Scanning helium ion microscope

Last updated

An Orion Nanofab helium ion microscope by Zeiss Microscopes ORION NanoFab - Helium Ion Microscope (8410606251).jpg
An Orion Nanofab helium ion microscope by Zeiss Microscopes
Comparison of SEM (top) and SHIM (bottom) images of mouse enamel. SHIM images have a superior depth of field, showing internal structure in enamel tunnels, which appear as black spots in SEM images. SEM vs HIM imaging of mouse enamel.jpg
Comparison of SEM (top) and SHIM (bottom) images of mouse enamel. SHIM images have a superior depth of field, showing internal structure in enamel tunnels, which appear as black spots in SEM images.

A scanning helium ion microscope (SHIM, HeIM or HIM) is an imaging technology based on a scanning helium ion beam. [2] Similar to other focused ion beam techniques, it allows to combine milling and cutting of samples with their observation at sub-nanometer resolution. [3]

In terms of imaging, SHIM has several advantages over the traditional scanning electron microscope (SEM). Owing to the very high source brightness, and the short De Broglie wavelength of the helium ions, which is inversely proportional to their momentum, it is possible to obtain qualitative data not achievable with conventional microscopes which use photons or electrons as the emitting source. As the helium ion beam interacts with the sample, it does not suffer from a large excitation volume, and hence provides sharp images with a large depth of field on a wide range of materials. Compared to a SEM, the secondary electron yield is quite high, allowing for imaging with currents as low as 1 femtoamp. The detectors provide information-rich images which offer topographic, material, crystallographic, and electrical properties of the sample. In contrast to other ion beams, there is no discernible sample damage due to relatively light mass of the helium ion. The drawback is the cost.

SHIMs have been commercially available since 2007, [4] and a surface resolution of 0.24 nanometers has been demonstrated. [5] [6]

Related Research Articles

Electron microscope type of microscope

An electron microscope is a microscope that uses a beam of accelerated electrons as a source of illumination. As the wavelength of an electron can be up to 100,000 times shorter than that of visible light photons, electron microscopes have a higher resolving power than light microscopes and can reveal the structure of smaller objects. A scanning transmission electron microscope has achieved better than 50 pm resolution in annular dark-field imaging mode and magnifications of up to about 10,000,000× whereas most light microscopes are limited by diffraction to about 200 nm resolution and useful magnifications below 2000×.

Microscope scientific instrument

A microscope is an instrument used to see objects that are too small to be seen by the naked eye. Microscopy is the science of investigating small objects and structures using such an instrument. Microscopic means invisible to the eye unless aided by a microscope.

Scanning electron microscope Type of electron microscope

A scanning electron microscope (SEM) is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample. The electron beam is scanned in a raster scan pattern, and the position of the beam is combined with the intensity of the detected signal to produce an image. In the most common SEM mode, secondary electrons emitted by atoms excited by the electron beam are detected using a secondary electron detector. The number of secondary electrons that can be detected, and thus the signal intensity, depends, among other things, on specimen topography. SEM can achieve resolution better than 1 nanometer.

Cathodoluminescence

Cathodoluminescence is an optical and electromagnetic phenomenon in which electrons impacting on a luminescent material such as a phosphor, cause the emission of photons which may have wavelengths in the visible spectrum. A familiar example is the generation of light by an electron beam scanning the phosphor-coated inner surface of the screen of a television that uses a cathode ray tube. Cathodoluminescence is the inverse of the photoelectric effect, in which electron emission is induced by irradiation with photons.

Transmission electron microscopy Technique in microscopy

Transmission electron microscopy is a microscopy technique in which a beam of electrons is transmitted through a specimen to form an image. The specimen is most often an ultrathin section less than 100 nm thick or a suspension on a grid. An image is formed from the interaction of the electrons with the sample as the beam is transmitted through the specimen. The image is then magnified and focused onto an imaging device, such as a fluorescent screen, a layer of photographic film, or a sensor such as a scintillator attached to a charge-coupled device.

Cathodoluminescence microscope

A cathodoluminescence (CL) microscope combines methods from electron and regular microscopes. It is designed to study the luminescence characteristics of polished thin sections of solids irradiated by an electron beam.

Alec Broers, Baron Broers British electrical engineer

Alec Nigel Broers, Baron Broers, is a British electrical engineer.

Scanning transmission electron microscopy type of transmission electron microscope

A scanning transmission electron microscope (STEM) is a type of transmission electron microscope (TEM). Pronunciation is [stɛm] or [ɛsti:i:ɛm]. As with a conventional transmission electron microscope (CTEM), images are formed by electrons passing through a sufficiently thin specimen. However, unlike CTEM, in STEM the electron beam is focused to a fine spot which is then scanned over the sample in a raster illumination system constructed so that the sample is illuminated at each point with the beam parallel to the optical axis. The rastering of the beam across the sample makes STEM suitable for analytical techniques such as Z-contrast annular dark-field imaging, and spectroscopic mapping by energy dispersive X-ray (EDX) spectroscopy, or electron energy loss spectroscopy (EELS). These signals can be obtained simultaneously, allowing direct correlation of images and spectroscopic data.

Focused ion beam

Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a scientific instrument that resembles a scanning electron microscope (SEM). However, while the SEM uses a focused beam of electrons to image the sample in the chamber, a FIB setup uses a focused beam of ions instead. FIB can also be incorporated in a system with both electron and ion beam columns, allowing the same feature to be investigated using either of the beams. FIB should not be confused with using a beam of focused ions for direct write lithography. These are generally quite different systems where the material is modified by other mechanisms.

Atomic de Broglie microscope

The atomic de Broglie microscope is an imaging system which is expected to provide resolution at the nanometer scale. Sometimes people call it the nano-scope.

