Zyron is a registered trademark for specialty gases marketed to the global electronics industry by DuPont.
Freon was used as the original brand name for electronic gases produced and marketed by DuPont. With the depletion of the ozone layer and the subsequent phase-out of chlorofluorocarbon (CFC) gas compounds, the company rebranded this product line to differentiate from refrigerant gases that had been using the same Freon brand name.
The name was developed in October 1991 by DuPont employees Paul Bechly and Dr. Nicholas Nazarenko, was first used in commerce on June 12, 1992, and became a registered trademark of DuPont in 1993. [1]
The Zyron product naming system was also developed by Bechly and Nazarenko in October 1991. The system is based upon the historical industry numbering system for fluorinated alkanes [2] to identify the chemical compound, followed by an (N) suffix component that specified product purity. The naming system was intentionally not trademarked to allow for industrial adoption.
As example for Zyron 116 N5: the 116 represents the compound hexafluoroethane, and N5 represents "5 nines" or 99.999% purity.
As example for Zyron 23 N3 the 23 represents the compound trifluoromethane, and N3 represents "3 nine" or 99.99% purity.
Zyron 116 N5 (hexafluoroethane)
Zyron 318 N4 (octafluorocyclobutane)
Zyron 23 N5 (trifluoromethane)
Zyron 23 N3 (trifluoromethane)
Historical products included: Zyron 14 (tetrafluoromethane), Zyron 32 (difluoromethane), Zyron 125 (pentafluoroethane), and Zyron NF3 (nitrogen trifluoride).
The primary applications of these gases for the electronics industry are for etching of silicon wafer, and cleaning of chemical vapor deposition chamber tools. [3] These are all plasma-based product applications where the product is essentially destroyed in use.
Alternative products to the Zyron line for various application in electronics include the chemical compounds HCl, BCl3, CF4, ClF3, CH2F2, GeH4, C4F6, NF3, C5F8, PH3, C3H6, SiH4, and WF6. [4]
A semiconductor is a material which has an electrical conductivity value falling between that of a conductor, such as copper, and an insulator, such as glass. Its resistivity falls as its temperature rises; metals behave in the opposite way. Its conducting properties may be altered in useful ways by introducing impurities ("doping") into the crystal structure. When two differently doped regions exist in the same crystal, a semiconductor junction is created. The behavior of charge carriers, which include electrons, ions, and electron holes, at these junctions is the basis of diodes, transistors, and most modern electronics. Some examples of semiconductors are silicon, germanium, gallium arsenide, and elements near the so-called "metalloid staircase" on the periodic table. After silicon, gallium arsenide is the second-most common semiconductor and is used in laser diodes, solar cells, microwave-frequency integrated circuits, and others. Silicon is a critical element for fabricating most electronic circuits.
Ozone depletion consists of two related events observed since the late 1970s: a steady lowering of about four percent in the total amount of ozone in Earth's atmosphere, and a much larger springtime decrease in stratospheric ozone around Earth's polar regions. The latter phenomenon is referred to as the ozone hole. There are also springtime polar tropospheric ozone depletion events in addition to these stratospheric events.
Chlorofluorocarbons (CFCs) and hydrochlorofluorocarbons (HCFCs) are fully or partly halogenated hydrocarbons that contain carbon (C), hydrogen (H), chlorine (Cl), and fluorine (F), produced as volatile derivatives of methane, ethane, and propane.
Fluorocarbons are chemical compounds with carbon-fluorine bonds. Compounds that contain many C-F bonds often have distinctive properties, e.g., enhanced stability, volatility, and hydrophobicity. Several fluorocarbons and their derivatives are commercial polymers, refrigerants, drugs, and anesthetics.
'Freon' is a registered trademark of the Chemours Company and generic descriptor for a number of halocarbon products. They are stable, nonflammable, low toxicity gases or liquids which have generally been used as refrigerants and as aerosol propellants. These include chlorofluorocarbons and Hydrofluorocarbons, both of which cause ozone depletion and contribute to global warming. 'Freon' is the brand name for the refrigerants R-12, R-13B1, R-22, R-410A, R-502, and R-503 manufactured by The Chemours Company, and so is not used to label all refrigerants of this type. They emit a strong smell similar to acetone, a common nail polish remover component.
Bromochlorodifluoromethane (BCF), also referred to by the code numbers Halon 1211 and Freon 12B1, is a haloalkane with the chemical formula CF2ClBr. It is used for fire suppression, especially for expensive equipment or items that could be damaged by the residue from other types of extinguishers.
