Coherence scanning interferometry

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Coherence scanning interferometry (CSI) is any of a class of optical surface measurement methods wherein the localization of interference fringes during a scan of optical path length provides a means to determine surface characteristics such as topography, transparent film structure, and optical properties. CSI is currently the most common interference microscopy technique for areal surface topography measurement. [1] The term "CSI" was adopted by the International Organization for Standardization (ISO). [2]

Characteristic CSI signal Coherence scanning interferometry signal.jpg
Characteristic CSI signal

The technique encompasses but is not limited to instruments that use spectrally broadband, visible sources (white light) to achieve interference fringe localization. CSI uses either fringe localization alone or in combination with interference fringe phase, depending on the surface type, desired surface topography repeatability and software capabilities. The table below compiles alternative terms that conform at least in part to the above definition.

AcronymTermReference
CSICoherence scanning interferometry [3]
CPMCoherence probe microscope [4]
CSMCoherence scanning microscope [5]
CRCoherence radar [6]
CCICoherence correlation interferometry [7]
MCMMirau correlation microscope [8]
WLI White light interferometry [9]
WLSIWhite light scanning interferometry [10]
SWLIScanning white light interferometry [11]
WLS White Light Scanner
WLPSIWhite light phase shifting interferometry [12]
VSIVertical scanning interferometry [13]
RSPRough surface profiler [14]
IRSInfrared scanning [15]
OCTFull-field optical coherence tomography [16]

References

  1. ↑ de Groot, P (2015). "Principles of interference microscopy for the measurement of surface topography". Advances in Optics and Photonics. 7 (1): 1–65. Bibcode:2015AdOP....7....1D. doi:10.1364/AOP.7.000001.
  2. ↑ ISO (2013). 25178-604:2013(E): Geometrical product specification (GPS) – Surface texture: Areal – Nominal characteristics of non-contact (coherence scanning interferometric microscopy) instruments (2013(E) ed.). Geneva: International Organization for Standardization.
  3. ↑ Windecker, R.; Haible, P.; Tiziani, H. J. (1995). "Fast Coherence Scanning Interferometry for Measuring Smooth, Rough and Spherical Surfaces". Journal of Modern Optics. 42 (10): 2059–2069. Bibcode:1995JMOp...42.2059W. doi:10.1080/09500349514551791.
  4. ↑ Davidson, M.; Kaufman, K.; Mazor, I. (1987). "The Coherence Probe Microscope". Solid State Technology. 30 (9): 57–59.
  5. ↑ Lee, B. S.; Strand, T. C. (1990). "Profilometry with a coherence scanning microscope". Appl Opt. 29 (26): 3784–3788. Bibcode:1990ApOpt..29.3784L. doi:10.1364/ao.29.003784. PMID   20567484.
  6. ↑ Dresel, T.; Häusler, G.; Venzke, H. (1992). "Three-dimensional sensing of rough surfaces by coherence radar". Applied Optics. 31 (7): 919–925. Bibcode:1992ApOpt..31..919D. doi:10.1364/ao.31.000919. PMID   20720701.
  7. ↑ Lee-Bennett, I. (2004). Advances in non-contacting surface metrology. Optical Fabrication and Testing, OTuC1.
  8. ↑ Kino, G. S.; Chim, S. S. C. (1990). "Mirau correlation microscope". Applied Optics. 29 (26): 3775–83. Bibcode:1990ApOpt..29.3775K. doi:10.1364/ao.29.003775. PMID   20567483.
  9. ↑ Larkin, K. G. (1996). "Efficient nonlinear algorithm for envelope detection in white light interferometry". Journal of the Optical Society of America A. 13 (4): 832. Bibcode:1996JOSAA..13..832L. CiteSeerX   10.1.1.190.4728 . doi:10.1364/josaa.13.000832.
  10. ↑ Wyant, J. C. (September, 1993). How to extend interferometry for rough-surface tests. Laser Focus World, 131-135.
  11. ↑ Deck, L.; de Groot, P. (1994). "High-speed noncontact profiler based on scanning white-light interferometry". Applied Optics. 33 (31): 7334–7338. Bibcode:1994ApOpt..33.7334D. doi:10.1364/ao.33.007334. PMID   20941290.
  12. ↑ Schmit, J.; Olszak, A. G. (2002). Creath, Katherine; Schmit, Joanna (eds.). "Challenges in white-light phase-shifting interferometry". Proc. SPIE. Interferometry XI: Techniques and Analysis. 4777: 118–127. Bibcode:2002SPIE.4777..118S. doi:10.1117/12.472211. S2CID   128892213.
  13. ↑ Harasaki, A.; Schmit, J.; Wyant, J. C. (2000). "Improved vertical-scanning interferometry". Applied Optics. 39 (13): 2107–2115. Bibcode:2000ApOpt..39.2107H. doi:10.1364/ao.39.002107. hdl: 10150/289148 . PMID   18345114.
  14. ↑ Caber, P. J. (1993). "Interferometric profiler for rough surfaces". Appl Opt. 32 (19): 3438–3441. Bibcode:1993ApOpt..32.3438C. doi:10.1364/ao.32.003438. PMID   20829962.
  15. ↑ De Groot, P.; Biegen, J.; Clark, J.; Colonna; de Lega, X.; Grigg, D. (2002). "Optical Interferometry for Measurement of the Geometric Dimensions of Industrial Parts". Applied Optics. 41 (19): 3853–3860. Bibcode:2002ApOpt..41.3853D. doi:10.1364/ao.41.003853. PMID   12099592.
  16. ↑ Dubois, A; Vabre, L; Boccara, AC; Beaurepaire, E (2002). "High-resolution full-field optical coherence tomography with a Linnik microscope". Applied Optics. 41 (4): 805–12. Bibcode:2002ApOpt..41..805D. doi:10.1364/ao.41.000805. PMID   11993929.


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