Technology CAD

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Hierarchy of technology CAD tools building from the process level to circuits. Left side icons show typical manufacturing issues; right side icons reflect MOS scaling results based on TCAD TCAD-overview.JPG
Hierarchy of technology CAD tools building from the process level to circuits. Left side icons show typical manufacturing issues; right side icons reflect MOS scaling results based on TCAD

Technology computer-aided design (technology CAD or TCAD) is a branch of electronic design automation (EDA) that models semiconductor fabrication and semiconductor device operation. The modeling of the fabrication is termed process TCAD, while the modeling of the device operation is termed device TCAD. Included are the modelling of process steps (such as diffusion and ion implantation), and modelling of the behavior of the electrical devices based on fundamental physics, [2] [3] such as the doping profiles of the devices. TCAD may also include the creation of "compact models" (such as the well known SPICE transistor models), which try to capture the electrical behavior of such devices but do not generally derive them from the underlying physics. SPICE simulator itself is usually considered as part of EDA rather than TCAD.

Contents

Introduction

Technology files and design rules are essential building blocks of the integrated circuit design process. Their accuracy and robustness over process technology, its variability and the operating conditions of the IC — environmental, parasitic interactions and testing, including adverse conditions such as electro-static discharge — are critical in determining performance, yield and reliability. Development of these technology and design rule files involves an iterative process that crosses boundaries of technology and device development, product design and quality assurance. Modeling and simulation play a critical role in support of many aspects of this evolution process.

The goals of TCAD start from the physical description of integrated circuit devices, considering both the physical configuration and related device properties, and build the links between the broad range of physics and electrical behavior models that support circuit design. Physics-based modeling of devices, in distributed and lumped forms, is an essential part of the IC process development. It seeks to quantify the underlying understanding of the technology and abstract that knowledge to the device design level, including extraction of the key parameters [4] that support circuit design and statistical metrology.

Although the emphasis here is on Metal Oxide Semiconductor (MOS) transistors — the workhorse of the IC industry — it is useful to briefly overview the development history of the modeling tools and methodology that has set the stage for the present state-of-the-art.

History

The evolution of technology computer-aided design (TCAD) — the synergistic combination of process, device and circuit simulation and modeling tools — finds its roots in bipolar technology, starting in the late 1960s, and the challenges of junction isolated, double-and triple-diffused transistors. These devices and technology were the basis of the first integrated circuits; nonetheless, many of the scaling issues and underlying physical effects are integral to IC design, even after four decades of IC development. With these early generations of IC, process variability and parametric yield were an issue — a theme that will reemerge as a controlling factor in future IC technology as well.

Process control issues — both for the intrinsic devices and all the associated parasitics — presented formidable challenges and mandated the development of a range of advanced physical models for process and device simulation. Starting in the late 1960s and into the 1970s, the modeling approaches exploited were dominantly one- and two-dimensional simulators. While TCAD in these early generations showed exciting promise in addressing the physics-oriented challenges of bipolar technology, the superior scalability and power consumption of MOS technology revolutionized the IC industry. By the mid-1980s, CMOS became the dominant driver for integrated electronics. Nonetheless, these early TCAD developments [5] [6] set the stage for their growth and broad deployment as an essential toolset that has leveraged technology development through the VLSI and ULSI eras which are now the mainstream.

IC development for more than a quarter-century has been dominated by the MOS technology. In the 1970s and 1980s NMOS was favored owing to speed and area advantages, coupled with technology limitations and concerns related to isolation, parasitic effects and process complexity. During that era of NMOS-dominated LSI and the emergence of VLSI, the fundamental scaling laws of MOS technology were codified and broadly applied. [7] It was also during this period that TCAD reached maturity in terms of realizing robust process modeling (primarily one-dimensional) which then became an integral technology design tool, used universally across the industry. [8] At the same time device simulation, dominantly two-dimensional owing to the nature of MOS devices, became the work-horse of technologists in the design and scaling of devices. [9] The transition from NMOS to CMOS technology resulted in the necessity of tightly coupled and fully 2D simulators for process and device simulations. This third generation of TCAD tools became critical to address the full complexity of twin-well CMOS technology (see Figure 3a), including issues of design rules and parasitic effects such as latchup. [10] [11] An abbreviated but prospective view of this period, through the mid-1980s, is given in; [12] and from the point of view of how TCAD tools were used in the design process. [13]

Modern TCAD

Today the requirements for and use of TCAD cross-cut a very broad landscape of design automation issues, including many fundamental physical limits. At the core are still a host of process and device modeling challenges that support intrinsic device scaling and parasitic extraction. These applications include technology and design rule development, extraction of compact models and more generally design for manufacturability (DFM). [14] The dominance of interconnects for giga-scale integration (transistor counts in O(billion)) and clocking frequencies in O (10 gigahertz)) have mandated the development of tools and methodologies that embrace patterning by electro-magnetic simulations—both for optical patterns and electronic and optical interconnect performance modeling—as well as circuit-level modeling. This broad range of issues at the device and interconnect levels, including links to underlying patterning and processing technologies, is summarized in Figure 1 and provides a conceptual framework for the discussion that now follows.

