Microvalve

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A microvalve is a microscale valve, i.e. a microfluidic two-port component that regulates the flow between two fluidic ports. Microvalves are basic components in microfluidic devices, such as labs-on-a-chip, where they are used to control the fluidic transport. During the period from 1995 to 2005, many microelectromechanical systems-based microvalves were developed.

Contents

Microvalves found today can be roughly categorized as active microvalves and passive microvalves. Based on the medium they control, microvalves can be divided into gas microvalves and liquid microvalves. Based on their initial mode, microvalves can be divided into normally open, normally closed and bistable microvalves. [1]

Types

Active microvalves

Cross-sectional sketch of an active microvalve Microvalve.png
Cross-sectional sketch of an active microvalve

Active mechanical microvalves consist of mechanically movable membrane or boss structure, coupled to an actuation method, that can close of an orifice, thus blocking the flow path between the inlet and outlet ports. The actuator can either be an integrated magnetic, electrostatic, [2] [3] piezoelectric [4] or thermal microactuator, [5] a "smart" phase change, e.g. Shape-memory alloy, [6] or rheological material, or an externally applied actuation mechanism, such as an external magnetic field or pneumatic source.

Passive microvalves

Schematic cross-section of a passive microvalve Passive microvalve.png
Schematic cross-section of a passive microvalve

Passive microvalves are valves for which the operational state, i.e. open or close, is determined by the fluid they control. Most common passive microvalves are flap valves, membrane microvalves and ball microvalves.

Applications

Gas microvalves

Controlling a gas flow with MEMS microvalves has the following general benefits: the integration of the actuation mechanism with the other microvalve components allows component miniaturization; and the small scale of the component results in a rapid response time and a low-power consumption. However, despite the potential for cost-efficient batch fabrication offered by microelectromechanical systems (MEMS) technologies, gas microvalves have so far failed to reach the critical cost-per-performance ratio needed for a wide adoption of this technology. [7]

Check valves

Most check valves, are incorporated in inlets and outlets of reciprocal displacement micropumps, where they provide the liquid rectification needed for the valve to have a net pump flow in one direction.

Related Research Articles

<span class="mw-page-title-main">Microfluidics</span> Interdisciplinary science

Microfluidics refers to a system that manipulates a small amount of fluids using small channels with sizes of ten to hundreds of micrometres. It is a multidisciplinary field that involves molecular analysis, molecular biology, and microelectronics. It has practical applications in the design of systems that process low volumes of fluids to achieve multiplexing, automation, and high-throughput screening. Microfluidics emerged in the beginning of the 1980s and is used in the development of inkjet printheads, DNA chips, lab-on-a-chip technology, micro-propulsion, and micro-thermal technologies.

<span class="mw-page-title-main">MEMS</span> Very small devices that incorporate moving components

MEMS is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size, and MEMS devices generally range in size from 20 micrometres to a millimetre, although components arranged in arrays can be more than 1000 mm2. They usually consist of a central unit that processes data and several components that interact with the surroundings.

<span class="mw-page-title-main">Valve</span> Flow control device

A valve is a device or natural object that regulates, directs or controls the flow of a fluid by opening, closing, or partially obstructing various passageways. Valves are technically fittings, but are usually discussed as a separate category. In an open valve, fluid flows in a direction from higher pressure to lower pressure. The word is derived from the Latin valva, the moving part of a door, in turn from volvere, to turn, roll.

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<span class="mw-page-title-main">Electroactive polymer</span>

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<span class="mw-page-title-main">Comb drive</span>

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<span class="mw-page-title-main">MEMS electrothermal actuator</span>

A MEMS electrothermal actuator is a microelectromechanical device that typically generates motion by thermal expansion. It relies on the equilibrium between the thermal energy produced by an applied electric current and the heat dissipated into the environment or the substrate. Its working principle is based on resistive heating. Fabrication processes for electrothermal actuators include deep X-ray lithography, LIGA, and deep reactive ion etching (DRIE). These techniques allow for the creation of devices with high aspect ratios. Additionally, these actuators are relatively easy to fabricate and are compatible with standard Integrated Circuits (IC) and MEMS fabrication methods. These electrothermal actuators can be utilized in different kind of MEMS devices like microgrippers, micromirrors, tunable inductors and resonators.

