab-on-a-chip devices are a subset of microelectromechanical systems (MEMS) devices and sometimes called "micro total analysis systems" (µTAS). LOCs may use microfluidics, the physics, manipulation and study of minute amounts of fluids. However, strictly regarded "lab-on-a-chip" indicates generally the scaling of single or multiple lab processes down to chip-format, whereas "µTAS" is dedicated to the integration of the total sequence of lab processes to perform chemical analysis.

<span class="mw-page-title-main">Polydimethylsiloxane</span> Chemical compound

Polydimethylsiloxane (PDMS), also known as dimethylpolysiloxane or dimethicone, is a silicone polymer with a wide variety of uses, from cosmetics to industrial lubrication.

<span class="mw-page-title-main">Electroactive polymer</span>

An electroactive polymer (EAP) is a polymer that exhibits a change in size or shape when stimulated by an electric field. The most common applications of this type of material are in actuators and sensors. A typical characteristic property of an EAP is that they will undergo a large amount of deformation while sustaining large forces.

<span class="mw-page-title-main">Comb drive</span>

Comb-drives are microelectromechanical actuators, often used as linear actuators, which utilize electrostatic forces that act between two electrically conductive combs. Comb drive actuators typically operate at the micro- or nanometer scale and are generally manufactured by bulk micromachining or surface micromachining a silicon wafer substrate.

A MEMS thermal actuator is a microelectromechanical device that typically generates motion by thermal expansion amplification. A small amount of thermal expansion of one part of the device translates to a large amount of deflection of the overall device. Usually fabricated out of doped single crystal silicon or polysilicon as a complex compliant member, the increase in temperature can be achieved internally by electrical resistive heating or by a heat source capable of locally introducing heat. Microfabricated thermal actuators can be integrated into micromotors.

A pneumatic circuit is an interconnected set of components that convert compressed gas into mechanical work. In the normal sense of the term, the circuit must include a compressor or compressor-fed tank.

<span class="mw-page-title-main">Lateral flow test</span> Immunochromatographic testing devices

A lateral flow test (LFT), is an assay also known as a lateral flow device (LFD), lateral flow immunochromatographic assay, or rapid test. It is a simple device intended to detect the presence of a target substance in a liquid sample without the need for specialized and costly equipment. LFTs are widely used in medical diagnostics in the home, at the point of care, and in the laboratory. For instance, the home pregnancy test is an LFT that detects a specific hormone. These tests are simple and economical and generally show results in around five to thirty minutes. Many lab-based applications increase the sensitivity of simple LFTs by employing additional dedicated equipment. Because the target substance is often a biological antigen, many lateral flow tests are rapid antigen tests.

<span class="mw-page-title-main">Micropump</span>

Micropumps are devices that can control and manipulate small fluid volumes. Although any kind of small pump is often referred to as a micropump, a more accurate definition restricts this term to pumps with functional dimensions in the micrometer range. Such pumps are of special interest in microfluidic research, and have become available for industrial product integration in recent years. Their miniaturized overall size, potential cost and improved dosing accuracy compared to existing miniature pumps fuel the growing interest for this innovative kind of pump.

Exhaled breath analysis is a method in medicine for gaining information on the clinical state of an individual by monitoring the components present in the exhaled breath.

<span class="mw-page-title-main">Bio-MEMS</span>

Bio-MEMS is an abbreviation for biomedical microelectromechanical systems. Bio-MEMS have considerable overlap, and is sometimes considered synonymous, with lab-on-a-chip (LOC) and micro total analysis systems (μTAS). Bio-MEMS is typically more focused on mechanical parts and microfabrication technologies made suitable for biological applications. On the other hand, lab-on-a-chip is concerned with miniaturization and integration of laboratory processes and experiments into single chips. In this definition, lab-on-a-chip devices do not strictly have biological applications, although most do or are amenable to be adapted for biological purposes. Similarly, micro total analysis systems may not have biological applications in mind, and are usually dedicated to chemical analysis. A broad definition for bio-MEMS can be used to refer to the science and technology of operating at the microscale for biological and biomedical applications, which may or may not include any electronic or mechanical functions. The interdisciplinary nature of bio-MEMS combines material sciences, clinical sciences, medicine, surgery, electrical engineering, mechanical engineering, optical engineering, chemical engineering, and biomedical engineering. Some of its major applications include genomics, proteomics, molecular diagnostics, point-of-care diagnostics, tissue engineering, single cell analysis and implantable microdevices.

