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Microscopy is the technical field of using microscopes to view objects and areas of objects that cannot be seen with the naked eye. There are three well-known branches of microscopy: optical, electron, and scanning probe microscopy, along with the emerging field of X-ray microscopy.
A microscope is a laboratory instrument used to examine objects that are too small to be seen by the naked eye. Microscopy is the science of investigating small objects and structures using a microscope. Microscopic means being invisible to the eye unless aided by a microscope.
Interferometry is a technique which uses the interference of superimposed waves to extract information. Interferometry typically uses electromagnetic waves and is an important investigative technique in the fields of astronomy, fiber optics, engineering metrology, optical metrology, oceanography, seismology, spectroscopy, quantum mechanics, nuclear and particle physics, plasma physics, remote sensing, biomolecular interactions, surface profiling, microfluidics, mechanical stress/strain measurement, velocimetry, optometry, and making holograms.
Angular resolution describes the ability of any image-forming device such as an optical or radio telescope, a microscope, a camera, or an eye, to distinguish small details of an object, thereby making it a major determinant of image resolution. It is used in optics applied to light waves, in antenna theory applied to radio waves, and in acoustics applied to sound waves. The colloquial use of the term "resolution" sometimes causes confusion; when an optical system is said to have a high resolution or high angular resolution, it means that the perceived distance, or actual angular distance, between resolved neighboring objects is small. The value that quantifies this property, θ, which is given by the Rayleigh criterion, is low for a system with a high resolution. The closely related term spatial resolution refers to the precision of a measurement with respect to space, which is directly connected to angular resolution in imaging instruments. The Rayleigh criterion shows that the minimum angular spread that can be resolved by an image forming system is limited by diffraction to the ratio of the wavelength of the waves to the aperture width. For this reason, high resolution imaging systems such as astronomical telescopes, long distance telephoto camera lenses and radio telescopes have large apertures.
The Mach–Zehnder interferometer is a device used to determine the relative phase shift variations between two collimated beams derived by splitting light from a single source. The interferometer has been used, among other things, to measure phase shifts between the two beams caused by a sample or a change in length of one of the paths. The apparatus is named after the physicists Ludwig Mach and Ludwig Zehnder; Zehnder's proposal in an 1891 article was refined by Mach in an 1892 article. Demonstrations of Mach–Zehnder interferometry with particles other than photons had been demonstrated as well in multiple experiments.
The Michelson interferometer is a common configuration for optical interferometry and was invented by the 19/20th-century American physicist Albert Abraham Michelson. Using a beam splitter, a light source is split into two arms. Each of those light beams is reflected back toward the beamsplitter which then combines their amplitudes using the superposition principle. The resulting interference pattern that is not directed back toward the source is typically directed to some type of photoelectric detector or camera. For different applications of the interferometer, the two light paths can be with different lengths or incorporate optical elements or even materials under test.
Laser Doppler velocimetry, also known as laser Doppler anemometry, is the technique of using the Doppler shift in a laser beam to measure the velocity in transparent or semi-transparent fluid flows or the linear or vibratory motion of opaque, reflecting surfaces. The measurement with laser Doppler anemometry is absolute and linear with velocity and requires no pre-calibration.
The Sagnac effect, also called Sagnac interference, named after French physicist Georges Sagnac, is a phenomenon encountered in interferometry that is elicited by rotation. The Sagnac effect manifests itself in a setup called a ring interferometer or Sagnac interferometer. A beam of light is split and the two beams are made to follow the same path but in opposite directions. On return to the point of entry the two light beams are allowed to exit the ring and undergo interference. The relative phases of the two exiting beams, and thus the position of the interference fringes, are shifted according to the angular velocity of the apparatus. In other words, when the interferometer is at rest with respect to a nonrotating frame, the light takes the same amount of time to traverse the ring in either direction. However, when the interferometer system is spun, one beam of light has a longer path to travel than the other in order to complete one circuit of the mechanical frame, and so takes longer, resulting in a phase difference between the two beams. Georges Sagnac set up this experiment in an attempt to prove the existence of the aether that Einstein's theory of special relativity had discarded.
An optical instrument is a device that processes light waves, either to enhance an image for viewing or to analyze and determine their characteristic properties. Common examples include periscopes, microscopes, telescopes, and cameras.
A Fizeau interferometer is an interferometric arrangement whereby two reflecting surfaces are placed facing each other. As seen in Fig 1, the rear-surface reflected light from the transparent first reflector is combined with front-surface reflected light from the second reflector to form interference fringes.
Classical interference microscopy, also called quantitative interference microscopy, uses two separate light beams with much greater lateral separation than that used in phase contrast microscopy or in differential interference microscopy (DIC).
Fourier-transform infrared spectroscopy (FTIR) is a technique used to obtain an infrared spectrum of absorption or emission of a solid, liquid, or gas. An FTIR spectrometer simultaneously collects high-resolution spectral data over a wide spectral range. This confers a significant advantage over a dispersive spectrometer, which measures intensity over a narrow range of wavelengths at a time.
A Mirau interferometer works on the same basic principle as a Michelson interferometer. The difference between the two is in the physical location of the reference arm. The reference arm of a Mirau interferometer is located within a microscope objective assembly.
The N-slit interferometer is an extension of the double-slit interferometer also known as Young's double-slit interferometer. One of the first known uses of N-slit arrays in optics was illustrated by Newton. In the first part of the twentieth century, Michelson described various cases of N-slit diffraction.
A white light scanner (WLS) is a device for performing surface height measurements of an object using coherence scanning interferometry (CSI) with spectrally-broadband, "white light" illumination. Different configurations of scanning interferometer may be used to measure macroscopic objects with surface profiles measuring in the centimeter range, to microscopic objects with surface profiles measuring in the micrometer range. For large-scale non-interferometric measurement systems, see structured-light 3D scanner.
The wafer bond characterization is based on different methods and tests. Considered a high importance of the wafer are the successful bonded wafers without flaws. Those flaws can be caused by void formation in the interface due to unevenness or impurities. The bond connection is characterized for wafer bond development or quality assessment of fabricated wafers and sensors.
Length measurement, distance measurement, or range measurement (ranging) refers to the many ways in which length, distance, or range can be measured. The most commonly used approaches are the rulers, followed by transit-time methods and the interferometer methods based upon the speed of light.
A common-path interferometer is a class of interferometers in which the reference beam and sample beams travel along the same path. Examples include the Sagnac interferometer, Zernike phase-contrast interferometer, and the point diffraction interferometer. A common-path interferometer is generally more robust to environmental vibrations than a "double-path interferometer" such as the Michelson interferometer or the Mach–Zehnder interferometer. Although travelling along the same path, the reference and sample beams may travel along opposite directions, or they may travel along the same direction but with the same or different polarization.
As described here, white light interferometry is a non-contact optical method for surface height measurement on 3D structures with surface profiles varying between tens of nanometers and a few centimeters. It is often used as an alternative name for coherence scanning interferometry in the context of areal surface topography instrumentation that relies on spectrally-broadband, visible-wavelength light.
References
- Komatsu, Hiroshi; Thomas J. Fellers; Michael W. Davidson. "Principles and Applications of Two-Beam Interferometry" . Retrieved 2007-02-04.
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