ASML Holding

Last updated

ASML Holding N.V.
Company type Public
Industry Semiconductor industry
Founded1984 (joint venture)
1988 (independent company)
Headquarters Veldhoven, Netherlands
Key people
Products Photolithography systems for the semiconductor industry
RevenueIncrease2.svg 27.56 billion (2023) [1]
Increase2.svg€9.042 billion (2023) [1]
Increase2.svg€7.839 billion (2023) [1]
Total assets Increase2.svg€39.96 billion (2023) [1]
Total equity Increase2.svg€13.45 billion (2023) [1]
Number of employees
42,416 (2023) [1]
Website asml.com

ASML Holding N.V. (commonly shortened to ASML, originally standing for Advanced Semiconductor Materials Lithography) is a Dutch multinational corporation founded in 1984. ASML specializes in the development and manufacturing of photolithography machines which are used to produce computer chips.

Contents

As of 2023 it is the largest supplier for the semiconductor industry and the sole supplier in the world of extreme ultraviolet lithography (EUVL) photolithography machines that are required to manufacture the most advanced chips. [2] As of November 2024, ASML was the fourth most valuable company in Europe, and the second most valued European tech company, with a market capitalization of about US$264 billion. [3] [4]

ASML's corporate headquarters is in Veldhoven, Netherlands and the location for research, development, manufacturing and assembly. ASML employs more than 42,000 people [1] from 143 nationalities and relies on a network of nearly 5,000 tier 1 suppliers. [5] ASML has a worldwide customer base and over sixty service points in sixteen countries. [5] It has offices in the Netherlands, the United States, Belgium, France, Germany, Ireland, Israel, Italy, the United Kingdom, China, Hong Kong, Japan, South Korea, Malaysia, Singapore, and Taiwan. [5]

The company is listed on both the AEX and NASDAQ Stock Exchanges, as ASML. It is also a component of the Euro Stoxx 50 [6] and NASDAQ-100. [7]

Products

A diagonally cut ASML lens Lens from ASML.jpg
A diagonally cut ASML lens

ASML produces the photolithography machines used in the production of computer chips. In these machines, patterns are optically imaged onto a silicon wafer that is covered with a film of light-sensitive material (photoresist). This procedure is repeated dozens of times on a single wafer. The photoresist is then further processed to create the actual electronic circuits on the silicon. The optical imaging that ASML's machines deal with is used in the fabrication of nearly all integrated circuits and, as of 2011, ASML had 67 percent of the worldwide sales of lithography machines. [8]

ASML's competition consisted of Ultratech, Canon and Nikon, MKS Instruments, Lam Research and Cadence Design Systems.[ citation needed ]

Immersion lithography

Since immersion lithography was first proposed by Burn-Jeng Lin in the 1970s, [9] ASML cooperated with Taiwan Semiconductor Manufacturing (TSMC). In 2004, TSMC began commercial production of 90 nanometer semiconductor nodes using ASML immersion lithography. [10] As of 2011, their high-end TWINSCAN NXT:1950i system was used for producing features down to 32 nanometres at up to 200 wafers per hour, [11] using a water immersion lens and an argon fluoride laser that produces light at a wavelength of 193 nm. As of 2011, an average lithography machine cost 27 million. [12]

DUV lithography

Deep ultraviolet (DUV) lithography devices from ASML use light that penetrates the UV spectrum to print the tiny features that form the microchip's structure. [13]

EUV lithography

EUV lithography is a critical technology used to create the smallest and most complex chip designs. ASML holds a near-monopoly in the EUV market, with no significant direct competitors. The company's machines are capable of etching patterns as small as 8 nanometers, a remarkable achievement given that human hair is approximately 80,000 nanometers thick. [14]

Extreme ultraviolet lithography (EUV) machines produce light in the 13.5 nm wavelength range when a high-energy laser is focused on microscopic droplets of molten tin to produce a plasma, which then emits EUV light. The light is bounced off Zeiss mirrors onto the surface of a silicon wafer to deliver the designs for the chip. [15]

In 2009, the IMEC research center in Belgium produced the world's first functional 22 nm CMOS Static random-access memory memory cells with a prototype EUV lithography machine. [16] After decades of development, ASML shipped the first production extreme ultraviolet lithography machine in either 2011 [12] or 2013. [17]

As of 2022, ASML has shipped around 140 EUV systems, and it is the only company to manufacture them. [2] ASML's best-selling EUV product has been the TWINSCAN NXE:3600D, which costs up to $200 million. [2] Shipping the machine the size of a truck requires moving 180 tons with three Boeing 747s. [18]

ASML is working on the next generation of EUV systems, with the first shipments to customers for R&D purposes expected to take place at the end of 2023. [17] The platform is designated High-NA as it will increase the numerical aperture (NA) from 0.33 to 0.55, [17] and each system is expected to cost $300 million. [2]