Figure 1 depicts a hierarchy of process, device and circuit levels of simulation tools. On each side of the boxes indicating modeling level are icons that schematically depict representative applications for TCAD. The left side gives emphasis to Design For Manufacturing (DFM) issues such as: shallow-trench isolation (STI), extra features required for phase-shift masking (PSM) and challenges for multi-level interconnects that include processing issues of chemical-mechanical planarization (CMP), and the need to consider electro-magnetic effects using electromagnetic field solvers. The right side icons show the more traditional hierarchy of expected TCAD results and applications: complete process simulations of the intrinsic devices, predictions of drive current scaling and extraction of technology files for the complete set of devices and parasitics.

Figure 2 again looks at TCAD capabilities but this time more in the context of design flow information and how this relates to the physical layers and modeling of the electronic design automation (EDA) world. Here the simulation levels of process and device modeling are considered as integral capabilities (within TCAD) that together provide the "mapping" from mask-level information to the functional capabilities needed at the EDA level such as compact models ("technology files") and even higher-level behavioral models. Also shown is the extraction and electrical rule checking (ERC); this indicates that many of the details that to date have been embedded in analytical formulations, may in fact also be linked to the deeper TCAD level in order to support the growing complexity of technology scaling.

Workflow

TCADs typically integrate with the Integrated circuit design process and include the following tools:

Providers

Current major suppliers of TCAD tools include Delphea, Synopsys, Silvaco, Crosslight Software, Cogenda Software, Global TCAD Solutions [15] and Tiberlab. [16] The open source GSS, [17] Archimedes, [18] Aeneas, [19] NanoTCAD ViDES, DEVSIM, [20] and GENIUS have some of the capabilities of the commercial products.

Related Research Articles

<span class="mw-page-title-main">Integrated circuit</span> Electronic circuit formed on a small, flat piece of semiconductor material

An integrated circuit, also known as a microchip or IC, is a small electronic device made up of multiple interconnected electronic components such as transistors, resistors, and capacitors. These components are etched onto a small piece of semiconductor material, usually silicon. Integrated circuits are used in a wide range of electronic devices, including computers, smartphones, and televisions, to perform various functions such as processing and storing information. They have greatly impacted the field of electronics by enabling device miniaturization and enhanced functionality.

<span class="mw-page-title-main">Very Large Scale Integration</span> Creating an integrated circuit by combining many transistors into a single chip

Very-large-scale integration (VLSI) is the process of creating an integrated circuit (IC) by combining millions or billions of MOS transistors onto a single chip. VLSI began in the 1970s when MOS integrated circuit chips were developed and then widely adopted, enabling complex semiconductor and telecommunication technologies. The microprocessor and memory chips are VLSI devices.

<span class="mw-page-title-main">Application-specific integrated circuit</span> Integrated circuit customized for a specific task

An application-specific integrated circuit is an integrated circuit (IC) chip customized for a particular use, rather than intended for general-purpose use, such as a chip designed to run in a digital voice recorder or a high-efficiency video codec. Application-specific standard product chips are intermediate between ASICs and industry standard integrated circuits like the 7400 series or the 4000 series. ASIC chips are typically fabricated using metal–oxide–semiconductor (MOS) technology, as MOS integrated circuit chips.

Electronic design automation (EDA), also referred to as electronic computer-aided design (ECAD), is a category of software tools for designing electronic systems such as integrated circuits and printed circuit boards. The tools work together in a design flow that chip designers use to design and analyze entire semiconductor chips. Since a modern semiconductor chip can have billions of components, EDA tools are essential for their design; this article in particular describes EDA specifically with respect to integrated circuits (ICs).

Silvaco Group, Inc., develops and markets electronic design automation (EDA) and technology CAD (TCAD) software and semiconductor design IP (SIP). The company is headquartered in Santa Clara, California, and has offices in North America, Europe, and throughout Asia. Founded in 1984, Silvaco is a privately held EDA company. The company has been known by at least two other names: Silvaco International, and Silvaco Data Systems.

