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MEMS is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size,and MEMS devices generally range in size from 20 micrometres to a millimetre,although components arranged in arrays can be more than 1000 mm2. They usually consist of a central unit that processes data and several components that interact with the surroundings.
A transducer is a device that converts energy from one form to another. Usually a transducer converts a signal in one form of energy to a signal in another. Transducers are often employed at the boundaries of automation,measurement,and control systems,where electrical signals are converted to and from other physical quantities. The process of converting one form of energy to another is known as transduction.
In electromagnetics,an evanescent field,or evanescent wave,is an oscillating electric and/or magnetic field that does not propagate as an electromagnetic wave but whose energy is spatially concentrated in the vicinity of the source. Even when there is a propagating electromagnetic wave produced,one can still identify as an evanescent field the component of the electric or magnetic field that cannot be attributed to the propagating wave observed at a distance of many wavelengths.
Micromachines are mechanical objects that are fabricated in the same general manner as integrated circuits. They are generally considered to be between 100 nanometres to 100 micrometres in size,though that is debatable. The applications of micromachines include accelerometers that detect when a car has hit an object and trigger an airbag. Complex systems of gears and levers are another application.
Nanosensors are nanoscale devices that measure physical quantities and convert these to signals that can be detected and analyzed. There are several ways proposed today to make nanosensors;these include top-down lithography,bottom-up assembly,and molecular self-assembly. There are different types of nanosensors in the market and in development for various applications,most notably in defense,environmental,and healthcare industries. These sensors share the same basic workflow:a selective binding of an analyte,signal generation from the interaction of the nanosensor with the bio-element,and processing of the signal into useful metrics.
Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the next logical miniaturization step from so-called microelectromechanical systems,or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators,pumps,or motors,and may thereby form physical,biological,and chemical sensors. The name derives from typical device dimensions in the nanometer range,leading to low mass,high mechanical resonance frequencies,potentially large quantum mechanical effects such as zero point motion,and a high surface-to-volume ratio useful for surface-based sensing mechanisms. Applications include accelerometers and sensors to detect chemical substances in the air.
A thin-film bulk acoustic resonator is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive –typically metallic –electrodes and acoustically isolated from the surrounding medium. The operation is based on the piezoelectricity of the piezolayer between the electrodes.
Masayoshi Esashi is an engineer. He is a global authority of Microelectromechanical systems and serves as the professor of the Tohoku University graduate school engineering graduate course.
Ultrasonic transducers and ultrasonic sensors are devices that generate or sense ultrasound energy. They can be divided into three broad categories:transmitters,receivers and transceivers. Transmitters convert electrical signals into ultrasound,receivers convert ultrasound into electrical signals,and transceivers can both transmit and receive ultrasound.
IEEE 1451 is a set of smart transducer interface standards developed by the Institute of Electrical and Electronics Engineers (IEEE) Instrumentation and Measurement Society's Sensor Technology Technical Committee describing a set of open,common,network-independent communication interfaces for connecting transducers to microprocessors,instrumentation systems,and control/field networks. One of the key elements of these standards is the definition of Transducer electronic data sheets (TEDS) for each transducer. The TEDS is a memory device attached to the transducer,which stores transducer identification,calibration,correction data,and manufacturer-related information. The goal of the IEEE 1451 family of standards is to allow the access of transducer data through a common set of interfaces whether the transducers are connected to systems or networks via a wired or wireless means.
A MEMSmagnetic field sensor is a small-scale microelectromechanical systems (MEMS) device for detecting and measuring magnetic fields (Magnetometer). Many of these operate by detecting effects of the Lorentz force:a change in voltage or resonant frequency may be measured electronically,or a mechanical displacement may be measured optically. Compensation for temperature effects is necessary. Its use as a miniaturized compass may be one such simple example application.
A MEMS magnetic actuator is a device that uses the microelectromechanical systems (MEMS) to convert an electric current into a mechanical output by employing the well-known Lorentz Force Equation or the theory of Magnetism.
Richard Stephen Muller is an American professor in the Electrical Engineering and Computer Science Department of the University of California at Berkeley.
