Coherence scanning interferometry

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Coherence scanning interferometry (CSI) is any of a class of optical surface measurement methods wherein the localization of interference fringes during a scan of optical path length provides a means to determine surface characteristics such as topography, transparent film structure, and optical properties. CSI is currently the most common interference microscopy technique for areal surface topography measurement. [1] The term "CSI" was adopted by the International Organization for Standardization (ISO). [2]

Characteristic CSI signal Coherence scanning interferometry signal.jpg
Characteristic CSI signal

The technique encompasses but is not limited to instruments that use spectrally broadband, visible sources (white light) to achieve interference fringe localization. CSI uses either fringe localization alone or in combination with interference fringe phase, depending on the surface type, desired surface topography repeatability and software capabilities. The table below compiles alternative terms that conform at least in part to the above definition.

AcronymTermReference
CSICoherence scanning interferometry [3]
CPMCoherence probe microscope [4]
CSMCoherence scanning microscope [5]
CRCoherence radar [6]
CCICoherence correlation interferometry [7]
MCMMirau correlation microscope [8]
WLI White light interferometry [9]
WLSIWhite light scanning interferometry [10]
SWLIScanning white light interferometry [11]
WLS White Light Scanner
WLPSIWhite light phase shifting interferometry [12]
VSIVertical scanning interferometry [13]
RSPRough surface profiler [14]
IRSInfrared scanning [15]
OCTFull-field optical coherence tomography [16]

Related Research Articles

<span class="mw-page-title-main">Interferometry</span> Measurement method using interference of waves

Interferometry is a technique which uses the interference of superimposed waves to extract information. Interferometry typically uses electromagnetic waves and is an important investigative technique in the fields of astronomy, fiber optics, engineering metrology, optical metrology, oceanography, seismology, spectroscopy, quantum mechanics, nuclear and particle physics, plasma physics, biomolecular interactions, surface profiling, microfluidics, mechanical stress/strain measurement, velocimetry, optometry, and making holograms.

<span class="mw-page-title-main">Michelson interferometer</span> Common configuration for optical interferometry

The Michelson interferometer is a common configuration for optical interferometry and was invented by the 19/20th-century American physicist Albert Abraham Michelson. Using a beam splitter, a light source is split into two arms. Each of those light beams is reflected back toward the beamsplitter which then combines their amplitudes using the superposition principle. The resulting interference pattern that is not directed back toward the source is typically directed to some type of photoelectric detector or camera. For different applications of the interferometer, the two light paths can be with different lengths or incorporate optical elements or even materials under test.

<span class="mw-page-title-main">Optical coherence tomography</span> Imaging technique

Optical coherence tomography (OCT) is an imaging technique that uses low-coherence light to capture micrometer-resolution, two- and three-dimensional images from within optical scattering media. It is used for medical imaging and industrial nondestructive testing (NDT). Optical coherence tomography is based on low-coherence interferometry, typically employing near-infrared light. The use of relatively long wavelength light allows it to penetrate into the scattering medium. Confocal microscopy, another optical technique, typically penetrates less deeply into the sample but with higher resolution.

Medical optical imaging is the use of light as an investigational imaging technique for medical applications. Examples include optical microscopy, spectroscopy, endoscopy, scanning laser ophthalmoscopy, laser Doppler imaging, and optical coherence tomography. Because light is an electromagnetic wave, similar phenomena occur in X-rays, microwaves, and radio waves.

Surface metrology is the measurement of small-scale features on surfaces, and is a branch of metrology. Surface primary form, surface fractality, and surface finish are the parameters most commonly associated with the field. It is important to many disciplines and is mostly known for the machining of precision parts and assemblies which contain mating surfaces or which must operate with high internal pressures.

<span class="mw-page-title-main">Profilometer</span>

A profilometer is a measuring instrument used to measure a surface's profile, in order to quantify its roughness. Critical dimensions as step, curvature, flatness are computed from the surface topography.

Nanophotonics or nano-optics is the study of the behavior of light on the nanometer scale, and of the interaction of nanometer-scale objects with light. It is a branch of optics, optical engineering, electrical engineering, and nanotechnology. It often involves dielectric structures such as nanoantennas, or metallic components, which can transport and focus light via surface plasmon polaritons.

Holographic interferometry (HI) is a technique which enables static and dynamic displacements of objects with optically rough surfaces to be measured to optical interferometric precision. These measurements can be applied to stress, strain and vibration analysis, as well as to non-destructive testing and radiation dosimetry. It can also be used to detect optical path length variations in transparent media, which enables, for example, fluid flow to be visualised and analyzed. It can also be used to generate contours representing the form of the surface.