ASML's EUV machines have experienced a significant surge in demand in recent years, driven by modern electronics' increasing complexity and performance requirements. This surge in demand has translated into steady revenue growth for the company, reaching $30 billion in 2023, up from $13 billion five years earlier. [14]

History

The company, originally named ASM Lithography, is named ASML as its official name and not an abbreviation. [19] It was founded in 1984 as a joint venture between the Dutch companies ASM and Philips. Nowadays it is a public company. When the company became independent in 1988, it was decided that changing the name was not desirable, and ASML became the official company name. [20]

ASML released the lithography system PAS 5500 in 1991, which became an extremely successful platform for the company. [21] The PAS 5500 was first utilized by Micron Technology, which was one of the world's largest producers of computer memory and storage, and ASML's largest customer at that time. [22] The success of the PAS 5500 line propelled ASML into strong competition with Canon and Nikon, who were the leaders in that era of the lithography market. [21]

In 1997, ASML began studying a shift to using extreme ultraviolet and in 1999 joined a consortium, including Intel and two other U.S. chipmakers, in order to exploit fundamental research conducted by the US Department of Energy. Because the CRADA it operates under is funded by the US taxpayer, licensing must be approved by Congress. It collaborated with the Belgian IMEC and Sematech and turned to Carl Zeiss in Germany for its need of mirrors. [23]

In 2000, ASML acquired the Silicon Valley Group (SVG), a US lithography equipment manufacturer also licensed for EUV research results, in a bid to supply 193 nm scanners to Intel Corp. [24] [25]

In 2002, it became the largest supplier of photolithography systems. [26]

At the end of 2008, ASML experienced a large drop in sales, which led management to cut the workforce by about 1000 worldwide, mostly contract workers [27] and to apply for support from the Dutch national unemployment fund to prevent even larger layoffs. [28] Two and a half years later, ASML expected a record-high revenue. [29]

In July 2012, Intel announced a deal to invest $4.1 billion into ASML in exchange for 15% ownership, in order to speed up the transition from 300 mm to 450 mm wafers and further development of EUV lithography. [30] [31] This deal was without exclusive rights to future ASML products and, as of July 2012, ASML was offering another 10% of the shares to other companies. [32] As part of their EUV strategy, ASML announced the acquisition of DUV and EUV sources manufacturer Cymer in October 2012. [33]

In November 2013, ASML paused development of 450 mm lithography equipment, citing uncertain timing of chipmaker demand. [34]

In 2015, ASML suffered intellectual property theft. A number of employees had been found stealing confidential data from its Silicon Valley software subsidiary that develops software for machine optimization. [35]

In June 2016, ASML announced their plans to acquire Taiwan-based Hermes Microvision Inc. for about $3.1 billion to add technology for creating smaller and more advanced semiconductors. [36]

In 2018, the Trump administration tried to block the sale of ASML technology to China, [37] but as of 2021, the ongoing global chip shortage as well as the "technological cold war" between the US and China had been a business opportunity for ASML. [18]

In November 2020, ASML revealed that it had acquired the German optical glassmaking firm Berliner Glas Group in order to meet increasing need for components for its EUV systems. [38]

In July 2021, European Commissioner Thierry Breton, visited ASML and announced a goal of at least 20% of world production of semiconductors in Europe by 2030, and support via a European Alliance on semiconductors. [39] After reporting earnings in July 2021, the company said they had a near monopoly for machines used by TSMC and Samsung Electronics to make the advanced chips. [40]

In February 2023, ASML claimed that a former worker in China "allegedly" stole information about the company's technology. This was not the first time that ASML was allegedly linked with an intellectual property breach connected to China. In its 2021 annual report, ASML mentioned that Dongfang Jingyuan Electron Limited "was actively marketing products in China that could potentially infringe on ASML's IP rights." [41] At the time, the United States Department of Commerce expressed concern about economic espionage against ASML. [42] In October 2023, Dutch newspaper NRC Handelsblad reported that the former employee who "allegedly" stole data about ASML's technology subsequently went to work for Huawei. [43]

In March 2023, the Dutch government placed restrictions on chip equipment exports in order to protect national security. This measure affected ASML as one of the most important companies in the global microchip supply chain. [44] Export license requirements came into effect in September 2023. [45]

In June 2023, the Netherlands' Institute for Human Rights ruled that despite the country's constitution prohibiting discrimination based on nationality, ASML was allowed to reject job applications from residents of countries subject to sanctions under the U.S. Export Administration Regulations (such as China, Cuba, Iran, North Korea, and Syria) in order to remain compliant with U.S. law. [46] [47] [48]

