Gate dielectric

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A gate dielectric is a dielectric used between the gate and substrate of a field-effect transistor (such as a MOSFET). In state-of-the-art processes, the gate dielectric is subject to many constraints, including:

Contents

Diagram of silicon dioxide gate dielectric transistor made by Frosch and Derrick in 1957 1957(Figure 9)-Gate oxide transistor by Frosch and Derrick.png
Diagram of silicon dioxide gate dielectric transistor made by Frosch and Derrick in 1957

The capacitance and thickness constraints are almost directly opposed to each other. For silicon-substrate FETs, the gate dielectric is almost always silicon dioxide (called "gate oxide"), since thermal oxide has a very clean interface. However, the semiconductor industry is interested in finding alternative materials with higher dielectric constants, which would allow higher capacitance with the same thickness.

History

In 1955, Carl Frosch and Lincoln Derrick accidentally grew a layer of silicon dioxide over the silicon wafer, for which they observed surface passivation effects. [2] [3] By 1957 Frosch and Derrick, using masking and predeposition, were able to manufacture silicon dioxide transistors and showed that silicon dioxide insulated, protected silicon wafers and prevented dopants from diffusing into the wafer. [2] [4] Silicon dioxide remains the standard gate dielectric in MOSFET technology. [5]

See also

References

  1. ↑ Frosch, C. J.; Derick, L (1957). "Surface Protection and Selective Masking during Diffusion in Silicon" . Journal of the Electrochemical Society. 104 (9): 547. doi:10.1149/1.2428650.
  2. 1 2 Huff, Howard; Riordan, Michael (2007-09-01). "Frosch and Derick: Fifty Years Later (Foreword)" . The Electrochemical Society Interface. 16 (3): 29. doi:10.1149/2.F02073IF. ISSN   1064-8208.
  3. ↑ US2802760A,Lincoln, Derick&Frosch, Carl J.,"Oxidation of semiconductive surfaces for controlled diffusion",issued 1957-08-13
  4. ↑ Frosch, C. J.; Derick, L (1957). "Surface Protection and Selective Masking during Diffusion in Silicon" . Journal of the Electrochemical Society. 104 (9): 547. doi:10.1149/1.2428650.
  5. ↑ Kooi†, E.; Schmitz, A. (2005). "Brief Notes on the History of Gate Dielectrics in MOS Devices". High Dielectric Constant Materials: VLSI MOSFET Applications. Springer Series in Advanced Microelectronics. 16. Springer Berlin Heidelberg: 33–44. doi:10.1007/3-540-26462-0_2. ISBN   978-3-540-21081-8.


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