Jeffrey Elam

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Jeffrey Elam
Alma materCornell University (BA), University of Chicago (PhD)
Known forAtomic layer deposition
TitleDistinguished Fellow, Senior Chemist and Group Leader
Scientific career
FieldsChemistry, materials science, thin films
Institutions Argonne National Laboratory
Website www.anl.gov/profile/jeffrey-w-elam

Jeffrey Elam is a Distinguished Fellow, Senior Chemist and Group Leader [1] in the Applied Materials Division at the U.S. Department of Energy's Argonne National Laboratory. He leads Argonne's atomic layer deposition (ALD) research program, where he directs research and development and commercialization of thin film coating technologies for energy applications.

Contents

Elam is a fellow of the Northwestern-Argonne Institute of Science and Engineering, [2] and staff member at the Center for Molecular Engineering at Argonne. [3] He also manages the Functional Coatings Group in Argonne's Applied Materials Division [4] and is a principal investigator in the US-Israel Collaborative Water-Energy Research Center (CoWERC), and the Advanced Materials for Energy-Water Systems Center, [5] a DOE Energy Frontier Research Center.

Education

Elam graduated from Cornell University with a bachelor's degree in chemistry, followed by the University of Chicago with a PhD in physical chemistry in the lab of Donald H. Levy. [6] Elam pursued postdoctoral studies with Steven M. George at the University of Colorado where he developed ALD thin film growth methods. [7] [8]

Research

Oleo Sponge

Elam co-invented (with Seth Darling) the Oleo Sponge, [9] a polyurethane foam engineered to absorb oil from water. Researchers engineered the material to be oleophilic and hydrophobic using sequential infiltration synthesis (SIS), [10] a patented-material synthesis method Elam co-invented that has been cited by multiple companies. [11] [12] [13] SIS was used to coat the interior surfaces of the foam with a thin layer of metal oxide “primer” that acts as a glue for attaching a monolayer of oleophilic molecules. The result is a reusable sponge capable of adsorbing up to 90 times its weight in oil. [14]

Large Area Microchannel Plates

Elam was part of the team that developed the world's largest microchannel plate (MCP), [15] a solid-state, 2-dimensional electron amplifier critical to a variety of imaging and sensing applications. This was achieved by using ALD nanocomposite coatings to create a manufacturing strategy for MCPs that drove down cost, improved performance, and widened applications. [16] The ALD coatings have been implemented by Incom, Inc. to manufacture large area MCPs [17] and are being incorporated into large area photodetectors. [18] The patent for fabricating the technology has been cited by more than a dozen companies, including Samsung, Nova Scientific and Nissan. [19]

Scale-up of Transparent Conducting Oxide Coatings

Elam led a team to create ALD methods for depositing ITO films, a common transparent conducting thin film found in devices such as solar cells, flat panel displays, and touch screens, onto nanoporous supports and over large substrate areas. One patented method, [20] which used two oxygen-sources “synergistically” [21] to allow materials to grow at lower-than-normal temperatures, proved [20] capable of coating nanoporous materials with high precision and uniformity.

Publications

Elam has authored over 300 papers on the subject of ALD, his work has been cited over 34,000 times. [22] His most cited study, published in 2003, demonstrated the low temperature growth of Al2O3 ALD films—which have the potential to coat thermally fragile substrates such as organic, polymeric, or biological materials—at temperatures as low as 33 °C. [23] His research group has amassed over 50 inventions in ALD coating technology and holds numerous patents. [24]

Honors

Elam is a fellow of the American Vacuum Society. In 2017, he received the ALD Innovation Award [25] from the AVS for original work and leadership in ALD. In 2019 he received a lifetime achievement award from Argonne. [26]

Notable patents

Related Research Articles

<span class="mw-page-title-main">Argonne National Laboratory</span> American science and engineering research laboratory in Illinois

Argonne National Laboratory is a federally funded research and development center in Lemont, Illinois, United States. Founded in 1946, the laboratory is owned by the United States Department of Energy and administered by UChicago Argonne LLC of the University of Chicago. The facility is the largest national laboratory in the Midwest.

A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering. Advances in thin film deposition techniques during the 20th century have enabled a wide range of technological breakthroughs in areas such as magnetic recording media, electronic semiconductor devices, integrated passive devices, light-emitting diodes, optical coatings, hard coatings on cutting tools, and for both energy generation and storage. It is also being applied to pharmaceuticals, via thin-film drug delivery. A stack of thin films is called a multilayer.