In January 2024, the Dutch government placed further restrictions on the shipment of some advanced chip-making equipment to China. [49] On 6 September 2024, the Dutch government tightened export controls on certain ASML chipmaking equipment, aligning its policy with U.S. restrictions to limit China's access to advanced technology amid safety and geopolitical concerns. [50] [51]

Finances

Financial data in € millions [1] [52]
Year20132014201520162017201820192020202120222023
Revenue 5,2455,8566,2876,7959,05310,94411,82013,97918,61121,17327,559
Net Income 1,0161,1971,3871,4722,1192,5922,5923,5545,8835,6247,839
Assets 11,51412,20413,29517,20618,19620,13722,63027,26730,23136,30039,958
Employees10,36011,31812,16813,99116,21920,04423,21926,61429,86136,11242,416

Shareholder

Top institutional holders [53]
HolderSharesDate reported% outValue
Price (T. Rowe) Associates Inc10,991,87829 June 20222.70%5,152,552,838
Capital World Investors6,492,25429 June 20221.60%3,043,309,048
Fisher Asset Management, LLC4,595,74129 June 20221.13%2,154,299,596
Capital International Investors3,919,23929 June 20220.96%1,837,182,511
Morgan Stanley3,156,57429 June 20220.78%1,479,675,659
WCM Investment Management, LLC3,089,50329 Sep. 20220.76%1,448,235,456
Edgewood Management Company2,919,49829 June 20220.72%1,368,543,910
State Farm Mutual Automobile Insurance Co2,834,22529 June 20220.70%1,328,571,338
FMR, LLC2,763,69529 June 20220.68%1,295,509,695
Sands Capital Management, LLC1,942,74029 June 20220.48%910,678,821
Top mutual fund holders [54]
HolderSharesDate reported% outValue
American Balanced Fund2,523,70229 September 20220.62%1,183,010,574
Growth Fund Of America Inc2,407,39529 September 20220.59%1,128,490,503
iShares Core MSCI EAFE ETF2,138,91929 September 20220.53%1,002,639,691
Washington Mutual Investors Fund2,138,04029 September 20220.53%1,002,227,651
Advisors Inner Circle Fund-Edgewood Growth Fd1,623,69429 June 20220.40%761,122,815
Price (T.Rowe) Growth Stock Fund Inc.1,627,21629 June 20220.40%762,773,788
iShares MSCI Eafe ETF1,319,87429 September 20220.32%618,704,149
Invesco ETF Tr-Invesco QQQ Tr, Series 1 ETF1,264,16129 September 20220.31%592,588,122
New Perspective Fund Inc1,217,87829 September 20220.30%570,892,503
Investment Managers Ser Tr-WCM Focused International Growth Fd1,197,95230 July 20220.29%561,551,991

Sponsorships

ASML became a sponsor of the PSV soccer club in 2019 together with Philips. VDL Groep, Royal Swinkels Family Brewers and Jumbo Supermarkets from the Brainport region. [55] [56] Together they run various initiatives like soccer training camps for school children, the development of interactive programs for teaching, assisting community members in need or who are new to the region, as well as supporting a vitality program that is online. [57] [58]

Awards

Related Research Articles

Photolithography is a process used in the manufacturing of integrated circuits. It involves using light to transfer a pattern onto a substrate, typically a silicon wafer.

<span class="mw-page-title-main">TSMC</span> Taiwanese semiconductor foundry company

Taiwan Semiconductor Manufacturing Company Limited is a Taiwanese multinational semiconductor contract manufacturing and design company. It is the world's most valuable semiconductor company, the world's largest dedicated independent ("pure-play") semiconductor foundry, and Taiwan's largest company, with headquarters and main operations located in the Hsinchu Science Park in Hsinchu, Taiwan. Although the central government of Taiwan is the largest individual shareholder, the majority of TSMC is owned by foreign investors. In 2023, the company was ranked 44th in the Forbes Global 2000. Taiwan's exports of integrated circuits amounted to $184 billion in 2022, accounted for nearly 25 percent of Taiwan's GDP. TSMC constitutes about 30 percent of the Taiwan Stock Exchange's main index.

<span class="mw-page-title-main">Photomask</span> Photolithographic tool

A photomask is an opaque plate with transparent areas that allow light to shine through in a defined pattern. Photomasks are commonly used in photolithography for the production of integrated circuits to produce a pattern on a thin wafer of material. In semiconductor manufacturing, a mask is sometimes called a reticle.

<span class="mw-page-title-main">Planar process</span> Process used to make microchips

The planar process is a manufacturing process used in the semiconductor industry to build individual components of a transistor, and in turn, connect those transistors together. It is the primary process by which silicon integrated circuit chips are built, and it is the most commonly used method of producing junctions during the manufacture of semiconductor devices. The process utilizes the surface passivation and thermal oxidation methods.