Aerosol spray is a type of dispensing system which creates an aerosol mist of liquid particles. It comprises a can or bottle that contains a payload, and a propellant under pressure. When the container's valve is opened, the payload is forced out of a small opening and emerges as an aerosol or mist.
Fluoromethane, also known as methyl fluoride, Freon 41, Halocarbon-41 and HFC-41, is a non-toxic, liquefiable, and flammable gas at standard temperature and pressure. It is made of carbon, hydrogen, and fluorine. The name stems from the fact that it is methane (CH4) with a fluorine atom substituted for one of the hydrogen atoms. It is used in semiconductor manufacturing processes as an etching gas in plasma etch reactors.
Dow Corning Corporation, was an American multinational corporation headquartered in Midland, Michigan, United States. Originally established as a joint venture between The Dow Chemical Company and Corning Incorporated, Dow bought out Corning and Dow Corning became a 100% Dow subsidiary. After a brief existence as a DowDuPont-owned company, as Dow spun out from DowDuPont on April 1, 2019, it is now a new company, Dow Silicones Corporation, which is wholly owned by Dow and specializes in silicone and silicon-based technology, and is the largest silicone product producer in the world.
Tetrafluoromethane, also known as carbon tetrafluoride or R-14, is the simplest perfluorocarbon (CF4). As its IUPAC name indicates, tetrafluoromethane is the perfluorinated counterpart to the hydrocarbon methane. It can also be classified as a haloalkane or halomethane. Tetrafluoromethane is a useful refrigerant but also a potent greenhouse gas. It has a very high bond strength due to the nature of the carbon–fluorine bond.
Nitrogen trifluoride is an inorganic, colorless, non-flammable, toxic gas with a slightly musty odor. It finds increasing use within the manufacturing of flat-panel displays, photovoltaics, LEDs and other microelectronics. Nitrogen trifluoride is also an extremely strong and long-lived greenhouse gas. Its atmospheric burden exceeded 2 parts per trillion during 2019 and has doubled every five years since the late 20th century.
Trifluoromethane or fluoroform is the chemical compound with the formula CHF3. It is one of the "haloforms", a class of compounds with the formula CHX3 (X = halogen) with C3v symmetry. Fluoroform is used in diverse applications in organic synthesis. It is not an ozone depleter but is a greenhouse gas.
Hexafluoroethane is the perfluorocarbon counterpart to the hydrocarbon ethane. It is a non-flammable gas negligibly soluble in water and slightly soluble in alcohol. It is an extremely potent and long-lived greenhouse gas.
Automatic fire suppression systems control and extinguish fires without human intervention. Examples of automatic systems include fire sprinkler system, gaseous fire suppression, and condensed aerosol fire suppression. When fires are extinguished in the early stages loss of life is minimal since 93% of all fire-related deaths occur once the fire has progressed beyond the early stages.
FFKMs are perfluoroelastomeric compounds containing an even higher amount of fluorine than FKM fluoroelastomers.
Pentafluoroethane is a fluorocarbon with the formula CF3CHF2. Pentafluoroethane is currently used as a refrigerant (known as R-125) and also used as a fire suppression agent in fire suppression systems.
Hydrofluoroolefins (HFOs) are unsaturated organic compounds composed of hydrogen, fluorine and carbon. These organofluorine compounds are of interest as refrigerants. Unlike traditional hydrofluorocarbons (HFCs) and chlorofluorocarbons (CFCs), which are saturated, HFOs are olefins, otherwise known as alkenes.
The global market for chemicals from fluorine was about US$16 billion per year as of 2006. The industry was predicted to reach 2.6 million metric tons per year by 2015. The largest market is the United States. Western Europe is the second largest. Asia Pacific is the fastest growing region of production. China in particular has experienced significant growth as a fluorochemical market and is becoming a producer of them as well. Fluorite mining was estimated in 2003 to be a $550 million industry, extracting 4.5 million tons per year.
Fluorine is a relatively new element in human applications. In ancient times, only minor uses of fluorine-containing minerals existed. The industrial use of fluorite, fluorine's source mineral, was first described by early scientist Georgius Agricola in the 16th century, in the context of smelting. The name "fluorite" derives from Agricola's invented Latin terminology. In the late 18th century, hydrofluoric acid was discovered. By the early 19th century, it was recognized that fluorine was a bound element within compounds, similar to chlorine. Fluorite was determined to be calcium fluoride.
Paul Lorin Bechly is an American chemical engineer known for his work in the development of an environmentally-oriented perfluorocarbon gas policy for DuPont and other industries. He currently works in the financial industry.