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Rigorous coupled-wave analysis (RCWA), also known as Fourier modal method (FMM), [1] is a semi-analytical method in computational electromagnetics that is most typically applied to solve scattering from periodic dielectric structures. It is a Fourier-space method so devices and fields are represented as a sum of spatial harmonics.
The method is based on Floquet's theorem that the solutions of periodic differential equations can be expanded with Floquet functions (or sometimes referred as a Bloch wave, especially in the solid-state physics community). A device is divided into layers that are each uniform in the z direction. A staircase approximation is needed for curved devices with properties such as dielectric permittivity graded along the z-direction. The electromagnetic modes in each layer are calculated and analytically propagated through the layers. The overall problem is solved by matching boundary conditions at each of the interfaces between the layers using a technique like scattering matrices. To solve for the electromagnetic modes, which are decided by the wave vector of the incident plane wave, in periodic dielectric medium, Maxwell's equations (in partial differential form) as well as the boundary conditions are expanded by the Floquet functions in Fourier space. This technique transforms the partial differential equation into a matrix valued ordinary differential equation as a function of height over the periodic media. The finite representation of these Floquet functions in Fourier space renders the matrices finite, thus allowing the method to be feasibly solved by computers.
Being a Fourier-space method it suffers several drawbacks. Gibbs phenomenon is particularly severe for devices with high dielectric contrast. Truncating the number of spatial harmonics can also slow convergence and techniques like fast Fourier factorization (FFF) should be used. FFF [2] is straightforward to implement for 1D gratings, but the community is still working on a straightforward approach for crossed grating devices. The difficulty with FFF in crossed grating devices is that the field must be decomposed into parallel and perpendicular components at all of the interfaces. This is not a straightforward calculation for arbitrarily shaped devices.
Finally, because the RCWA method usually requires the convolution of discontinuous functions represented in Fourier Space, very careful consideration must given to the how these discontinuities are treated in the formulation of Maxwell's equations in Fourier space. [3] A key contribution was made by Lifeng Li in understanding the properties of convolving the Fourier transforms of two functions with coincident discontinuities that nevertheless form a continuous function. This led to a reformulation of RCWA with a significant improvement in convergence when using truncated Fourier series. [4]
Boundary conditions must be enforced at the interfaces between all the layers. When many layers are used, this becomes too large to solve simultaneously. Instead, RCWA borrows from network theory and calculates scattering matrices. This allows the boundary conditions to be solved one layer at a time. Almost without exception, however, the scattering matrices implemented for RCWA are inefficient and do not follow long standing conventions in terms of how S11, S12, S21, and S22 are defined. [5] Other methods exist, like the enhanced transmittance matrices (ETM), R matrices, and H matrices. ETM, for example, is considerably faster but less memory efficient.[ citation needed ]
RCWA can applied to aperiodic structures with appropriate use of perfectly matched layers. [1]
RCWA analysis applied to a polarized broadband reflectometry measurement is used within the semiconductor power device industry as a measurement technique to obtain detailed profile information of periodic trench structures. This technique has been used to provide trench depth and critical dimension (CD) results comparable to cross-section SEM, while having the added benefit of being both high-throughput and non-destructive.[ citation needed ]
In order to extract critical dimensions of a trench structure (depth, CD, and sidewall angle), the measured polarized reflectance data must have a sufficiently large wavelength range and analyzed with a physically valid model (for example: RCWA in combination with the Forouhi-Bloomer Dispersion relations for n and k). Studies have shown that the limited wavelength range of a standard reflectometer (375 - 750 nm) does not provide the sensitivity to accurately measure trench structures with small CD values (less than 200 nm). However, by using a reflectometer with the wavelength range extended from 190 - 1000 nm, it is possible to accurately measure these smaller structures. [6]
RCWA is also used to improve diffractive structures for high efficiency solar cells. For the simulation of the whole solar cell or solar module, RCWA can be efficiently combined with the OPTOS formalism.[ citation needed ]
In physics and mathematics, wavelength or spatial period of a wave or periodic function is the distance over which the wave's shape repeats. In other words, it is the distance between consecutive corresponding points of the same phase on the wave, such as two adjacent crests, troughs, or zero crossings. Wavelength is a characteristic of both traveling waves and standing waves, as well as other spatial wave patterns. The inverse of the wavelength is called the spatial frequency. Wavelength is commonly designated by the Greek letter lambda (λ). The term "wavelength" is also sometimes applied to modulated waves, and to the sinusoidal envelopes of modulated waves or waves formed by interference of several sinusoids.