Digital holography refers to the acquisition and processing of holograms with a digital sensor array, typically a CCD camera or a similar device. Image rendering, or reconstruction of object data is performed numerically from digitized interferograms. Digital holography offers a means of measuring optical phase data and typically delivers three-dimensional surface or optical thickness images. Several recording and processing schemes have been developed to assess optical wave characteristics such as amplitude, phase, and polarization state, which make digital holography a very powerful method for metrology applications .

<span class="mw-page-title-main">Point diffraction interferometer</span>

A point diffraction interferometer (PDI) is a type of common-path interferometer. Unlike an amplitude-splitting interferometer, such as a Michelson interferometer, which separates out an unaberrated beam and interferes this with the test beam, a common-path interferometer generates its own reference beam. In PDI systems, the test and reference beams travel the same or almost the same path. This design makes the PDI extremely useful when environmental isolation is not possible or a reduction in the number of precision optics is required. The reference beam is created from a portion of the test beam by diffraction from a small pinhole in a semitransparent coating. The principle of a PDI is shown in Figure 1.

ISO 25178: Geometrical Product Specifications (GPS) – Surface texture: areal is an International Organization for Standardization collection of international standards relating to the analysis of 3D areal surface texture.

Classical interference microscopy, also called quantitative interference microscopy, uses two separate light beams with much greater lateral separation than that used in phase contrast microscopy or in differential interference microscopy (DIC).

<span class="mw-page-title-main">Linnik interferometer</span>

A Linnik interferometer is a two-beam interferometer used in microscopy and surface contour measurements or topography. The basic configuration is the same as a Michelson interferometer. What distinguishes the Linnik configuration is the use of measurement optics in the reference arm, which essentially duplicate the objective measurement optics in the measurement arm. The advantage of this design is its ability to compensate for chromatic dispersion and other optical aberrations.

<span class="mw-page-title-main">F. J. Duarte</span>

Francisco Javier "Frank" Duarte is a laser physicist and author/editor of several books on tunable lasers.

<span class="mw-page-title-main">White light scanner</span>

A white light scanner (WLS) is a device for performing surface height measurements of an object using coherence scanning interferometry (CSI) with spectrally-broadband, "white light" illumination. Different configurations of scanning interferometer may be used to measure macroscopic objects with surface profiles measuring in the centimeter range, to microscopic objects with surface profiles measuring in the micrometer range. For large-scale non-interferometric measurement systems, see structured-light 3D scanner.

<span class="mw-page-title-main">Digital holographic microscopy</span>

Digital holographic microscopy (DHM) is digital holography applied to microscopy. Digital holographic microscopy distinguishes itself from other microscopy methods by not recording the projected image of the object. Instead, the light wave front information originating from the object is digitally recorded as a hologram, from which a computer calculates the object image by using a numerical reconstruction algorithm. The image forming lens in traditional microscopy is thus replaced by a computer algorithm. Other closely related microscopy methods to digital holographic microscopy are interferometric microscopy, optical coherence tomography and diffraction phase microscopy. Common to all methods is the use of a reference wave front to obtain amplitude (intensity) and phase information. The information is recorded on a digital image sensor or by a photodetector from which an image of the object is created (reconstructed) by a computer. In traditional microscopy, which do not use a reference wave front, only intensity information is recorded and essential information about the object is lost.

A common-path interferometer is a class of interferometers in which the reference beam and sample beams travel along the same path. Examples include the Sagnac interferometer, Zernike phase-contrast interferometer, and the point diffraction interferometer. A common-path interferometer is generally more robust to environmental vibrations than a "double-path interferometer" such as the Michelson interferometer or the Mach–Zehnder interferometer. Although travelling along the same path, the reference and sample beams may travel along opposite directions, or they may travel along the same direction but with the same or different polarization.

<span class="mw-page-title-main">White light interferometry</span>

As described here, white light interferometry is a non-contact optical method for surface height measurement on 3D structures with surface profiles varying between tens of nanometers and a few centimeters. It is often used as an alternative name for coherence scanning interferometry in the context of areal surface topography instrumentation that relies on spectrally-broadband, visible-wavelength light.

Endomicroscopy is a technique for obtaining histology-like images from inside the human body in real-time, a process known as ‘optical biopsy’. It generally refers to fluorescence confocal microscopy, although multi-photon microscopy and optical coherence tomography have also been adapted for endoscopic use. Commercially available clinical and pre-clinical endomicroscopes can achieve a resolution on the order of a micrometre, have a field-of-view of several hundred µm, and are compatible with fluorophores which are excitable using 488 nm laser light. The main clinical applications are currently in imaging of the tumour margins of the brain and gastro-intestinal tract, particularly for the diagnosis and characterisation of Barrett’s Esophagus, pancreatic cysts and colorectal lesions. A number of pre-clinical and transnational applications have been developed for endomicroscopy as it enables researchers to perform live animal imaging. Major pre-clinical applications are in gastro-intestinal tract, toumour margin detection, uterine complications, ischaemia, live imaging of cartilage and tendon and organoid imaging.