<span class="mw-page-title-main">Nanorod</span>

In nanotechnology, nanorods are one morphology of nanoscale objects. Each of their dimensions range from 1–100 nm. They may be synthesized from metals or semiconducting materials. Standard aspect ratios are 3-5. Nanorods are produced by direct chemical synthesis. A combination of ligands act as shape control agents and bond to different facets of the nanorod with different strengths. This allows different faces of the nanorod to grow at different rates, producing an elongated object.

Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. The majority of ALD reactions use two chemicals called precursors. These precursors react with the surface of a material one at a time in a sequential, self-limiting, manner. A thin film is slowly deposited through repeated exposure to separate precursors. ALD is a key process in fabricating semiconductor devices, and part of the set of tools for synthesizing nanomaterials.

Nanomanufacturing is both the production of nanoscaled materials, which can be powders or fluids, and the manufacturing of parts "bottom up" from nanoscaled materials or "top down" in smallest steps for high precision, used in several technologies such as laser ablation, etching and others. Nanomanufacturing differs from molecular manufacturing, which is the manufacture of complex, nanoscale structures by means of nonbiological mechanosynthesis.

Dieter Martin Gruen is a German-born American scientist, who was a senior member of the Materials Science Division at Argonne National Laboratory. He received B.S. and M.S. (1947) degrees in chemistry from Northwestern University and the Ph.D. (1951) in chemical physics from the University of Chicago.

ASM is a Dutch headquartered multinational corporation that specializes in the design, manufacturing, sales and service of semiconductor wafer processing equipment for the fabrication of semiconductor devices. ASM's products are used by semiconductor manufacturers in front-end wafer processing in their semiconductor fabrication plants. ASM's technologies include atomic layer deposition, epitaxy, chemical vapor deposition and diffusion.

<span class="mw-page-title-main">Gradient multilayer nanofilm</span>

Gradient multilayer (GML) nanofilm is an assembly of quantum dot layers with a built-in gradient of nanoparticle size, composition or density.

<span class="mw-page-title-main">Microchannel plate detector</span> Detection single parties and photons

A microchannel plate (MCP) is used to detect single particles and photons. It is closely related to an electron multiplier, as both intensify single particles or photons by the multiplication of electrons via secondary emission. Because a microchannel plate detector has many separate channels, it can provide spatial resolution.

<span class="mw-page-title-main">Ion layer gas reaction</span>

Ion layer gas reaction (ILGAR®) is a non-vacuum, thin-film deposition technique developed and patented by the group of Professor Dr. Christian-Herbert Fischer at the Helmholtz-Zentrum Berlin for materials and energy in Berlin, Germany. It is a sequential and cyclic process that enables the deposition of semiconductor thin films, mainly for photovoltaic applications, specially chalcopyrite absorber layers and buffer layers. The ILGAR technique was awarded as German High Tech Champion 2011 by the Fraunhofer Society.

Michael Makepeace Thackeray is a South African chemist and battery materials researcher. He is mainly known for his work on electrochemically active cathode materials. In the mid-1980s he co-discovered the manganese oxide spinel family of cathodes for lithium ion batteries while working in the lab of John Goodenough at the University of Oxford. In 1998, while at Argonne National Laboratory, he led a team that first reported the NMC cathode technology. Patent protection around the concept and materials were first issued in 2005 to Argonne National Laboratory to a team with Thackeray, Khalil Amine, Jaekook Kim, and Christopher Johnson. The reported invention is now widely used in consumer electronics and electric vehicles.

<span class="mw-page-title-main">Tuomo Suntola</span> Finnish physicist and inventor

Tuomo Suntola is a Finnish physicist, inventor, and technology leader. He is best known for his pioneering research in materials science, developing the thin film growth technique called atomic layer deposition.

<span class="mw-page-title-main">Igor Serafimovich Tashlykov</span> Soviet and Belarusian physicist

Igor Serafimovich Tashlykov was a Soviet and Belarusian physicist, who was awarded the Doctor of Physical and Mathematical Sciences degree (1989). He was a member of the Belarusian Physical Society (1995). He carried out research at the Research Institute of Applied Physical Problems (APP) of the Belarusian State University, the Belarusian State Technological University, the Maxim Tank Belarusian State Pedagogical University (BSPU).

Molecular layer deposition (MLD) is a vapour phase thin film deposition technique based on self-limiting surface reactions carried out in a sequential manner. Essentially, MLD resembles the well established technique of atomic layer deposition (ALD) but, whereas ALD is limited to exclusively inorganic coatings, the precursor chemistry in MLD can use small, bifunctional organic molecules as well. This enables, as well as the growth of organic layers in a process similar to polymerization, the linking of both types of building blocks together in a controlled way to build up organic-inorganic hybrid materials.

