Tetrakis(dimethylamido)titanium

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Tetrakis(dimethylamino)titanium
(IV)
Stereo wireframe model of tetrakis(dimethylamino)titanium(IV) Ti(NMe2)4.png
Stereo wireframe model of tetrakis(dimethylamino)titanium(IV)
Names
Preferred IUPAC name
Tetrakis(dimethylamino)titanium(IV)
Systematic IUPAC name
Dimethyl[tris(dimethylamino)titanio]amine
Other names
Titanium(IV) dimethylamide
Identifiers
3D model (JSmol)
AbbreviationsTDMAT
ChemSpider
ECHA InfoCard 100.019.914 OOjs UI icon edit-ltr-progressive.svg
EC Number
  • 221-904-3
PubChem CID
UN number 2924

3398

  • InChI=1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4 Yes check.svgY
    Key: MNWRORMXBIWXCI-UHFFFAOYSA-N Yes check.svgY
  • InChI=1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
    Key: MNWRORMXBIWXCI-UHFFFAOYSA-N
  • CN(C)[Ti](N(C)C)(N(C)C)N(C)C
Properties
C8H24N4Ti
Molar mass 224.19 g/mol
Appearanceyellow liquid
Density 0.947 g/cm3
Boiling point 50 °C (122 °F; 323 K) at 0.05 mmHg
reacts with water
Hazards
GHS labelling: [1]
GHS-pictogram-flamme.svg GHS-pictogram-acid.svg
Danger
H225, H260, H314
P210, P223, P231+P232, P280, P303+P361+P353, P305+P351+P338
NFPA 704 (fire diamond)
NFPA 704.svgHealth 3: Short exposure could cause serious temporary or residual injury. E.g. chlorine gasFlammability 3: Liquids and solids that can be ignited under almost all ambient temperature conditions. Flash point between 23 and 38 °C (73 and 100 °F). E.g. gasolineInstability 2: Undergoes violent chemical change at elevated temperatures and pressures, reacts violently with water, or may form explosive mixtures with water. E.g. white phosphorusSpecial hazards (white): no code
3
3
2
Related compounds
Related compounds
 Tetrakis(dimethylamido)vanadium
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Tetrakis(dimethylamino)titanium (TDMAT), also known as Titanium(IV) dimethylamide, is a chemical compound. The compound is generally classified as a metalorganic species, meaning that its properties are strongly influenced by the organic ligands but the compound lacks metal-carbon bonds. It is used in chemical vapor deposition to prepare titanium nitride (TiN) surfaces and in atomic layer deposition as a titanium dioxide precursor. The prefix "tetrakis" refers the presence of four of the same ligand, in this case dimethylamides.

Contents

Preparation and properties

Tetrakis(dimethylamino)titanium is a conventional Ti(IV) compound in the sense that it is tetrahedral and diamagnetic. Unlike the many alkoxides, the diorganoamides of titanium are monomeric and thus at least somewhat volatile. It is prepared from titanium tetrachloride (which is also tetrahedral, diamagnetic, and volatile) by treatment with lithium dimethylamide: [2]

TiCl4 + 4 LiNMe2 → Ti(NMe2)4 + 4 LiCl

Like many amido complexes, TDMAT is quite sensitive toward water, and its handling requires air-free techniques. The ultimate products of its hydrolysis is titanium dioxide and dimethylamine:

Ti(NMe2)4 + 2 H2O → TiO2 + 4 HNMe2

In a related reaction, the compound undergoes exchange with other amines, evolving dimethylamine.

Use

TMAT has been used in metalorganic chemical vapor deposition (MOCVD). [3]

References

  1. ↑ GHS: Sigma Aldrich 469858
  2. ↑ D. C. Bradley and I. M. Thomas, "Part I. Metallo-organic Compounds containing Metal-Nitrogen bonds. Some Dialkylamino-derivatives of Titanium and Zirconium" J. Chem. Soc. 1960, 3857-3861. doi : 10.1039/JR9600003857.
  3. ↑ Yun, Ju-Young; Park, Man-Young; Rhee, Shi-Woo (1999-05-01). "Comparison of Tetrakis(dimethylamido)titanium and Tetrakis(diethylamido)titanium as Precursors for Metallorganic Chemical Vapor Deposition of Titanium Nitride". Journal of the Electrochemical Society. 146 (5): 1804. Bibcode:1999JElS..146.1804Y. doi:10.1149/1.1391847. ISSN   1945-7111.
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