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<span class="mw-page-title-main">Nanofluidics</span> Dynamics of fluids confined in nanoscale structures

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<span class="mw-page-title-main">Micropump</span>

Micropumps are devices that can control and manipulate small fluid volumes. Although any kind of small pump is often referred to as a micropump, a more accurate definition restricts this term to pumps with functional dimensions in the micrometer range. Such pumps are of special interest in microfluidic research, and have become available for industrial product integration in recent years. Their miniaturized overall size, potential cost and improved dosing accuracy compared to existing miniature pumps fuel the growing interest for this innovative kind of pump.

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<span class="mw-page-title-main">Bio-MEMS</span>

Bio-MEMS is an abbreviation for biomedical microelectromechanical systems. Bio-MEMS have considerable overlap, and is sometimes considered synonymous, with lab-on-a-chip (LOC) and micro total analysis systems (μTAS). Bio-MEMS is typically more focused on mechanical parts and microfabrication technologies made suitable for biological applications. On the other hand, lab-on-a-chip is concerned with miniaturization and integration of laboratory processes and experiments into single chips. In this definition, lab-on-a-chip devices do not strictly have biological applications, although most do or are amenable to be adapted for biological purposes. Similarly, micro total analysis systems may not have biological applications in mind, and are usually dedicated to chemical analysis. A broad definition for bio-MEMS can be used to refer to the science and technology of operating at the microscale for biological and biomedical applications, which may or may not include any electronic or mechanical functions. The interdisciplinary nature of bio-MEMS combines material sciences, clinical sciences, medicine, surgery, electrical engineering, mechanical engineering, optical engineering, chemical engineering, and biomedical engineering. Some of its major applications include genomics, proteomics, molecular diagnostics, point-of-care diagnostics, tissue engineering, single cell analysis and implantable microdevices.

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References

  1. Oh and Ahn (2006). "A review of microvalves". Journal of Micromechanics and Microengineering. 16 (5): R13–R39. doi:10.1088/0960-1317/16/5/R01. S2CID   1080696.
  2. Messner; et al. (2006). "Three-way silicon microvalve for pneumatic applications with electrostatic actuation principle". Microfluid Nanofluid. 2 (2): 89–96. doi:10.1007/s10404-005-0048-5. S2CID   52950585.
  3. Wouter van der Wijngaart and Håkan Ask and Peter Enoksson and Göran Stemme (2002). "A high-stroke, high-pressure electrostatic actuator for valve applications". Sensors and Actuators A: Physical. 100 (2–3): 264–271. Bibcode:2002SeAcA.100..264V. doi:10.1016/S0924-4247(02)00070-5.
  4. Peige Shao; et al. (2004). "Polymer micro piezo valve with a small dead volume". J. Micromech. Microeng. 14 (2): 305–309. Bibcode:2004JMiMi..14..305S. doi:10.1088/0960-1317/14/2/020. S2CID   250843205.
  5. Jerman, H. (1994). "Electrically activated normally closed diaphragm valves". J. Micromech. Microeng. 4 (4): 210–216. Bibcode:1994JMiMi...4..210J. doi:10.1088/0960-1317/4/4/006. S2CID   250747908.
  6. Henrik Gradin, Stefan Braun, Göran Stemme, and Wouter van der Wijngaart (2012). "SMA Microvalves for Very Large Gas Flow Control Manufactured Using Wafer-Level Eutectic Bonding". IEEE Trans. Ind. Electron. 59 (12): 4895–4906. doi:10.1109/TIE.2011.2173892. S2CID   40883840.{{cite journal}}: CS1 maint: multiple names: authors list (link)
  7. Sjoerd Haasl; et al. (2006). "Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows". J. Microelectromech. Syst. 15 (5): 1281–1288. doi:10.1109/JMEMS.2006.880279. S2CID   39239850.