Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades, microelectromechanical systems (MEMS), microsystems, micromachines and their subfields have re-used, adapted or extended microfabrication methods. These subfields include microfluidics/lab-on-a-chip, optical MEMS, RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale. The production of flat-panel displays and solar cells also uses similar techniques.
Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. The majority of ALD reactions use two chemicals called precursors. These precursors react with the surface of a material one at a time in a sequential, self-limiting, manner. A thin film is slowly deposited through repeated exposure to separate precursors. ALD is a key process in fabricating semiconductor devices, and part of the set of tools for synthesizing nanomaterials.
Plasma etching is a form of plasma processing used to fabricate integrated circuits. It involves a high-speed stream of glow discharge (plasma) of an appropriate gas mixture being shot at a sample. The plasma source, known as etch species, can be either charged (ions) or neutral. During the process, the plasma generates volatile etch products at room temperature from the chemical reactions between the elements of the material etched and the reactive species generated by the plasma. Eventually the atoms of the shot element embed themselves at or just below the surface of the target, thus modifying the physical properties of the target.
The Science Citation Index Expanded is a citation index originally produced by the Institute for Scientific Information (ISI) and created by Eugene Garfield.
Applied Physics A: Materials Science and Processing is a peer-reviewed scientific journal that is published monthly by Springer Science+Business Media. The editor-in-chief is Thomas Lippert. This publication is complemented by Applied Physics B .
AVS: Science and Technology of Materials, Interfaces, and Processing is a not-for-profit learned society founded in 1953 focused on disciplines related to materials, interfaces, and processing. AVS has approximately 4500 members worldwide from academia, governmental laboratories and industry.
The Web of Science is a paid-access platform that provides access to multiple databases that provide reference and citation data from academic journals, conference proceedings, and other documents in various academic disciplines. Until 1997, it was originally produced by the Institute for Scientific Information. It is currently owned by Clarivate, and currently contains 79 million records in the core collection and 171 million records on the platform.
Surface Science Reports is a peer-reviewed scientific journal published by North-Holland that covers the physics and chemistry of surfaces. It was established in 1981. It is the review journal corresponding to the journals Surface Science and Surface Science Letters.
Jonathan Harris Orloff is an American physicist, author and professor. Born in New York City, he is the eldest son of Monford Orloff and brother of pianist Carole Orloff and historian Chester Orloff. Orloff is known for his major fields of research in charged particle optics, applications of field emission processes, high-brightness electron and ion sources, focused ion and electron beams and their applications for micromachining, surface analysis and microscopy and instrumentation development for semiconductor device manufacturing.
The Journal of Nanoparticle Research is a monthly peer-reviewed scientific journal published by Springer Science+Business Media, part of Springer-Nature (springernature.com). It focuses mainly on physical, chemical, and biological phenomena and processes in structures of sizes comparable to a few nanometers. It was established in 1999 and the editor-in-chief is Mihail C. Roco. According to the Journal Citation Reports, the journal has a 2020 impact factor of 2.253.
The Materials Science Citation Index is a citation index, established in 1992, by Thomson ISI. Its overall focus is cited reference searching of the notable and significant journal literature in materials science. The database makes accessible the various properties, behaviors, and materials in the materials science discipline. This then encompasses applied physics, ceramics, composite materials, metals and metallurgy, polymer engineering, semiconductors, thin films, biomaterials, dental technology, as well as optics. The database indexes relevant materials science information from over 6,000 scientific journals that are part of the ISI database which is multidisciplinary. Author abstracts are searchable, which links articles sharing one or more bibliographic references. The database also allows a researcher to use an appropriate article as a base to search forward in time to discover more recently published articles that cite it.
Scripta Materialia is a peer-reviewed scientific journal. It is the "letters" section of Acta Materialia and covers novel properties, or substantially improved properties of materials. Specific materials discussed are metals, ceramics and semiconductors at all length scales, and published research endeavors explore the functional or mechanical behavior of these materials. Articles tend to focus on the materials science and engineering aspects of discovery, characterization, development, structure, chemistry, theory, experiment, modeling, simulation, physics processes, synthesis, processing (production), mechanisms, and control.
The Journal of Photochemistry and Photobiology is a series of peer-reviewed scientific journals covering the fields of photochemistry and photobiology, published by Elsevier. It was originally established in 1972, and split into Journal of Photochemistry and Photobiology A: Chemistry and Journal of Photochemistry and Photobiology B: Biology in 1987. A third title; Journal of Photochemistry and Photobiology C: Photochemistry Reviews, was established in 2000 and is the official journal of the Japanese Photochemistry Association.
PhysChemComm was a peer-reviewed scientific journal that was published by the Royal Society of Chemistry between 1998 and 2003. It covered all aspects of physical chemistry and chemical physics, and their interfaces with condensed matter, physics and biological, materials and surface science. The journal was abstracted and indexed in Chemical Abstracts Service and Scopus. According to the Journal Citation Reports, the journal's last impact factor of 1.500 was issued in 2005.
IEEE Transactions on Electron Devices (T-ED) is a monthly peer-reviewed scientific journal publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.
The Journal of Colloid and Interface Science is a peer-reviewed scientific journal published by Elsevier. It covers research related to colloid and interface science with a particular focus on colloidal materials and nanomaterials; surfactants and soft matter; adsorption, catalysis and electrochemistry; interfacial processes, capillarity and wetting; biomaterials and nanomedicine; and novel phenomena and techniques. The editor-in-chief is Martin Malmsten. The journal was established in 1946 as Journal of Colloid Science. It obtained its current name in 1966.
IEEE Transactions on Plasma Science is a peer-reviewed scientific journal published monthly by the IEEE Nuclear and Plasma Sciences Society. The journal covers plasma science and engineering, including but not limited to magnetohydrodynamics, thermionics, space plasma and plasma-wave interactions. Its current editor-in-chief is Steven J. Gitomer, senior research scientist at Los Alamos National Laboratory.
Nanomedicine is a biweekly peer-reviewed medical journal covering research on medical nanoscale-structured material and devices, biotechnology devices and molecular machine systems, and nanorobotics applications in medicine. It was established in 2006 and is published by Future Medicine. The editors-in-chief are Kostas Kostarelos and Charles R. Martin.
Surface Science is a monthly peer-reviewed scientific journal published by Elsevier that covers the physics and chemistry of surfaces and interfaces. It was established in 1964. The journal encompasses Surface Science Letters, which was published separately until 1993.
Studies in History and Philosophy of Science is a series of three peer-reviewed academic journals published by Elsevier. It was established in 1970 as a single journal, and was split into two sections–Studies in History and Philosophy of Science Part A and Studies in History and Philosophy of Science Part B: Studies in History and Philosophy of Modern Physics–in 1995. In 1998, a third section, Studies in History and Philosophy of Science Part C: Studies in History and Philosophy of Biological and Biomedical Sciences, was created. In January 2021, all three sections were merged back into Part A, Studies in History and Philosophy of Science.