In optics, a diffraction grating is an optical grating with a periodic structure that diffracts light, or another type of electromagnetic radiation, into several beams traveling in different directions. The emerging coloration is a form of structural coloration. The directions or diffraction angles of these beams depend on the wave (light) incident angle to the diffraction grating, the spacing or periodic distance between adjacent diffracting elements on the grating, and the wavelength of the incident light. The grating acts as a dispersive element. Because of this, diffraction gratings are commonly used in monochromators and spectrometers, but other applications are also possible such as optical encoders for high-precision motion control and wavefront measurement.
Scattering is a term used in physics to describe a wide range of physical processes where moving particles or radiation of some form, such as light or sound, are forced to deviate from a straight trajectory by localized non-uniformities in the medium through which they pass. In conventional use, this also includes deviation of reflected radiation from the angle predicted by the law of reflection. Reflections of radiation that undergo scattering are often called diffuse reflections and unscattered reflections are called specular (mirror-like) reflections. Originally, the term was confined to light scattering. As more "ray"-like phenomena were discovered, the idea of scattering was extended to them, so that William Herschel could refer to the scattering of "heat rays" in 1800. John Tyndall, a pioneer in light scattering research, noted the connection between light scattering and acoustic scattering in the 1870s. Near the end of the 19th century, the scattering of cathode rays and X-rays was observed and discussed. With the discovery of subatomic particles and the development of quantum theory in the 20th century, the sense of the term became broader as it was recognized that the same mathematical frameworks used in light scattering could be applied to many other phenomena.
A photonic crystal is an optical nanostructure in which the refractive index changes periodically. This affects the propagation of light in the same way that the structure of natural crystals gives rise to X-ray diffraction and that the atomic lattices of semiconductors affect their conductivity of electrons. Photonic crystals occur in nature in the form of structural coloration and animal reflectors, and, as artificially produced, promise to be useful in a range of applications.
In mathematics, physics, electronics, control systems engineering, and statistics, the frequency domain refers to the analysis of mathematical functions or signals with respect to frequency, rather than time, as in time series. Put simply, a time-domain graph shows how a signal changes over time, whereas a frequency-domain graph shows how the signal is distributed within different frequency bands over a range of frequencies. A complex valued frequency-domain representation consists of both the magnitude and the phase of a set of sinusoids at the frequency components of the signal. Although it is common to refer to the magnitude portion as the frequency response of a signal, the phase portion is required to uniquely define the signal.
Finite-difference time-domain (FDTD) or Yee's method is a numerical analysis technique used for modeling computational electrodynamics. Since it is a time-domain method, FDTD solutions can cover a wide frequency range with a single simulation run, and treat nonlinear material properties in a natural way.
Computational electromagnetics (CEM), computational electrodynamics or electromagnetic modeling is the process of modeling the interaction of electromagnetic fields with physical objects and the environment using computers.
An optical waveguide is a physical structure that guides electromagnetic waves in the optical spectrum. Common types of optical waveguides include optical fiber waveguides, transparent dielectric waveguides made of plastic and glass, liquid light guides, and liquid waveguides.
The finite-difference frequency-domain (FDFD) method is a numerical solution method for problems usually in electromagnetism and sometimes in acoustics, based on finite-difference approximations of the derivative operators in the differential equation being solved.
Discrete dipole approximation (DDA), also known as coupled dipole approximation, is a method for computing scattering of radiation by particles of arbitrary shape and by periodic structures. Given a target of arbitrary geometry, one seeks to calculate its scattering and absorption properties by an approximation of the continuum target by a finite array of small polarizable dipoles. This technique is used in a variety of applications including nanophotonics, radar scattering, aerosol physics and astrophysics.
A Bessel beam is a wave whose amplitude is described by a Bessel function of the first kind. Electromagnetic, acoustic, gravitational, and matter waves can all be in the form of Bessel beams. A true Bessel beam is non-diffractive. This means that as it propagates, it does not diffract and spread out; this is in contrast to the usual behavior of light, which spreads out after being focused down to a small spot. Bessel beams are also self-healing, meaning that the beam can be partially obstructed at one point, but will re-form at a point further down the beam axis.