Spectral interferometry (SI) or frequency-domain interferometry is a linear technique used to measure optical pulses, with the condition that a reference pulse that was previously characterized is available. This technique provides information about the intensity and phase of the pulses. SI was first proposed by Claude Froehly and coworkers in the 1970s.

References

  1. de Groot, P (2015). "Principles of interference microscopy for the measurement of surface topography". Advances in Optics and Photonics. 7 (1): 1–65. Bibcode:2015AdOP....7....1D. doi:10.1364/AOP.7.000001.
  2. ISO (2013). 25178-604:2013(E): Geometrical product specification (GPS) – Surface texture: Areal – Nominal characteristics of non-contact (coherence scanning interferometric microscopy) instruments (2013(E) ed.). Geneva: International Organization for Standardization.
  3. Windecker, R.; Haible, P.; Tiziani, H. J. (1995). "Fast Coherence Scanning Interferometry for Measuring Smooth, Rough and Spherical Surfaces". Journal of Modern Optics. 42 (10): 2059–2069. Bibcode:1995JMOp...42.2059W. doi:10.1080/09500349514551791.
  4. Davidson, M.; Kaufman, K.; Mazor, I. (1987). "The Coherence Probe Microscope". Solid State Technology. 30 (9): 57–59.
  5. Lee, B. S.; Strand, T. C. (1990). "Profilometry with a coherence scanning microscope". Appl Opt. 29 (26): 3784–3788. Bibcode:1990ApOpt..29.3784L. doi:10.1364/ao.29.003784. PMID   20567484.
  6. Dresel, T.; Häusler, G.; Venzke, H. (1992). "Three-dimensional sensing of rough surfaces by coherence radar". Applied Optics. 31 (7): 919–925. Bibcode:1992ApOpt..31..919D. doi:10.1364/ao.31.000919. PMID   20720701.
  7. Lee-Bennett, I. (2004). Advances in non-contacting surface metrology. Optical Fabrication and Testing, OTuC1.
  8. Kino, G. S.; Chim, S. S. C. (1990). "Mirau correlation microscope". Applied Optics. 29 (26): 3775–83. Bibcode:1990ApOpt..29.3775K. doi:10.1364/ao.29.003775. PMID   20567483.
  9. Larkin, K. G. (1996). "Efficient nonlinear algorithm for envelope detection in white light interferometry". Journal of the Optical Society of America A. 13 (4): 832. Bibcode:1996JOSAA..13..832L. CiteSeerX   10.1.1.190.4728 . doi:10.1364/josaa.13.000832.
  10. Wyant, J. C. (September, 1993). How to extend interferometry for rough-surface tests. Laser Focus World, 131-135.
  11. Deck, L.; de Groot, P. (1994). "High-speed noncontact profiler based on scanning white-light interferometry". Applied Optics. 33 (31): 7334–7338. Bibcode:1994ApOpt..33.7334D. doi:10.1364/ao.33.007334. PMID   20941290.
  12. Schmit, J.; Olszak, A. G. (2002). Creath, Katherine; Schmit, Joanna (eds.). "Challenges in white-light phase-shifting interferometry". Proc. SPIE. Interferometry XI: Techniques and Analysis. 4777: 118–127. Bibcode:2002SPIE.4777..118S. doi:10.1117/12.472211. S2CID   128892213.
  13. Harasaki, A.; Schmit, J.; Wyant, J. C. (2000). "Improved vertical-scanning interferometry". Applied Optics. 39 (13): 2107–2115. Bibcode:2000ApOpt..39.2107H. doi:10.1364/ao.39.002107. hdl: 10150/289148 . PMID   18345114.
  14. Caber, P. J. (1993). "Interferometric profiler for rough surfaces". Appl Opt. 32 (19): 3438–3441. Bibcode:1993ApOpt..32.3438C. doi:10.1364/ao.32.003438. PMID   20829962.
  15. De Groot, P.; Biegen, J.; Clark, J.; Colonna; de Lega, X.; Grigg, D. (2002). "Optical Interferometry for Measurement of the Geometric Dimensions of Industrial Parts". Applied Optics. 41 (19): 3853–3860. Bibcode:2002ApOpt..41.3853D. doi:10.1364/ao.41.003853. PMID   12099592.
  16. Dubois, A; Vabre, L; Boccara, AC; Beaurepaire, E (2002). "High-resolution full-field optical coherence tomography with a Linnik microscope". Applied Optics. 41 (4): 805–12. Bibcode:2002ApOpt..41..805D. doi:10.1364/ao.41.000805. PMID   11993929.