Electron-beam-induced deposition (EBID) is a process of decomposing gaseous molecules by an electron beam leading to deposition of non-volatile fragments onto a nearby substrate. The electron beam is usually provided by a scanning electron microscope, which results in high spatial accuracy and the possibility to produce free-standing, three-dimensional structures.

Scanning confocal electron microscopy (SCEM) is an electron microscopy technique analogous to scanning confocal optical microscopy (SCOM). In this technique, the studied sample is illuminated by a focussed electron beam, as in other scanning microscopy techniques, such as scanning transmission electron microscopy or scanning electron microscopy. However, in SCEM, the collection optics is arranged symmetrically to the illumination optics to gather only the electrons that pass the beam focus. This results in superior depth resolution of the imaging. The technique is relatively new and is being actively developed.

Raman microscope

The Raman microscope is a laser-based microscopic device used to perform Raman spectroscopy. The term MOLE is used to refer to the Raman-based microprobe. The technique used is named after C. V. Raman who discovered the scattering properties in liquids.

SEMTech Solutions (STS) is a supplier of used scanning electron microscopes (SEMs). Founded in 2000, the company sells microscopes, SEM accessories, and FE-SEM / EDS analytical services, and sells and services various scientific instruments based on electron beam technologies. STS established business relationships with Physical Electronics in 2002, Elionix in 2005, and Interface in 2008, and in 2009 became a sales representative for Hysitron's nanoindenter products.

TESCAN is one of the world's leading manufacturers of Scanning Electron Microscopes (SEM) and Focused Ion Beam-Scanning Electron Microscopes (FIB-SEM). They have a comprehensive range of instruments that can be customized to meet the specific customer requirements. TESCAN is located in Brno, which is considered to be the cradle of electron microscopy in Europe.

In situ electron microscopy is an investigatory technique where an electron microscope is used to watch a sample's response to a stimulus in real time. Due to the nature of the high-energy beam of electrons used to image a sample in an electron microscope, microscopists have long observed that specimens are routinely changed or damaged by the electron beam. Starting in the 1960s, and using Transmission Electron Microscopes (TEMs), scientists made deliberate attempts to modify materials while the sample was in the specimen chamber, and to capture images through time of the induced damages.

Nanoprobing is method of extracting device electrical parameters through the use of nanoscale tungsten wires, used primarily in the semiconductor industry. The characterization of individual devices is instrumental to engineers and integrated circuit designers during initial product development and debug. It is commonly utilized in device failure analysis laboratories to aid with yield enhancement, quality and reliability issues and customer returns. Commercially available nanoprobing systems are integrated into either a vacuum-based scanning electron microscope (SEM) or atomic force microscope (AFM). Nanoprobing systems that are based on AFM technology are referred to as Atomic Force nanoProbers (AFP).

Correlative light-electron microscopy (CLEM) is the combination of an optical microscope - usually a fluorescence microscope - with an electron microscope. In an integrated CLEM system, the sample is imaged using an electron beam and an optical light path simultaneously. Traditionally, samples would be imaged using two separate microscopy modalities, potentially at different facilities and using different sample preparation methods. Integrated CLEM is thus considered to be beneficial because the methodology is quicker and easier, and it reduces the chance of changes in the sample during the process of data collection. Overlay of the two images is thus performed automatically as a result of the integration of two microscopes.

Liquid-Phase Electron Microscopy

Liquid-phase electron microscopy refers to a class of methods for imaging specimens in liquid with nanometer spatial resolution using electron microscopy. LP-EM overcomes the key limitation of electron microscopy: since the electron optics requires a high vacuum, the sample must be stable in a vacuum environment. Many types of specimens relevant to biology, materials science, chemistry, geology, and physics, however, change their properties when placed in a vacuum.

Scanning helium microscopy

The scanning helium microscope (SHeM) is a novel form of microscopy that uses low energy neutral helium atoms to image the surface of a sample without any damage to the sample caused by the imaging process. Since helium is inert and neutral, it can be used to study delicate and insulating surfaces. Images are formed by rastering a sample underneath an atom beam and monitoring the flux of atoms that are scattered into a detector at each point.

References

  1. Bidlack, Felicitas B.; Huynh, Chuong; Marshman, Jeffrey; Goetze, Bernhard (2014). "Helium ion microscopy of enamel crystallites and extracellular tooth enamel matrix". Frontiers in Physiology. 5. doi:10.3389/fphys.2014.00395. PMC   4193210 . PMID   25346697.
  2. NanoTechWire.com Press Release: ALIS Corporation Announces Breakthrough in Helium Ion Technology for Next-Generation Atomic-Level Microscope, December 7, 2005 (retrieved on November 22, 2008)
  3. Iberi, Vighter; Vlassiouk, Ivan; Zhang, X.-G.; Matola, Brad; Linn, Allison; Joy, David C.; Rondinone, Adam J. (2015). "Maskless Lithography and in situ Visualization of Conductivity of Graphene using Helium Ion Microscopy". Scientific Reports. 5: 11952. doi:10.1038/srep11952. PMC   4493665 . PMID   26150202.
  4. Carl Zeiss SMT Press Release: Carl Zeiss SMT Ships World’s First ORION Helium Ion Microscope to U.S. National Institute of Standards and Technology, July 17, 2008 (retrieved on November 22, 2008)
  5. Fabtech.org: Microscopy resolution record claimed by Carl Zeiss, November 21, 2008 (retrieved on November 22, 2008)
  6. Carl Zeiss SMT Press Release: Carl Zeiss Sets New World Record in Microscopy Resolution Using Scanning Helium Ions Archived May 1, 2009, at the Wayback Machine , November 21, 2008 (retrieved on November 22, 2008)