<span class="mw-page-title-main">Amanda Petford-Long</span> British materials scientist

Amanda Karen Petford-Long is a Professor of Materials Science and Distinguished Fellow at the Argonne National Laboratory. She is also a Professor of Materials Science at Northwestern University.

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Larry A. Curtiss is an American chemist and researcher. He was born in Madison. WI. in 1947. He is a distinguished fellow and group leader of the Molecular Materials Group in the Materials Science Division at the U.S. Department of Energy's (DOE) Argonne National Laboratory. In addition, Curtiss is a senior investigator in the Joint Center for Energy Storage Research (JCESR), a DOE Energy Storage Hub, and was the deputy director of the Center for Electrochemical Energy Science, a DOE Energy Frontier Research Center.

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<span class="mw-page-title-main">Seth Darling</span>

Seth B. Darling is the Chief Science & Technology Officer of the Advanced Energy Technologies Directorate at Argonne National Laboratory. He previously served as director of the Center for Molecular Engineering, a research and development organization partnered with the University of Chicago focusing on advanced materials for cleaning water, quantum information science, and polymer science. Darling is also a senior scientist at both the U.S. Department of Energy’s (DOE) Argonne National Laboratory and the University of Chicago’s Pritzker School of Molecular Engineering. He also directs the Advanced Materials for Energy-Water Systems (AMEWS) Center, a DOE Energy Frontier Research Center formed in 2018.

Derived from atomic layer deposition (ALD), sequential infiltration synthesis (SIS) is a technique in which a polymer is infused with inorganic material using sequential, self-limiting exposures to gaseous precursors, allowing for the precise control over the composition, structure and properties of materials. This synthesis involves metal-organic vapor-phase precursors and co-reactants dissolving and diffusing into polymers, interacting with the polymer functional groups via reversible complex formation and/or irreversible chemical reactions yielding desired composite materials, which may be nanostructured. The metal-organic precursor (A) and co-react vapor (B) are supplied in an alternating ABAB sequence. Following SIS, the organic phase can be removed thermally or chemically to leave only the inorganic components behind. The precise control over the infiltration and synthesis via SIS allows the creation of materials with tailored properties like composition, mechanics, stoichiometry, porosity, conductivity, refractive index, and chemical functionality on the nanoscale. This empowers SIS to have a wide range of applications from electronics to energy storage to catalysis. SIS is sometimes referred to as "multiple pulsed vapor-phase infiltration" (MPI), "vapor phase infiltration" (VPI)” or "sequential vapor infiltration" (SVI)".