<span class="mw-page-title-main">Mixed-signal integrated circuit</span> Integrated circuit

A mixed-signal integrated circuit is any integrated circuit that has both analog circuits and digital circuits on a single semiconductor die. Their usage has grown dramatically with the increased use of cell phones, telecommunications, portable electronics, and automobiles with electronics and digital sensors.

VLSI Technology, Inc., was an American company that designed and manufactured custom and semi-custom integrated circuits (ICs). The company was based in Silicon Valley, with headquarters at 1109 McKay Drive in San Jose. Along with LSI Logic, VLSI Technology defined the leading edge of the application-specific integrated circuit (ASIC) business, which accelerated the push of powerful embedded systems into affordable products.

<span class="mw-page-title-main">Standard cell</span>

In semiconductor design, standard-cell methodology is a method of designing application-specific integrated circuits (ASICs) with mostly digital-logic features. Standard-cell methodology is an example of design abstraction, whereby a low-level very-large-scale integration (VLSI) layout is encapsulated into an abstract logic representation.

<span class="mw-page-title-main">Integrated circuit design</span> Engineering process for electronic hardware

Integrated circuit design, or IC design, is a sub-field of electronics engineering, encompassing the particular logic and circuit design techniques required to design integrated circuits, or ICs. ICs consist of miniaturized electronic components built into an electrical network on a monolithic semiconductor substrate by photolithography.

Transistors are simple devices with complicated behavior. In order to ensure the reliable operation of circuits employing transistors, it is necessary to scientifically model the physical phenomena observed in their operation using transistor models. There exists a variety of different models that range in complexity and in purpose. Transistor models divide into two major groups: models for device design and models for circuit design.

<span class="mw-page-title-main">Semiconductor process simulation</span> Modeling for semiconductor fabrication

Semiconductor process simulation is the modeling of the fabrication of semiconductor devices such as transistors. It is a branch of electronic design automation, and part of a sub-field known as technology CAD, or TCAD.

<span class="mw-page-title-main">Semiconductor device modeling</span> Modeling semiconductor behavior

Semiconductor device modeling creates models for the behavior of the electrical devices based on fundamental physics, such as the doping profiles of the devices. It may also include the creation of compact models, which try to capture the electrical behavior of such devices but do not generally derive them from the underlying physics. Normally it starts from the output of a semiconductor process simulation.

In semiconductor electronics fabrication technology, a self-aligned gate is a transistor manufacturing approach whereby the gate electrode of a MOSFET is used as a mask for the doping of the source and drain regions. This technique ensures that the gate is naturally and precisely aligned to the edges of the source and drain.

Chih-Tang "Tom" Sah is a Chinese-American electronics engineer and condensed matter physicist. He is best known for inventing CMOS logic with Frank Wanlass at Fairchild Semiconductor in 1963. CMOS is now used in nearly all modern very large-scale integration (VLSI) semiconductor devices.

In semiconductor manufacturing, a process corner is an example of a design-of-experiments (DoE) technique that refers to a variation of fabrication parameters used in applying an integrated circuit design to a semiconductor wafer. Process corners represent the extremes of these parameter variations within which a circuit that has been etched onto the wafer must function correctly. A circuit running on devices fabricated at these process corners may run slower or faster than specified and at lower or higher temperatures and voltages, but if the circuit does not function at all at any of these process extremes the design is considered to have inadequate design margin.

This page is a comparison of electronic design automation (EDA) software which is used today to design the near totality of electronic devices. Modern electronic devices are too complex to be designed without the help of a computer. Electronic devices may consist of integrated circuits (ICs), printed circuit boards (PCBs), field-programmable gate arrays (FPGAs) or a combination of them. Integrated circuits may consist of a combination of digital and analog circuits. These circuits can contain a combination of transistors, resistors, capacitors or specialized components such as analog neural networks, antennas or fuses.

Crosslight Software Inc. is an international company headquartered in greater Vancouver, British Columbia, Canada. Officially spun off from the National Research Council of Canada (NRC) in 1995, it provides Technology Computer Aided Design (TCAD) tools for semiconductor device and process simulations.

Kenneth L Shepard is an American electrical engineer, nanoscientist, entrepreneur, and the Lau Family Professor of Electrical Engineering and Biomedical Engineering at the Columbia School of Engineering and Applied Science (Columbia).

Robert W. Dutton is an American electrical engineer. At Stanford University, he is the Robert and Barbara Kleist Professor of Electrical Engineering. Dutton also serves as the undergraduate advisor for Stanford University Department of Electrical Engineering.

