MEMS is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size, and MEMS devices generally range in size from 20 micrometres to a millimetre, although components arranged in arrays can be more than 1000 mm2. They usually consist of a central unit that processes data and several components that interact with the surroundings.
In physics, resonance refers to a wide class of phenomena that arise as a result of matching temporal or spatial periods of oscillatory objects. For an oscillatory dynamical system driven by a time-varying external force, resonance occurs when the frequency of the external force coincides with the natural frequency of the system. Resonance can occur in various systems, such as mechanical, electrical, or acoustic systems, and it is desirable in certain applications, such as musical instruments or radio receivers. Resonance can also be undesirable, leading to excessive vibrations or even structural failure in some cases.
A magnetometer is a device that measures magnetic field or magnetic dipole moment. Different types of magnetometers measure the direction, strength, or relative change of a magnetic field at a particular location. A compass is one such device, one that measures the direction of an ambient magnetic field, in this case, the Earth's magnetic field. Other magnetometers measure the magnetic dipole moment of a magnetic material such as a ferromagnet, for example by recording the effect of this magnetic dipole on the induced current in a coil.
A cantilever is a rigid structural element that extends horizontally and is unsupported at one end. Typically it extends from a flat vertical surface such as a wall, to which it must be firmly attached. Like other structural elements, a cantilever can be formed as a beam, plate, truss, or slab.
An accelerometer is a device that measures the proper acceleration of an object. Proper acceleration is the acceleration of the object relative to an observer who is in free fall. Proper acceleration is different from coordinate acceleration, which is acceleration with respect to a given coordinate system, which may or may not be accelerating. For example, an accelerometer at rest on the surface of the Earth will measure an acceleration due to Earth's gravity straight upwards of about g ≈ 9.81 m/s2. By contrast, an accelerometer that is in free fall will measure zero acceleration.
Micromachines are mechanical objects that are fabricated in the same general manner as integrated circuits. They are generally considered to be between 100 nanometres to 100 micrometres in size, though that is debatable. The applications of micromachines include accelerometers that detect when a car has hit an object and trigger an airbag. Complex systems of gears and levers are another application.
A resonator is a device or system that exhibits resonance or resonant behavior. That is, it naturally oscillates with greater amplitude at some frequencies, called resonant frequencies, than at other frequencies. The oscillations in a resonator can be either electromagnetic or mechanical. Resonators are used to either generate waves of specific frequencies or to select specific frequencies from a signal. Musical instruments use acoustic resonators that produce sound waves of specific tones. Another example is quartz crystals used in electronic devices such as radio transmitters and quartz watches to produce oscillations of very precise frequency.
Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors. The name derives from typical device dimensions in the nanometer range, leading to low mass, high mechanical resonance frequencies, potentially large quantum mechanical effects such as zero point motion, and a high surface-to-volume ratio useful for surface-based sensing mechanisms. Applications include accelerometers and sensors to detect chemical substances in the air.
An electronic component is any basic discrete electronic device or physical entity part of an electronic system used to affect electrons or their associated fields. Electronic components are mostly industrial products, available in a singular form and are not to be confused with electrical elements, which are conceptual abstractions representing idealized electronic components and elements. A datasheet for an electronic component is a technical document that provides detailed information about the component's specifications, characteristics, and performance. Discrete circuits are made of individual electronic components that only perform one function each as packaged, which are known as discrete components, although strictly the term discrete component refers to such a component with semiconductor material such as individual transistors.
The piezoresistive effect is a change in the electrical resistivity of a semiconductor or metal when mechanical strain is applied. In contrast to the piezoelectric effect, the piezoresistive effect causes a change only in electrical resistance, not in electric potential.
An inductive sensor is a device that uses the principle of electromagnetic induction to detect or measure objects. An inductor develops a magnetic field when an electric current flows through it; alternatively, a current will flow through a circuit containing an inductor when the magnetic field through it changes. This effect can be used to detect metallic objects that interact with a magnetic field. Non-metallic substances, such as liquids or some kinds of dirt, do not interact with the magnetic field, so an inductive sensor can operate in wet or dirty conditions.
A MEMS electrothermal actuator is a microelectromechanical device that typically generates motion by thermal expansion. It relies on the equilibrium between the thermal energy produced by an applied electric current and the heat dissipated into the environment or the substrate. Its working principle is based on resistive heating. Fabrication processes for electrothermal actuators include deep X-ray lithography, LIGA, and deep reactive ion etching (DRIE). These techniques allow for the creation of devices with high aspect ratios. Additionally, these actuators are relatively easy to fabricate and are compatible with standard Integrated Circuits (IC) and MEMS fabrication methods. These electrothermal actuators can be utilized in different kind of MEMS devices like microgrippers, micromirrors, tunable inductors and resonators.
A split-ring resonator (SRR) is an artificially produced structure common to metamaterials. Its purpose is to produce the desired magnetic susceptibility in various types of metamaterials up to 200 terahertz.
A mechanical amplifier or a mechanical amplifying element is a linkage mechanism that amplifies the magnitude of mechanical quantities such as force, displacement, velocity, acceleration and torque in linear and rotational systems. In some applications, mechanical amplification induced by nature or unintentional oversights in man-made designs can be disastrous, causing situations such as the 1940 Tacoma Narrows Bridge collapse. When employed appropriately, it can help to magnify small mechanical signals for practical applications.
A terahertz metamaterial is a class of composite metamaterials designed to interact at terahertz (THz) frequencies. The terahertz frequency range used in materials research is usually defined as 0.1 to 10 THz.
A tunable metamaterial is a metamaterial with a variable response to an incident electromagnetic wave. This includes remotely controlling how an incident electromagnetic wave interacts with a metamaterial. This translates into the capability to determine whether the EM wave is transmitted, reflected, or absorbed. In general, the lattice structure of the tunable metamaterial is adjustable in real time, making it possible to reconfigure a metamaterial device during operation. It encompasses developments beyond the bandwidth limitations in left-handed materials by constructing various types of metamaterials. The ongoing research in this domain includes electromagnetic band gap metamaterials (EBG), also known as photonic band gap (PBG), and negative refractive index material (NIM).
A MEMS magnetic actuator is a device that uses the microelectromechanical systems (MEMS) to convert an electric current into a mechanical output by employing the well-known Lorentz Force Equation or the theory of Magnetism.
Microelectromechanical system oscillators are devices that generate highly stable reference frequencies used to sequence electronic systems, manage data transfer, define radio frequencies, and measure elapsed time. The core technologies used in MEMS oscillators have been in development since the mid-1960s, but have only been sufficiently advanced for commercial applications since 2006. MEMS oscillators incorporate MEMS resonators, which are microelectromechanical structures that define stable frequencies. MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.
A microscanner, or micro scanning mirror, is a microoptoelectromechanical system (MOEMS) in the category of micromirror actuators for dynamic light modulation. Depending upon the type of microscanner, the modulatory movement of a single mirror can be either translatory or rotational, on one or two axes. In the first case, a phase shifting effect takes place. In the second case, the incident light wave is deflected.
In electrical engineering, current sensing is any one of several techniques used to measure electric current. The measurement of current ranges from picoamps to tens of thousands of amperes. The selection of a current sensing method depends on requirements such as magnitude, accuracy, bandwidth, robustness, cost, isolation or size. The current value may be directly displayed by an instrument, or converted to digital form for use by a monitoring or control system.