References

  1. "Jeffrey W. Elam | Argonne National Laboratory". www.anl.gov. Retrieved 2019-10-27.
  2. "Members – NAISE Institute". www.naise.northwestern.edu. Retrieved 2019-10-27.
  3. "Staff Directory | Argonne National Laboratory". www.anl.gov. Retrieved 2020-04-29.
  4. "Functional Coatings | Argonne National Laboratory". www.anl.gov. Retrieved 2020-04-29.
  5. "Advanced Materials for Energy-Water Systems Center | Our Team | Argonne National Laboratory". www.anl.gov. Retrieved 2020-04-29.
  6. "Jeffrey W. Elam | Argonne National Laboratory". www.anl.gov. Retrieved 2019-10-27.
  7. "Jeffrey W. Elam". www.aiche.org. 2017-08-07. Retrieved 2020-04-29.
  8. "UAH College of Engineering welcomes Dr. Jeffrey W. Elam of Argonne National Laboratory". The University of Alabama in Huntsville. 2016-11-07. Retrieved 2020-04-29.
  9. "Argonne invents reusable sponge that soaks up oil, could revolutionize oil spill and diesel cleanup | Argonne National Laboratory". www.anl.gov. 6 March 2017. Retrieved 2019-09-27.
  10. Elam, J. W.; Biswas, M.; Darling, S.; Yanguas-Gil, A.; Emery, J. D.; Martinson, A. B. F.; Nealey, P. F.; Segal-Peretz, T.; Peng, Q.; Winterstein, J.; Liddle, J. A. (2015-10-02). "New Insights into Sequential Infiltration Synthesis". ECS Transactions. 69 (7): 147–157. Bibcode:2015ECSTr..69g.147E. doi:10.1149/06907.0147ecst. ISSN   1938-6737. PMC   5424714 . PMID   28503252.
  11. "The promise of deep grooves | Argonne National Laboratory". www.anl.gov. October 2018. Retrieved 2020-04-30.
  12. 1 2 US 9786511,Darling, Seth B.; Elam, Jeffrey W.& Tseng, Yu-Chihet al.,"Sequential infiltration synthesis for advanced lithography",published 2017-10-10, assigned to UChicago Argonne LLC
  13. "New Vapor Deposition Method Lets Engineers Build Untraditional Materials". Machine Design. 2018-10-12. Retrieved 2019-09-27.
  14. "Oleo Sponge Could Make Oil Spill Cleanup More Efficient". The Wall Street Journal. March 16, 2017. Retrieved September 25, 2019.
  15. Mane, Anil U.; Peng, Qing; Elam, Jeffrey W.; Bennis, Daniel C.; Craven, Christopher A.; Detarando, Michael A.; Escolas, John R.; Frisch, Henry J.; Jokela, Slade J.; McPhate, Jason; Minot, Michael J. (2012-01-01). "An Atomic Layer Deposition Method to Fabricate Economical and Robust Large Area Microchannel Plates for Photodetectors". Physics Procedia. Proceedings of the 2nd International Conference on Technology and Instrumentation in Particle Physics (TIPP 2011). 37: 722–732. Bibcode:2012PhPro..37..722M. doi: 10.1016/j.phpro.2012.03.720 . ISSN   1875-3892.
  16. "Nanocomposite Coatings with Tunable Properties Prepared by Atomic Layer Deposition". Sigma-Aldrich. Retrieved 2019-10-27.
  17. "MCP / Microchannel Plate / Photon and Electron Amplification". Incom. Retrieved 2019-09-27.
  18. Adams, Bernhard W.; Attenkofer, Klaus; Bogdan, Mircea; Byrum, Karen; Elagin, Andrey; Elam, Jeffrey W.; Frisch, Henry J.; Genat, Jean-Francois; Grabas, Herve; Gregar, Joseph; Hahn, Elaine (2016-03-06). "A Brief Technical History of the Large-Area Picosecond Photodetector (LAPPD) Collaboration". arXiv: 1603.01843 [physics.ins-det].
  19. US 8969823,Elam, Jeffrey W.; Mane, Anil U.& Peng, Qing,"Microchannel plate detector and methods for their fabrication",published 2015-03-03, assigned to UChicago Argonne LLC
  20. 1 2 US 10131991,Elam, Jeffrey W.&Libera, Joseph A.,"Method for depositing transparent conducting oxides",published 2018-11-20, assigned to UChicago Argonne LLC
  21. Libera, Joseph A.; Hryn, John N.; Elam, Jeffrey W. (2011-04-26). "Indium Oxide Atomic Layer Deposition Facilitated by the Synergy between Oxygen and Water". Chemistry of Materials. 23 (8): 2150–2158. doi:10.1021/cm103637t. ISSN   0897-4756.
  22. "Jeffrey Elam - Google Scholar Citations". scholar.google.com. Retrieved 2019-10-27.
  23. Groner, M. D.; Fabreguette, F. H.; Elam, J. W.; George, S. M. (2004-02-01). "Low-Temperature Al2O3 Atomic Layer Deposition". Chemistry of Materials. 16 (4): 639–645. doi:10.1021/cm0304546. ISSN   0897-4756.
  24. "Jeffrey W. Elam Inventions, Patents and Patent Applications - Justia Patents Search". patents.justia.com. Retrieved 2020-02-02.
  25. "Awards". ald2018.avs.org. Retrieved 2019-09-27.
  26. "Congratulations to winners of 2019 Argonne Commercialization Excellence Awards". Argonne Today. May 21, 2019. Retrieved September 25, 2019.
  27. US 10177365,Mane, Anil U.; Elam, Jeffrey W.& Park, Joong Sunet al.,"Metal fluoride passivation coatings prepared by atomic layer deposition for Li-ion batteries",published 2019-01-08, assigned to UChicago Argonne LLC
  28. US 8980418,Darling, Seth B.; Elam, Jeffrey W.& Tseng, Yu-Chihet al.,"Sequential infiltration synthesis for advanced lithography",published 2015-03-17, assigned to UChicago Argonne LLC
  29. US 8921799,Elam, Jeffrey W.&Mane, Anil U.,"Tunable resistance coatings",published 2014-12-30, assigned to UChicago Argonne LLC
  30. US 8951615,Elam, Jeffrey W.&Yanguas-Gil, Angel,"Doping control by ALD surface functionalization",published 2015-02-10, assigned to UChicago Argonne LLC
  31. US 8969823,Elam, Jeffrey W.; Mane, Anil U.& Peng, Qing,"Microchannel plate detector and methods for their fabrication",published 2015-03-03