A nanoelectromechanical (NEM) relay is an electrically actuatedswitch that is built on the nanometer scale using semiconductor fabrication techniques. They are designed to operate in replacement of,or in conjunction with,traditional semiconductor logic. While the mechanical nature of NEM relays makes them switch much slower than solid-state relays,they have many advantageous properties,such as zero current leakage and low power consumption,which make them potentially useful in next generation computing.
Roger Thomas Howe is the William E. Ayer Professor of Electrical Engineering at Stanford University. He earned a B.S. degree in physics from Harvey Mudd College and M.S. and Ph.D. degrees in electrical engineering from the University of California,Berkeley in 1981 and 1984,respectively. He was a faculty member at Carnegie-Mellon University from 1984-1985,at the Massachusetts Institute of Technology from 1985-1987,and at UC Berkeley between 1987-2005,where he was the Robert S. Pepper Distinguished Professor. He has been a faculty member of the School of Engineering at Stanford since 2005.
Reza Ghodssi is a Professor in the Department of Electrical and Computer Engineering and the Institute for Systems Research (ISR) at the University of Maryland,College Park,where he directs the MEMS Sensors and Actuators Lab and holds the Herbert Rabin Distinguished Chair in Engineering. Ghodssi is also the Inaugural Executive Director of Research and Innovation for the A. James Clark School of Engineering at the University System of Maryland at Southern Maryland (USMSM). He is best known for his work designing micro- and nano-devices for healthcare applications,particularly for systems requiring small-scale energy conversion and biological and chemical sensing.
Srinivas Tadigadapa is a professor and chair of the Department of Electrical and Computer Engineering at Northeastern University in Boston,Massachusetts. From 2000 to 2017 he was a professor of electrical engineering at Penn State University. Prior to that,he was the vice president of manufacturing at Integrated Sensing Systems Inc.,and was involved with the design,fabrication,packaging,reliability,and manufacturing of micromachined silicon pressure and Coriolis flow sensors.
A piezoelectric microelectromechanical system (piezoMEMS) is a miniature or microscopic device that uses piezoelectricity to generate motion and carry out its tasks. It is a microelectromechanical system that takes advantage of an electrical potential that appears under mechanical stress. PiezoMEMS can be found in a variety of applications,such as switches,inkjet printer heads,sensors,micropumps,and energy harvesters.
Richard Manning White was an electrical engineer and a professor emeritus in the Department of Electrical Engineering and Computer Sciences at UC Berkeley and a Co-Founding Director of the Berkeley Sensor &Actuator Center (BSAC). He and Richard S. Muller founded the BSAC in 1986. They received 2013 IEEE/RSE James Clerk Maxwell Medal for pioneering innovation and leadership in MEMS technology. White is known for inventing the Interdigital Transducer (IDT) and for his surface acoustic wave work,he received the 2003 Rayleigh Award. He received the IEEE Cledo Brunetti Award in 1986.
References
- 1 2 "Massood Tabib-Azar".
- ↑ "Editor-in-Chief and Editors".
- 1 2 "Massood Tabib Azar".
- ↑ "Patents by Inventor Massood Tabib-Azar".
- ↑ "Massood Tabib-Azar".
- ↑ "Special Issue "Recent Advances in Devices for Human Brain Imaging"".
- ↑ "Special Issue "Microplasma Devices"".
- ↑ Igelnik, B.; Tabib-Azar, M.; Pao, Y.-H.; Leclair, S.R. (1999). "A quantum neural net: with applications to materials science". Proceedings of the Second International Conference on Intelligent Processing and Manufacturing of Materials. IPMM'99 (Cat. No.99EX296). pp. 367–374 vol.1. doi:10.1109/IPMM.1999.792508. ISBN 0-7803-5489-3. S2CID 50975849.
- ↑ "Non-Volatile Solid-Electrolyte Memory Devices: Electronic versus Optical Latent Image Formation in Silver and Copper Halides".
- ↑ Zhang, Yuying; Pai, Pradeep; Chowdhury, Faisal K.; Tabib-Azar, Massood (2013). "Operation principles of micro-plasma field effect transistor". 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). pp. 578–581. doi:10.1109/Transducers.2013.6626832. ISBN 978-1-4673-5983-2. S2CID 5885033.
- ↑ "EAGER: Colorimetric Detection of Zika and other Viruses Through Their Surface Proteins and Nucleic Acids".
