An electron microscope is a microscope that uses a beam of electrons as a source of illumination. They use electron optics that are analogous to the glass lenses of an optical light microscope. As the wavelength of an electron can be up to 100,000 times shorter than that of visible light, electron microscopes have a higher resolution of about 0.1 nm, which compares to about 200 nm for light microscopes. Electron microscope may refer to:
A microscope is a laboratory instrument used to examine objects that are too small to be seen by the naked eye. Microscopy is the science of investigating small objects and structures using a microscope. Microscopic means being invisible to the eye unless aided by a microscope.
A scanning electron microscope (SEM) is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample. The electron beam is scanned in a raster scan pattern, and the position of the beam is combined with the intensity of the detected signal to produce an image. In the most common SEM mode, secondary electrons emitted by atoms excited by the electron beam are detected using a secondary electron detector. The number of secondary electrons that can be detected, and thus the signal intensity, depends, among other things, on specimen topography. Some SEMs can achieve resolutions better than 1 nanometer.
Scanning probe microscopy (SPM) is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen. SPM was founded in 1981, with the invention of the scanning tunneling microscope, an instrument for imaging surfaces at the atomic level. The first successful scanning tunneling microscope experiment was done by Gerd Binnig and Heinrich Rohrer. The key to their success was using a feedback loop to regulate gap distance between the sample and the probe.
Surface roughness can be regarded as the quality of a surface of not being smooth and it is hence linked to human (haptic) perception of the surface texture. From a mathematical perspective it is related to the spatial variability structure of surfaces, and inherently it is a multiscale property. It has different interpretations and definitions depending from the disciplines considered.
Surface metrology is the measurement of small-scale features on surfaces, and is a branch of metrology. Surface primary form, surface fractality, and surface finish are the parameters most commonly associated with the field. It is important to many disciplines and is mostly known for the machining of precision parts and assemblies which contain mating surfaces or which must operate with high internal pressures.
The Department of Materials at the University of Oxford, England was founded in the 1950s as the Department of Metallurgy, by William Hume-Rothery, who was a reader in Oxford's Department of Inorganic Chemistry. It is part of the university's Mathematical, Physical and Life Sciences Division
A profilometer is a measuring instrument used to measure a surface's profile, in order to quantify its roughness. Critical dimensions as step, curvature, flatness are computed from the surface topography.
KLA Corporation is an American capital equipment company based in Milpitas, California. It supplies process control and yield management systems for the semiconductor industry and other related nanoelectronics industries. The company's products and services are intended for all phases of wafer, reticle, integrated circuit (IC) and packaging production, from research and development to final volume manufacturing.
The environmental scanning electron microscope (ESEM) is a scanning electron microscope (SEM) that allows for the option of collecting electron micrographs of specimens that are wet, uncoated, or both by allowing for a gaseous environment in the specimen chamber. Although there were earlier successes at viewing wet specimens in internal chambers in modified SEMs, the ESEM with its specialized electron detectors and its differential pumping systems, to allow for the transfer of the electron beam from the high vacuum in the gun area to the high pressure attainable in its specimen chamber, make it a complete and unique instrument designed for the purpose of imaging specimens in their natural state. The instrument was designed originally by Gerasimos Danilatos while working at the University of New South Wales.
ISO 25178: Geometrical Product Specifications (GPS) – Surface texture: areal is an International Organization for Standardization collection of international standards relating to the analysis of 3D areal surface texture.
Aspex Corporation, founded in 1992, is a supplier of electron microscopy tools to researchers, developers and manufacturers working on Process control through automated scanning electron microscope and energy-dispersive X-ray spectroscopy.
Focus variation is a method used to sharpen images and to measure surface irregularities by means of optics with limited depth of field.
Nikon Instruments is a division of the Nikon Corporation, which is headquartered in Tokyo. Its US operations are based in Melville, New York and its European operations in Amstelveen, Netherlands. Nikon Instruments is a specialist in optical instrumentation and the only microscope company to manufacture its own glass.
Digital holographic microscopy (DHM) is digital holography applied to microscopy. Digital holographic microscopy distinguishes itself from other microscopy methods by not recording the projected image of the object. Instead, the light wave front information originating from the object is digitally recorded as a hologram, from which a computer calculates the object image by using a numerical reconstruction algorithm. The image forming lens in traditional microscopy is thus replaced by a computer algorithm. Other closely related microscopy methods to digital holographic microscopy are interferometric microscopy, optical coherence tomography and diffraction phase microscopy. Common to all methods is the use of a reference wave front to obtain amplitude (intensity) and phase information. The information is recorded on a digital image sensor or by a photodetector from which an image of the object is created (reconstructed) by a computer. In traditional microscopy, which do not use a reference wave front, only intensity information is recorded and essential information about the object is lost.
Mountains is an image analysis and surface metrology software platform published by the company Digital Surf. Its core is micro-topography, the science of studying surface texture and form in 3D at the microscopic scale. The software is dedicated to profilometers, 3D light microscopes ("MountainsMap"), scanning electron microscopes ("MountainsSEM") and scanning probe microscopes ("MountainsSPIP").
Taylor Hobson is an English company founded in 1886 and located in Leicester, England. Originally a manufacturer of still camera and cine lenses, the company now manufactures precision metrology instruments—in particular, profilometers for the analysis of surface textures and forms.
Coherence scanning interferometry (CSI) is any of a class of optical surface measurement methods wherein the localization of interference fringes during a scan of optical path length provides a means to determine surface characteristics such as topography, transparent film structure, and optical properties. CSI is currently the most common interference microscopy technique for areal surface topography measurement. The term "CSI" was adopted by the International Organization for Standardization (ISO).
ISO 16610: Geometrical product specifications (GPS) – Filtration is a standard series on filters for surface texture, and provides guidance on the use of these filters in various applications. Filters are used in surface texture in order reduce the bandwidth of analysis in order to obtain functional correlation with physical phenomena such as friction, wear, adhesion, etc. For example, filters are used to separate roughness and waviness from the primary profile, or to create a multiscale decomposition in order to identify the scale at which a phenomenon occurs. Historically, the first roughness measuring instruments - stylus profilometer - used to have electronic filters made of capacitors and resistors that filtered out low frequencies in order to retain frequencies that represent roughness. Later, digital filters replaced analog filters and international standards such as ISO 11562 for the Gaussian filter were published.
The Aphelion Imaging Software Suite is a software suite that includes three base products - Aphelion Lab, Aphelion Dev, and Aphelion SDK for addressing image processing and image analysis applications. The suite also includes a set of extension programs to implement specific vertical applications that benefit from imaging techniques.