RF CMOS is a metal–oxide–semiconductor (MOS) integrated circuit (IC) technology that integrates radio-frequency (RF), analog and digital electronics on a mixed-signal CMOS RF circuit chip. It is widely used in modern wireless telecommunications, such as cellular networks, Bluetooth, Wi-Fi, GPS receivers, broadcasting, vehicular communication systems, and the radio transceivers in all modern mobile phones and wireless networking devices. RF CMOS technology was pioneered by Pakistani engineer Asad Ali Abidi at UCLA during the late 1980s to early 1990s, and helped bring about the wireless revolution with the introduction of digital signal processing in wireless communications. The development and design of RF CMOS devices was enabled by van der Ziel's FET RF noise model, which was published in the early 1960s and remained largely forgotten until the 1990s.

References

  1. ↑ Electronic design automation for IC implementation, circuit design, and process technology. Luciano Lavagno, Igor L. Markov, Grant Martin, Lou Scheffer (2 ed.). Boca Raton. 2016. ISBN   978-1-4822-5461-7. OCLC   948286295.{{cite book}}: CS1 maint: location missing publisher (link) CS1 maint: others (link)
  2. ↑ Lui, Basil; Migliorato, P (1997-04-01). "A new generation-recombination model for device simulation including the Poole-Frenkel effect and phonon-assisted tunnelling". Solid-State Electronics. 41 (4): 575–583. Bibcode:1997SSEle..41..575L. doi:10.1016/S0038-1101(96)00148-7. ISSN   0038-1101.
  3. ↑ WO2000077533A3,Lui, Basil,"Semiconductor device simulation method and simulator",issued 2001-04-26
  4. ↑ Lui, Basil; Tam, S. W. B.; Migliorato, P. (1998). "A Polysilicon Tft Parameter Extractor". MRS Online Proceedings Library. 507: 365. doi:10.1557/PROC-507-365. ISSN   0272-9172.
  5. ↑ H.J. DeMan and R. Mertens, SITCAP — A simulator of bipolar transistors for computer-aided circuit analysis programs, International Solid-State Circuits Conference (ISSCC), Technical Digest, pp. 104-5, February, 1973
  6. ↑ R.W. Dutton and D.A. Antoniadis, Process simulation for device design and control, International Solid-State Circuits Conference (ISSCC), Technical Digest, pp. 244-245, February, 1979
  7. ↑ R.H. Dennard, F.H. Gaensslen, H.N. Yu, V.L. Rodeout, E. Bassous and A.R. LeBlanc, Design of ion-implanted MOSFETs with very small physical dimensions, IEEE Jour. Solid-State Circuits, vol. SC-9, pp.256-268, October, 1974.
  8. ↑ R.W. Dutton and S.E. Hansen, Process modeling of integrated circuit device technology, Proceeding IEEE, vol. 69, no. 10, pp. 1305-1320, October, 1981.
  9. ↑ P.E. Cottrell and E.M. Buturla, "Two-dimensional static and transient simulation of mobile carrier transport in a semiconductor," Proceedings NASECODE I (Numerical Analysis of Semiconductor Devices), pp. 31-64, Boole Press, 1979.
  10. ↑ C.S. Rafferty, M.R. Pinto, and R.W. Dutton, Iterative methods in semiconductor device simulation, IEEE Trans. Elec. Dev., vol. ED-32, no.10, pp.2018-2027, October, 1985.
  11. ↑ M.R. Pinto and R.W. Dutton, Accurate trigger condition analysis for CMOS latchup, IEEE Electron Device Letters, vol. EDL-6, no. 2, February, 1985.
  12. ↑ R.W. Dutton, Modeling and simulation for VLSI, International Electron Devices Meeting (IEDM), Technical Digest, pp. 2-7, December, 1986.
  13. ↑ K.M. Cham, S.-Y. Oh, D. Chin and J.L. Moll, Computer-Aided Design and VLSI Device Development, Kluwer Academic Publishers (KAP), 1986. ISBN   978-0-89838-204-4
  14. ↑ R.W. Dutton and A.J. Strojwas, Perspectives on technology and technology-driven CAD, IEEE Trans. CAD-ICAS, vol. 19, no. 12, pp. 1544-1560, December, 2000.
  15. ↑ Global TCAD Solutions
  16. ↑ tiberCAD multiscale simulation tool
  17. ↑ GSS:General-purpose Semiconductor Simulator
  18. ↑ Archimedes
  19. ↑ Aeneas
  20. ↑ DEVSIM TCAD Software
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