<span class="mw-page-title-main">Semiconductor Manufacturing International Corporation</span> Chinese semiconductor foundry

Semiconductor Manufacturing International Corporation (SMIC) is a partially state-owned publicly listed Chinese pure-play semiconductor foundry company. It is the largest contract chip maker in mainland China.

Nanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering of nanometer-scale structures on various materials.

<span class="mw-page-title-main">Extreme ultraviolet lithography</span> Lithography using 13.5 nm UV light

Extreme ultraviolet lithography is a technology used in the semiconductor industry for manufacturing integrated circuits (ICs). It is a type of photolithography that uses 13.5 nm extreme ultraviolet (EUV) light from a laser-pulsed tin (Sn) plasma to create intricate patterns on semiconductor substrates.

Next-generation lithography or NGL is a term used in integrated circuit manufacturing to describe the lithography technologies in development which are intended to replace current techniques. Driven by Moore's law in the semiconductor industries, the shrinking of the chip size and critical dimension continues. The term applies to any lithography method which uses a shorter-wavelength light or beam type than the current state of the art, such as X-ray lithography, electron beam lithography, focused ion beam lithography, and nanoimprint lithography. The term may also be used to describe techniques which achieve finer resolution features from an existing light wavelength.

<span class="mw-page-title-main">Stepper</span> Photolithographic Tool

A stepper or wafer stepper is a device used in the manufacture of integrated circuits (ICs). It is an essential part of the process of photolithography, which creates millions of microscopic circuit elements on the surface of silicon wafers out of which chips are made. It is similar in operation to a slide projector or a photographic enlarger. The ICs that are made form the heart of computer processors, memory chips, and many other electronic devices.

The "32 nm" node is the step following the "45 nm" process in CMOS (MOSFET) semiconductor device fabrication. "32-nanometre" refers to the average half-pitch of a memory cell at this technology level.

In semiconductor fabrication, the International Technology Roadmap for Semiconductors (ITRS) defines the "10 nanometer process" as the MOSFET technology node following the "14 nm" node.

Computational lithography is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography came to the forefront of photolithography technologies in 2008 when the semiconductor industry faced challenges associated with the transition to a 22 nanometer CMOS microfabrication process and has become instrumental in further shrinking the design nodes and topology of semiconductor transistor manufacturing.

The argon fluoride laser is a particular type of excimer laser, which is sometimes called an exciplex laser. With its 193-nanometer wavelength, it is a deep ultraviolet laser, which is commonly used in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research. "Excimer" is short for "excited dimer", while "exciplex" is short for "excited complex". An excimer laser typically uses a mixture of a noble gas and a halogen gas, which under suitable conditions of electrical stimulation and high pressure, emits coherent stimulated radiation in the ultraviolet range.

In semiconductor manufacturing, the International Roadmap for Devices and Systems defines the "5 nm" process as the MOSFET technology node following the "7 nm" node. In 2020, Samsung and TSMC entered volume production of "5 nm" chips, manufactured for companies including Apple, Huawei, Mediatek, Qualcomm and Marvell.

In semiconductor manufacturing, the "7 nm" process is a term for the MOSFET technology node following the "10 nm" node, defined by the International Roadmap for Devices and Systems (IRDS), which was preceded by the International Technology Roadmap for Semiconductors (ITRS). It is based on FinFET technology, a type of multi-gate MOSFET technology.

In semiconductor manufacturing, the 3nm process is the next die shrink after the 5 nm MOSFET technology node. South Korean chipmaker Samsung started shipping its 3 nm gate all around (GAA) process, named 3GAA, in mid-2022. On 29 December 2022, Taiwanese chip manufacturer TSMC announced that volume production using its 3 nm semiconductor node (N3) was underway with good yields. An enhanced 3 nm chip process called "N3E" may have started production in 2023. American manufacturer Intel planned to start 3 nm production in 2023.

In semiconductor manufacturing, the 2 nm process is the next MOSFET die shrink after the 3 nm process node.

Between 2020 and 2023, there was a worldwide chip shortage affecting more than 169 industries, which led to major price increases, long queues, and reselling among consumers and manufacturers for automobiles, graphics cards, video game consoles, computers, household appliances, and other consumer electronics that require integrated circuits.

The Chinese semiconductor industry, including integrated circuit design and manufacturing, forms a major part of mainland China's information technology industry.

<span class="mw-page-title-main">Shanghai Micro Electronics Equipment</span> SMEE, Chinese lithography machine manufacturer

Shanghai Micro Electronics Equipment (Group) Co., Ltd. (SMEE), is a semiconductor manufacturing equipment company based in Shanghai, China. The company is involved in the research, development, manufacture and sale of lithography scanners and inspection tools to the semiconductor manufacturing industry; it also provides support services to its customers.

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