<span class="mw-page-title-main">Centrifugal micro-fluidic biochip</span>

The centrifugal micro-fluidic biochip or centrifugal micro-fluidic biodisk is a type of lab-on-a-chip technology, also known as lab-on-a-disc, that can be used to integrate processes such as separating, mixing, reaction and detecting molecules of nano-size in a single piece of platform, including a compact disk or DVD. This type of micro-fluidic biochip is based upon the principle of microfluidics; to take advantage of noninertial pumping for lab-on-a-chip devices using noninertial valves and switches under centrifugal force and Coriolis effect to distribute fluids about the disks in a highly parallel order.

<span class="mw-page-title-main">Off-stoichiometry thiol-ene polymer</span>

An off-stoichiometry thiol-ene polymer is a polymer platform comprising off-stoichiometry thiol-enes (OSTE) and off-stoichiometry thiol-ene-epoxies (OSTE+).

Electrostatic–pneumatic activation is an actuation method for shaping thin membranes for microelectromechanical and microoptoelectromechanical systems. This method benefits from operation at high speed and low power consumption. It can also cause large deflection on thin membranes. Electrostatic-pneumatic MEMS devices usually consist of two membranes with a sealed cavity in between. One membrane-calling actuator deflects into the cavity by electrostatic pressure to compress air and increase air pressure. Elevated pressure pushes the other membrane and causes a dome shape. With direct electrostatic actuation on the membrane, a concave shape is achieved.

A flowFET is a microfluidic component which allows the rate of flow of liquid in a microfluidic channel to be modulated by the electrical potential applied to it. In this way, it behaves as a microfluidic analogue to the field effect transistor, except that in the flowFET the flow of liquid takes the place of the flow of electric current. Indeed, the name of the flowFET is derived from the naming convention of electronic FETs.

Vapor etching refers to a process used in the fabrication of Microelectromechanical systems (MEMS) and Nanoelectromechanical systems (NEMS). Sacrificial layers are isotropically etched using gaseous acids such as Hydrogen fluoride and Xenon difluoride to release the free standing components of the device.

References

  1. Oh and Ahn (2006). "A review of microvalves". Journal of Micromechanics and Microengineering. 16 (5): R13–R39. doi:10.1088/0960-1317/16/5/R01. S2CID   1080696.
  2. Messner; et al. (2006). "Three-way silicon microvalve for pneumatic applications with electrostatic actuation principle". Microfluid Nanofluid. 2 (2): 89–96. doi:10.1007/s10404-005-0048-5. S2CID   52950585.
  3. Wouter van der Wijngaart and Håkan Ask and Peter Enoksson and Göran Stemme (2002). "A high-stroke, high-pressure electrostatic actuator for valve applications". Sensors and Actuators A: Physical. 100 (2–3): 264–271. doi:10.1016/S0924-4247(02)00070-5.
  4. Peige Shao; et al. (2004). "Polymer micro piezo valve with a small dead volume". J. Micromech. Microeng. 14 (2): 305–309. Bibcode:2004JMiMi..14..305S. doi:10.1088/0960-1317/14/2/020. S2CID   250843205.
  5. Jerman, H. (1994). "Electrically activated normally closed diaphragm valves". J. Micromech. Microeng. 4 (4): 210–216. Bibcode:1994JMiMi...4..210J. doi:10.1088/0960-1317/4/4/006. S2CID   250747908.
  6. Henrik Gradin, Stefan Braun, Göran Stemme, and Wouter van der Wijngaart (2012). "SMA Microvalves for Very Large Gas Flow Control Manufactured Using Wafer-Level Eutectic Bonding". IEEE Trans. Ind. Electron. 59 (12): 4895–4906. doi:10.1109/TIE.2011.2173892. S2CID   40883840.{{cite journal}}: CS1 maint: multiple names: authors list (link)
  7. Sjoerd Haasl; et al. (2006). "Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows". J. Microelectromech. Syst. 15 (5): 1281–1288. doi:10.1109/JMEMS.2006.880279. S2CID   39239850.