Plane wave expansion method (PWE) refers to a computational technique in electromagnetics to solve the Maxwell's equations by formulating an eigenvalue problem out of the equation. This method is popular among the photonic crystal community as a method of solving for the band structure of specific photonic crystal geometries. PWE is traceable to the analytical formulations, and is useful in calculating modal solutions of Maxwell's equations over an inhomogeneous or periodic geometry. It is specifically tuned to solve problems in a time-harmonic forms, with non-dispersive media.
Coherent diffractive imaging (CDI) is a "lensless" technique for 2D or 3D reconstruction of the image of nanoscale structures such as nanotubes, nanocrystals, porous nanocrystalline layers, defects, potentially proteins, and more. In CDI, a highly coherent beam of X-rays, electrons or other wavelike particle or photon is incident on an object.
The multislice algorithm is a method for the simulation of the elastic scattering of an electron beam with matter, including all multiple scattering effects. The method is reviewed in the book by John M. Cowley, and also the work by Ishizuka. The algorithm is used in the simulation of high resolution transmission electron microscopy (HREM) micrographs, and serves as a useful tool for analyzing experimental images. This article describes some relevant background information, the theoretical basis of the technique, approximations used, and several software packages that implement this technique. Some of the advantages and limitations of the technique and important considerations that need to be taken into account are described.
Surface plasmon polaritons (SPPs) are electromagnetic waves that travel along a metal–dielectric or metal–air interface, practically in the infrared or visible-frequency. The term "surface plasmon polariton" explains that the wave involves both charge motion in the metal and electromagnetic waves in the air or dielectric ("polariton").
A. R. Forouhi and I. Bloomer deduced dispersion equations for the refractive index, n, and extinction coefficient, k, which were published in 1986 and 1988. The 1986 publication relates to amorphous materials, while the 1988 publication relates to crystalline. Subsequently, in 1991, their work was included as a chapter in “The Handbook of Optical Constants”. The Forouhi–Bloomer dispersion equations describe how photons of varying energies interact with thin films. When used with a spectroscopic reflectometry tool, the Forouhi–Bloomer dispersion equations specify n and k for amorphous and crystalline materials as a function of photon energy E. Values of n and k as a function of photon energy, E, are referred to as the spectra of n and k, which can also be expressed as functions of the wavelength of light, λ, since E = HC/λ. The symbol h represents Planck’s constant and c, the speed of light in vacuum. Together, n and k are often referred to as the “optical constants” of a material.
A frequency-selective surface (FSS) is any thin, repetitive surface designed to reflect, transmit or absorb electromagnetic fields based on the frequency of the field. In this sense, an FSS is a type of optical filter or metal-mesh optical filters in which the filtering is accomplished by virtue of the regular, periodic pattern on the surface of the FSS. Though not explicitly mentioned in the name, FSS's also have properties which vary with incidence angle and polarization as well - these are unavoidable consequences of the way in which FSS's are constructed. Frequency-selective surfaces have been most commonly used in the radio frequency region of the electromagnetic spectrum and find use in applications as diverse as the aforementioned microwave oven, antenna radomes and modern metamaterials. Sometimes frequency selective surfaces are referred to simply as periodic surfaces and are a 2-dimensional analog of the new periodic volumes known as photonic crystals.
An electromagnetic metasurface refers to a kind of artificial sheet material with sub-wavelength thickness. Metasurfaces can be either structured or unstructured with subwavelength-scaled patterns in the horizontal dimensions.
In electromagnetism, surface equivalence principle or surface equivalence theorem relates an arbitrary current distribution within an imaginary closed surface with an equivalent source on the surface. It is also known as field equivalence principle, Huygens' equivalence principle or simply as the equivalence principle. Being a more rigorous reformulation of the Huygens–Fresnel principle, it is often used to simplify the analysis of radiating structures such as antennas.
The method of moments (MoM), also known as the moment method and method of weighted residuals, is a numerical method in computational electromagnetics. It is used in computer programs that simulate the interaction of electromagnetic fields such as radio waves with matter, for example antenna simulation programs like NEC that calculate the radiation pattern of an antenna. Generally being a frequency-domain method, it involves the projection of an integral equation into a system of linear equations by the application of appropriate boundary conditions. This is done by using discrete meshes as in finite difference and finite element methods, often for the surface. The solutions are represented with the linear combination of pre-defined basis functions; generally, the coefficients of these basis functions are the sought unknowns. Green's functions and Galerkin method play a central role in the method of moments.
