List of MEMS foundries

The list below provides a comprehensive overview of companies that develop and fabricate MEMS (microelectromechanical systems) devices. These companies are usually referred to the concept of foundries. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication. The attribute type is for Integrated Device Manufacturer, Pure-play or Research Institute business model.

Company	Service	Substrate materials	Production volume	Wafer diameters (in inches)	Type	Headquartered country
Asia Pacific Microsystems, Inc.	MEMS Foundry	Silicon, Sapphire, SOI, Glass, Quartz, Polymer, CMOS-wafers	High volume production	6	Pure-play	Taiwan
Atomica	MEMS, biochip, sensor and photonics manufacturing, including custom design, development, prototyping, and high-volume production	Silicon, SOI, borosilicate, fused silica, quartz, glass, piezo, and engineered substrates	High-volume production	6, 8	Pure-play	United States
C2MI	Customized MEMS: process, manufacturing, packaging, characterization, failure analysis and reliability.	Silicon, SOI, glass, and CMOS-wafers.	R&D, prototyping and pilot line.	8	Research Institute	Canada
CEA-Leti	Customized MEMS, NEMS, BioMEMS: design, process, manufacturing, characterization, and packaging	Silicon, SOI, glass, and CMOS-wafers.	R&D recurrent batches and pilot line.	8, 12	Research Institute	France
CSEM	MEMS design & process development, Lab-to-Fab approach. Focus areas include photonics, microfluidics, watch components, and harsh environments. Lithium niobate and silicon carbide processing are notable technology bricks.	Silicon, SOI, lithium niobate, silicon carbide, fused silica, quartz, glass.	Prototyping, small & medium volume production	6	Research Institute	Switzerland
Fraunhofer Institute for Silicon Technology (ISIT)	MEMS design & process development, main Fraunhofer site for post-CMOS, MEMS, electroplating, CMP	Silicon, SOI, glass, GaN and CMOS.	Proof-of-concept, prototyping, small volume production	8	Research Institute	Germany
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS)	MEMS design & process development, Fraunhofer focus location for specialized MEMS-processes	Silicon, SOI.	Proof-of-concept, Prototyping, small volume production	8	Research Institute	Germany
Hanking Electronics	Class 100 MEMS Foundry Services, MEMS IMUs (6 DoF accelerometers/ gyroscopes), IoT modules and MEMS Design Services. Foundry processes include; Film Deposition, Metal Deposition, Thermal, Wafer Bonding, Etch processes including DRIE and VHF, Wet Processes, and Wafer Level Packaging.	Silicon	High volume production	8	IDM	China
IMEC	Low-medium volume MEMS manufacturing (CMOS compatible), incl. custom design, development, post-processing and prototyping	Si, SOI, fused silica or glass; post-processing on CMOS wafers (8-inch to 12-inch )	Prototyping, low and medium volume production; transfer to foundry for high volume	8, 12	Research Institute	Belgium
Micronit	Customised MEMS design and manufacturing	Silicon and SOI, borosilicate glass or Polymer; structured wafer	Prototyping, low and medium volume production; transfer to foundry for high volume	6, 8	Pure-play	Netherlands
LioniX International	Customized MEMS design, custom process development, prototyping and production.	Silicon, SOI, fused silica, borosilicate glasses, thermally oxidized silicon.	Proof of concept, prototyping, pilot production, small and medium volumes.	4, 6	Pure-play	Netherlands
Mapper	MEMS process development and manufacturing	Silicon, SOI and various glasses, piezoelectric materials	Low volume and prototyping	4	Pure-play	Russia
Microfluidic Foundry	BioMEMS design and manufacturing	Silicon, Glass, SU8/PDMS, Polymer	R&D, Mini volume production		IDM	United States
nanoPHAB	Micro- and Nano-fabrication services, nano-MEMS manufacturing, ASIC	III-V materials, GaAs, InP, Si, Oxi-Nitrides, Glass, Polymers, Multimaterials	Epi-growth, Prototyping and Consultancy. Low to medium volume production. Bridge to high volume.	2, 3, 4	Pure-Play	Netherlands
Nanoshift LLC	Contracted R&D and manufacturing with extensive experience in processing and integration. Specialize in MEMS, microfluidics, silicon photonics, TSV, CMOS integration, and other emerging technologies.	Silicon, SOI, Glass, flex substrates, polymer, and other materials.	Proof of concept, process development, prototyping, low to mid volume	2, 3, 4, and 6	IDM	United States
NEMS and MEMS Proto Fab (NMPF)	MEMS manufacturing, microfabrication services	Silicon, Glass, Quartz, SOI wafers	Low to medium volume and prototyping	2, 4	Pure play	India
Philips	Customized MEMS and Micro Assembly, process design and manufacturing, certified for medical devices	Silicon, SOI, glass, quartz and CMOS-wafers.	Prototyping, low and medium volume production	6, 8	Pure-play	Netherlands
Robert Bosch GmbH	Customized MEMS process development and manufacturing. Optional: design, assembly, test, integration	Silicon, SOI, Fused silica or glass, post-processing on 200mm-CMOS wafers	Prototyping, development, medium and high volume	8	IDM	Germany
Safran Sensing Technologies	MEMS Manufacturing	Silicon, SOI	Medium volume production	6	IDM	Switzerland   Norway
Semefab	MEMS manufacturing		High volume production	4, 6	Pure-play	United Kingdom
Semi-Conductor Laboratory	CMOS & MEMS design, manufacturing and packaging; microfabrication	Silicon, SOI and various glasses	From Low volume production	6,8	Research Institute	India
Silex Microsystems	MEMS process development and manufacturing. Photolithography, etching, deposition and oxidation, bonding and glass packaging.	Silicon	Prototyping and high volume production	8	Pure-play	Sweden   China
Silicon Sensing Systems	MEMS process development and production	Silicon	Prototype fabrications through to mass production	8	IDM	United Kingdom   Japan
SINTEF MiNaLab	Customized MEMS, BioMEMS, piezoMEMS and Micro-optics. Modeling and design, process development, testing and characterization.	Silicon, SOI, Glass	Prototyping, low and medium volume production; transfer to foundry for high volume	6	Research Institute	Norway
Sony Semiconductor	MEMS development and manufacturing	Silicon, SOI	Prototyping and high volume production	6, 8	IDM	Japan
STMicroelectronics	MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones)	Silicon	High volume production		IDM	Switzerland
Teledyne DALSA	MEMS design and manufacturing with integration of individual foundry processes	Silicon and polysilicon	High volume production	6, 8	Pure-play	Canada
Teledyne Micralyne	MEMS design, manufacturing and packaging; microfabrication	Silicon, SOI and various glasses	From scale-up to high volume production	6	Pure-play	Canada
Tower Semiconductor	IC manufacturing	Silicon	High volume production	6, 8	Pure-play	Israel
TDK Tronics	MEMS design and manufacturing	Silicon, SOI and glass wafer	Prototyping, low and high volume production	6	Pure-play	France   Japan
TSMC	MEMS design and manufacturing	Silicon	High volume production	6, 8, 12	Pure-play	Taiwan
uFluidix	MEMS and Microfluidics manufacturing	Silicon, glass, PDMS	Low-Medium volume production		Pure-play	Canada
United Microelectronics Corporation	MEMS manufacturing	Silicon	High volume production	8	Pure-play	Taiwan
Wunderlichips	Focus on PDMS devices, process development	Silicon, SU8\PDMS	R&D, low volume	4, 6, 8	Pure-play	Switzerland
X-Fab	MEMS design and manufacturing	Silicon and glass	High volume production	6, 8	Pure-play	Germany